Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump Flow Rate: 1.08 CFM / 31 LPM , 1.08 CFM / 31 LPM, Max Pressure: 4 PSIG / 111 in H20 / 276 mbar , 4 PSIG / 111 in H20 / 276 mbar, Max Vacuum: 8 in HgV / -271 mbar , 8 in HgV / -271 mbar, Voltage (DC): 24, Item Dimensions: Length: 5 in / 127 mm Width: 4.6 in / 117 mm Height: 3.33 in / 85 mm

Thomas Oil-less Linear Diaphragm Compressor / Vacuum Pump Flow Rate: 1.08 CFM / 31 LPM , 1.08 CFM / 31 LPM, Max Pressure: 4 PSIG / 111 in H20 / 276 mbar , 4 PSIG / 111 in H20 / 276 mbar, Max Vacuum: 8 in HgV / -271 mbar , 8 in HgV / -271 mbar, Voltage (DC): 12, Item Dimensions: Length: 5 in / 127 mm Width: 4.6 in / 117 mm Height: 3.33 in / 85 mm

AIR SLIDE TABLE

29.7 42.7 42.7 28.7 67.7 67.7 A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 18 7.4 7.4 7.4 7.4 7.4 3 13.6 13.6 19.6 36.6 13.6 MXQ8B 29 13.9 13.9 13.9 13.9 13.9 13.9 4 11.1 11.1 19.1 19.1 38.1 38.1 MXQ12B 16.5 16.5 16.5 16.5 16.5 16.5 16.5 16.5 26.1 20.1 20.1 27.1 27.1 33.1 52.1 52.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 35 25 25 25 31

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

Stroke range Stroke range Bore size Bore size Rod end male thread Long stroke 31 to 199 31 to 199 12, 16 12, 16 Rubber bumper Stroke range 51 to 199 51 to 199 20 20 Rubber bumper is standard equipment for long stroke type. 51 to 299 51 to 299 25 25 Part no.: CQSB25-47D-XB10 Makes 47 stroke tube. B dimension is 69.5 mm. Part no.: CQSB25-47D CQSB25-50D with 3 mm width spacer inside.

Lubricator

Disassembly Drawing 31-32 12. Dimensions 33 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Non-rotating Double Power Cylinder Series MGZ

. @9, #4, #5, #6, #7, #8, #9, $0 Rod seal B 31 Piston seal Seal kits consist of items @9 and #4 to $0, and can be ordered by using the seal kit number corresponding to each bore size. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Type Nozzle model Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 Nozzle size Standard type Nil 01 02 03 04 11 12 13 21 22 23 24 31

ZSE2/ISE2

31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6-12 7 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Grommet type: ISE2-15 01 T1 01 T1 Connector type: ISE2-15C Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 ZSE ISE Indicator light (Red) Indicator light (Red

VCB

6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 VCB21 18 36 67.5 1/4 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 22 40 81.5 1/4, 3/8 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

VND

20 25 3 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 7 50 2 B Flange 17-4-38 3 Series VND Steam Valve: 2 Port Valve For Steam Model Port size Flow characteristics Weight (kg) Av x 10-5 Orifice size (mm) Model Rc Flange Note) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31

VXD21/22/23

differential (MPa) Connection Av x 10-6 (m2) Cv converted Effective area (mm 2) Water, Oil Air Flow characteristics Min. operating pressure differential (MPa) Orifice size (mm) Model Air Water Flange Thread Max. system pressure (MPa) Weight (g) Oil AC DC AC DC AC DC 1.0 1.0 1.0 1.0 32A 40A 50A 1 VXD2260-10 VXD2270-32 VXD2380-40 VXD2390-50 25 35 40 50 0.02 0.03 0.03 0.03 225 415 560 880 13 23 31

VEX1

Valve mounting side Internal pilot Common external pilot L: Dimensions n Equation L1=31n+29, L2+31n+14 n: Station 2 91 76 3 122 107 4 153 138 5 184 169 6 215 200 7 246 231 8 277 262 L L1 L2 5.1-25 VEX3 Manifold/VVEX4-1 VVEX4-1 Applicable valve: VEX3420/E3422 VVEX4-2 Applicable valve: VEX3420/E3422 Valve mounting side Internal pilot Common external pilot VEX AN AMC L: Dimensions n L1=46n+31

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

VV4QD12-l) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Station Dimensions n L 11 12 13 14 15 16 17 18 19 28 20 39 31

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP This is used when changing piping location.

asilltr

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

VCC

Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 650 Valve for Water and Chemical Base Fluids VCC Series Dimensions Manifold Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) VV2CC1 VVMCC1, VV3CC1 30 31

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 784 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Connector type: ISE2-15C Grommet type: ISE2-15 01 T1 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (