IR1200-A/2200-A/3200-A

Regulator IR1200-A/2200-A/3200-A Series How to Order 0 2 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

Series IRV10/20 Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric None With bracket With bottom bracket Nil B L Inch Note 1) Accessories are shipped together. Bottom bracket 1

Cylinder Positioner IP200 Series

./0.05 MPa Ambient and uid temperature 5C to 60C Port size Rc1/4 (Gauge port Rc1/8) Weight Approx. 700 g (at 100 mm stroke) Construction/Principle of Operation When signal pressure enters input chamber q, the input diaphragm e is deected left. Clearance of the nozzle y is reduced causing higher back pressure at diaphragm A u.

How to Order ø 6, ø 8, ø 12, ø 16, ø 20, ø 25 MXQ  A Series Air Slide Table Double-ported Type

Air Slide Table Double-ported Type How to Order 6, 8, 12, 16, 20, 25 MXQA Series RoHS 30 ZA MXQ 12 M9BW A q w e r t y u i t Functional options u Number of auto switches q Bore size Body option: w Double-ported type e Standard stroke [mm] A 6 10, 20, 30, 40, 50 Symbol Functional option Nil Without functional option 1 With buffer 2 With end lock 3 Axial piping 4 With buffer, end lock 5 With

KPQ/KPG

KPQ/KPG Series Clean One-touch Fittings How to Order KP H 06 KP P 08 Q 01 KQ2 Applicable fitting size Clean One-touch fittings Made to Order KQB2 04 06 08 10 12 4 6 8 10 12 Specifications X53 With pipe tape Grease-free Symbol Q G KS KX Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel 304 Rubber material: EPDM (Fluorine-coated) X193 Note 1) Gasket: M-

MRHQ

Rotary Gripper Series MRHQ How to Order Lead wire length 0.5 m 3 m 5 m Nil L Z MRH 10 90 M9NV Q S M9N D Number of auto switches Rotary gripper Type of auto switch for detecting rotation Nil Without auto switch(Built-in magnet) 2 pcs. 1 pc.

PSE57  Series Pressure Sensor for General Fluids

Note q Lead wire and M12 connector (3 m), Straight ZS-37-A 1 pc. w Lead wire and M12 connector (3 m), Right angle ZS-37-B 1 pc. e Assembly-type connector PCA-1557743 1 pc. r Adapter with restrictor Rc1/4 ZS-31-X175 1 pc. t Adapter with restrictor Rc1/8 ZS-31-X188 1 pc. y Orice M5 ZS-48-A 1 pc. u q + e ZS-37-A-X448 The lead wire and connector are Nil Voltage output type 1 to 5 V 28 Current

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

, Plug-in/Non Plug-in How to Order F: Plug-in type Electrical entry Option Port size (P, A, B port) Thread type Nil F G Rc Nil Z None Nil 01 Without sub-plate 1 8 1 4 With light/surge voltage suppressor 02 N NPT Piping (P, A, B, EA, EB port) T NPTF EA, EB port: Rc 1/8 Nil B Side ported Bottom ported Option SJ 1 00 01 F Plug-in VFR2 5 SY 1 E 10 1 Non plug-in VFR2 02 SV CE-compliant SYJ Q

VM100F

Construction Side ported Bottom ported t y w u q q w u y t 3(R) (3-port only) 3(R) (3-port only) Non-actuated Non-actuated !4 i !0 2(A) 1(P) r o e !3 !1 !2 !3 e o r !0 i !1 !2 2(A) 1(P) Actuated Actuated 2(A) 1(P) 2(A) 1(P) Component Parts No. Description Material Note 1 Valve PBT 2 Valve sheet A PBT 3 Valve sheet B PBT 4 Valve sheet C PBT No.

Coolant Valve Series SGC Made to Made to order specifications Order How to Order (For details, refer to page 389)

Coolant Valve Series SGC Made to Order Made to order specifications (For details, refer to page 389) How to Order External pilot solenoid 2 2 Y 1 A 1 T Z 10 A 05 SGC Air operated 2 2 1 A A 05 10 SGCA q w e r t y u i o !0 !1 !2 !3 !4 !

Coolant Valve Series SGH

External pilot solenoid 1 Y A G 1 T Z B1 10 2 1 70 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series y Port size t Thread type e Seal material 70 r Pressure range w Valve type 1 2 3 4 1 2 A B 10 15 20 25 SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

VG342

consumption 4.8 W DC (Standard type) 2 W DC (Energy-saving type) No lubrication required Possible to use in vacuum or under low pressures External pilot Vacuum: Up to 101.2 kPa Low pressure: 0 to 0.2 MPa Changeable actuation: N.C., N.O., or external pilot Can be used as a selector or divider valve (External pilot) VG342 04 G 1 A Valve option CE-compliant Nil R Internal pilot External pilot Q

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

External pilot How to Order Pilot Valve Assembly (OUT) 2 (OUT) 2 00 VT3113 G 1 1 (IN) 3 (EXH) X (PA) 1 (IN) 3 (EXH) X (PA) Electrical entry CE-compliant Coil rated voltage Q CE-compliant Note) Nil TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light N.C.

VQ4000

VQ4000 Series How to Order Valves (Single Unit) [Option] Port size Body Nil Without sub-plate (For manifold) 0: Plug-in sub-plate 02 1/4 03 3/8 Thread type SV Nil Rc F G N NPT T NPTF Enclosure Nil Dust-protected SYJ Sub-plate W Dust-tight/ Water-jet-proof (IP65) SZ 0 5 VQ4 0 1 Plug-in 1 02 VF 1 5 G VQ4 2 5 1 02 Plug lead VP4 CE-compliant Porting specications VQ 1/2 Type of actuation Nil Q

Note) CE compliant: Electrical entry is applicable only for the DIN terminal. [Option] 3 Port Solenoid Valve Direct Operated Poppet Type Series VT307 Rubber Seal

How to Order 307 5 F G 1 V T 01 Body type T O Body ported For manifold CE-compliant Valve option Nil Q None CE-compliant Nil E Y V W Standard type Continuous duty type Energy-saving type Vacuum specification type Electrical entry and light/surge voltage suppressor: D/DO/DZ/DOZ only Bracket Nil F None With bracket Energy-saving type, Vacuum specification type Semi-standard Pressure specifications

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

ZSE20(F)_ISE20

1 Output RoHS 3-Screen Display High-Precision Digital Pressure Switch IP40 ZSE20(F)/ISE20 Series How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For vacuum/ compound pressure ZSE20 N M M5 q w e r t y u q Rated pressure range e Unit specification w Output specification ZSE20 0 to 101 kPa ZSE20F 100 to 100 kPa Symbol Description N NPN open collector 1

Cylinder with Lock

6 @5 @8 @9 #6 r #3 #4 o q$6y#9 #1 $4 #0 B A w !3 !4 !7 !8 @0 !9 @1 @3 @4 @6 #8 #7 $0 $1 $2 $3 $5 $7 $8 $9 @9 @7 #5 @2 B section (Release piston bushing) A section: 50 to 100 100 80 63 50 40 !2 !2 Component Parts Component Parts No.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

0oi q w e r t y u i !1 !2 No.