Guide Cylinder Series MGG

Auto switch capable (water resistant type) Note) RBL (coolant resistant) type shock absorbers are used. 20 to 50 Front mounting flange Dimensions 32 to 50 Front mounting flange R Y + Stroke Front mounting flange 63 Y + Stroke Q X 63 to 100 Front mounting flange R Y + Stroke (mm) Bore size (mm) 63 50 40 32 25 20 R 16 16 15 14 14 14 Y 119 116 101 90 88 88 Dimensions other than the above are

Rotary Cylinder Series MRQ

Symbol -X10 4 Long Stroke (101 to 200 mm) Refer to the table of number of the auto switches mounted below.

Refrigerated Air Dryers

inlet Port size C Ventilation direction Ventilation direction Compressed air outlet Port size Drain tube (O.D. 10, length approx. 0.8 m) [200 VAC specification] Terminal block K L H M N J 4 x 13 P [200 VAC specification] [100 VAC specification] Power cable (Length: approx.1.9 m) Power cable outlet (17) Dimensions [mm] Model Port size A B C D E F G H J K L M N P Q IDF1E Rc3/8 226 410 413 69 101

Compact Cylinder

Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 Refer to page 8 for cylinders with auto switches. 12 6 OUT 113 23 34 45 57 68 79 IN 85 17 25 34 42 51 59 Auto switch proper mounting position (detection at stroke end) and mounting height Minimum stroke for auto switch mounting Operating range Auto switch mounting 16 6 OUT 201 40 60 80 101

HRS100/150

Model Heat radiation [kW] Facility water specifications HRS100-WApprox. 19 Refer to "Facility water system" in the specifications on page 101. HRS150-WApprox. 28 Tap Water (as Circulating Fluid) Quality Standards The Japan Refrigeration and Air Conditioning Industry Association JRA GL-02-1994 Cooling water system Circulation type Make-up water 2.

Series AP500

) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

B H S + Stroke FX FZ ZZ + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BF BN BP BQ C D E F FV FD FT FX FY FZ GA GB GC GD GL Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 71 96 1/4 1/4 44 16 32 10 60 9 12 80 42 100 85 15 26 54 10 50 Up to 600 20 to 600 35 32 70 27 81 108 1/4 1/4 52 20 40 10 70 9 12 90 50 110 95 17 27 59 13 63 Up to 600 20 to 600 35 32 86 27 101

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

(mm) Female rod end (mm) With air cushion ZZ Bore size H Bore size S A1 GA RA ZZ WH WB WA MM Rubber Air 8 8 12 13 18 18 21 25 87 (96) 102 (114) 102 (114) 13 14 14 15 16 16 19 22 22 26 26 8 9 9 15 (17) 16 (18) 17 (18) 26 30 30 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5 M10 x 1.5 M14 x 1.5 M16 x 1.5 139 (148) 162 (174) 162 (174) 1.5 3 3 40 50 63 92 (100) 93 (101) 95 (103) 95 (104) 108 (

CNA

ZZ + Stroke Z FT RT DFZ FX ZZ + l + Stroke h + l -X 20Bore size (mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8 M8 x 1.25 Up to 800 Data 35 32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 M8 x 1.25 Up to 1000 35 32 86 27 101

15

V = 1.4 x Va V = 1.4 x 200 V = 280 mm/s M1E = 1/3 x FE x Z = 1/3 x 150.9 x 101/1000 = 5.1 [Nm] (A) m x g (z) 3A = M1E/M1max = 5.1/12.1 = 0.42 Z M1 FE Find the value of M1Emax when Va = 280 mm/s from Graph (11) c. Va Examine M3E.

ZSP1

From the above 2. position, turn the adjustment needle 1/4 to 1 turn clockwise. 1 kPa = 7.5 mmHg 1 kPa = 7.5 mmHg 101 101 Supply pressure (kPa) Supply pressure (kPa) Applicable adsorption nozzle range Applicable adsorption nozzle range 50 50 3. 2. 1. 20 20 ZSE ISE Right 0.2 0.3 0.4 0.5 0.6 0.7 0.3 0.5 0.7 0.9 1.1 1/4 to 1 turn Right Left PSE Adsorption nozzle diameter (mm) Adsorption nozzle

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

stroke type 8.4 56 33.6 28.0 22.4 16.8 11.2 39.2 OUT CXS6 4 -XB13 Low speed cylinder (5 to 50 mm/s) 4.6 31 18.6 15.5 12.4 9.3 6.2 21.7 IN -XB19 High speed cylinder 157 94.2 78.5 62.8 47.1 31.4 110 15.7 OUT CXS10 6 -XC18 NPT finish piping port 100 60.0 50.0 40.0 30.0 20.0 70.0 10.0 IN -XC22 Fluoro rubber seals 353 212 177 141 106 70.6 247 35.3 OUT CXS15 8 -X593 Without plate 252 151 126 101

MGC

-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

resistant type) Note) RBL (coolant resistant type) shock absorbers are used. 2020 to 50 Front mounting flange Data Dimensions 32 to 50 Front mounting flange R Y + Stroke Front mounting flange 63 Y + Stroke Q X 63 to 100 R Front mounting flange Y + Stroke 63 40 50 25 32 20 Bore size (mm) R 16 15 16 14 14 14 Y 119 Dimensions other than the above are the same as those on pages 8-21-22 to 25. 101

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

CNA

ZZ + Stroke Z FT RT DFZ FX ZZ + l + Stroke h + l -X 20Bore size (mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8 M8 x 1.25 Up to 800 Data 35 32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 M8 x 1.25 Up to 1000 35 32 86 27 101

PSE531 and PSE533 are remote vacuum sensors with a 1 to 5V analog signal output.  531 is for low vacuum range of -101 to 0 kPa, while PSE533 is for compound pressure from -101 to 101 kPa.  PSE sensors can monitor any non-corrosive, non-flammable gas.  The accuracy and environmental capabilities are suitable for general purpose applications. 

PSE531 and PSE533 are remote vacuum sensors with a 1 to 5V analog signal output.  531 is for low vacuum range of -101 to 0 kPa, while PSE533 is for compound pressure from -101 to 101 kPa.  PSE sensors can monitor any non-corrosive, non-flammable gas.  The accuracy and environmental capabilities are suitable for general purpose applications. 

Series VFR consists of 5 port pilot solenoid valves with rubber seals and base mounted type manifolds, available in plug-in and non plug-in styles. Port sizes range from 1/8 to 1/2 with Rc(PT), NPTF and G(PF) thread types available. Various options also available. VFR3000 series manifold, metric, Plug-in and non plug-in styles, Wiring types (non plug-in): grommet, grommet terminal, Conduit

Series VFR consists of 5 port pilot solenoid valves with rubber seals and base mounted type manifolds, available in plug-in and non plug-in styles. Port sizes range from 1/8 to 1/2 with Rc(PT), NPTF and G(PF) thread types available. Various options also available. VFR3000 series manifold, metric, Plug-in and non plug-in styles, Wiring types (non plug-in): grommet, grommet terminal, Conduit