ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

4 Port Solenoid Valve Series VQD1000

Enter in order starting from the first station on the D side.

Ejector Valve Unit, Series ZYY/ZYX

Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.

DOC1023126

Description Part Remarks 25 LE-D-19-3 32 LE-D-19-4 27 25 Return box Aluminum die-cast Coating 26 Return plate Aluminum die-cast Coating 27 Belt Mounting Bracket Part No.

Mini Rotary Actuator

Output Power Current Load Load Current Applicable voltage consumption voltage current leakage load drop D-M9N D-M9NV D-M9NW D-M9NWV DC28V NPN Type or less At 10mA 0.8V or 100A or Relay DC512 10mA 40mA less less at PLC 24V or less or less IC circuit D-M9P D-M9PV D-M9PW D-M9PWV DC24V (4.5to 28V) At 40mA PNP 2V or less type D-M9B D-M9BV D-M9BW D-M9BWV DC24V DC24V 2.5 to 4V 0.8mA or less (DC10

Fieldbus system CC-Link compatible SI unit

Occupied area Bit area Word area Unit name Unit part number Input (RX) Output (RY) Input (RWr) Output (RWw) EX600-SMJ (32 output) 32 bit EX600-SMJ (24 output) 24 bit SI unit EX600-SMJ (16 output) 16 bit EX600-SMJ (8 output) 8 bit EX600-DXB 8 bit EX600-DXC 8 bit EX600-DXC1 (With open circuit detection) 8 bit Digital input unit EX600-DXD 16 bit EX600-DXE 16 bit EX600-DXF 16 bit EX600-DYB 8

HRX-OM-Z015

Communication example Device Address : No.1 Read 16 pieces data from register 0030h.

SI unit for PROFINET

[September 2016] D: Contents revised in several places. [April 2017] E: Contents revised in several places.

Check Valve Series AK

4 6 8 10 12 3 5 10 17 25 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 2-Applicable tubing D Inch Size Weight (g) Effective area (mm2) D L M Model Applicable tubing O.D.

Digital Pressure Switch ( compatible)

Nil (Rear piping) L (Bottom piping) Bracket A A1 ZS-46-A1 Bracket C A3 ZS-46-E B ZS-46-B Panel mount adapter E ZS-35-B D ZS-46-D Panel mount adapter + Front protective cover F ZS-35-E -9No.PS-OMX0002-A Accessories/Part numbers If an option is required independently, order with the following part numbers. Items Part No.

VCL

W (44) T R (Y) Z VC T 25 VDW IN port 2-3/8 : Thread type l=280 l=300 VQ VX2 (X) (V) S Q 2.5 (N) VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C E A (U) VX3 D G C B VXA L1 L2 L3 16 VN LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21 5.5 16 OUT port n-

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Auto Switch Proper Mounting Position (mm) (mm) Auto Switch Mounting Height D-M9 D-M9W D-M9 D-M9W D-A9 Auto switch model Auto switch model D-A9 B A B A Bore size Bore size 20 25 32 40 Hs 30.5 59.5 34 55.5 20 25 32 40 Note) The above values are a guide in the stroke end detection of the mounting positions of the auto switch.

KB

D L A2 A1 M Part No.

Speed Controller: Standard Type Series AS In-line Type

Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

EX510-GMJ1.eng

Ensure input branch current does not exceed the specification range. 3 Mode No.4 Number of branch Valid port A OFF 16 points per port COM A and B B ON 8 points per port COM A to D Check the connection of UNLIT COM port branch to input unit. 4 COM A-D is not LIT 23 22 Troubleshooting (continued) CC-Link compatible communication No.

Compressed Air Preparation Filter

D-G

Digital Flow Switch ( compatible)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Flow diagnosis 0: Within range 1: Out of range (HHH/LLL). 9 Fixed output 0: Normal output 1: Fixed output (for checking output) 15 Error diagnosis 0: Error is not generated 1: Error is generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

High Vacuum L Type Valve

, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212

MGF

MGF 40 MGF 63 30, 50, 75, 100 MGF100 Minimum Strokes for Mounting Auto Switches (mm) Switch type D-Z7, D-Z8 D-Y5, D-Y6, D-Y7 Number of pcs. 10 5 1 pc. 15 10 2 pcs.

Air cylinder

As a guide, turn 90 from the position where it comes to feel tight. 12 < Applicable Auto switches > Solid state auto switch D-F59F5P D-J59J51F5BAL D-F59WF59PWJ59W Reed auto switch D-A53A54A56A64A67 D-A59W Fig.5 Mounting and movement of the auto switch (1) Fix the auto switch on the auto switch mounting bracket with the auto switch mounting screw (M4) and install the set screw. (2) Fit the