High Vacuum Angle Valve

70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 H B A G *1 The E dimension applies when the heater option is included.

CL

Fine lock series (Series CLJ2/CLM2/ CLG1) Maximum load at horizontal mounting: 70% or less of the holding force (Maximum static load) for spring lock Maximum load at vertical mounting: 35% or less of the holding force (Maximum static load) for spring lock Lock-up series (Series CL1) Maximum load at horizontal mounting: 50% or less of the holding force (Maximum static load) Maximum load at

100

rate Air consumption Air consumption 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Supply pressure [MPa] Supply pressure [MPa] Standard supply pressure: 0.33 MPa (Without valve) 0.35 MPa (With valve) Time to Reach Vacuum Tank capacity: 1 L Flow Rate Characteristics 100 90 80 70 60 50 40 30 20 10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

The load factor for each direction can be found as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 1000 1000 1000 Lz 800 800 800 600 600 600 L1 [mm] L3 [mm] L2 [mm] 400 400 400 Lx Ly 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 8 LEKFS Series Battery-less Absolute (Step

99

100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100

Compressed Air Preparation Filter

50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

CLA

MM I Bore 81ze (mm) 40 BQ DC eO eE F GA GB GC GO GL GR J K LV -500 20 500 27 30 70 60 96 Yo %, 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 76.5 ' 50 63 , 80 , 100 M14X1.5 M1 8 Xl .5 M18X 1.5 M22 X l.5 M26Xl .5 -'00 20-600 32 35 81 70 108 y.

Air Cylinder

135 95 160 120 185 25 Up to 200 38.5 3.5 4 6 22 3 36 49 10 15 7 52 70 140.5 95 165.5 120 190.5 145 215.5 32 Up to 200 45 3.5 4 7 25 3 44 58 10 16 8 53 70 142.5 95 167.5 120 192.5 145 217.5 40 Up to 200 54.5 4 4 7 30 3 54 71 10 16.5 8.5 63.5 76 160 101 185 126 210 151 235 CM3 CG1 CG1 CG3 JMB Rod flange: CG1FN MB 4 x FD FT F MB1 CA2 FX0.15 B E 0 0.05 CS1 CS2 B FX0.15 H 4 x FD Head flange:

JIS Standard Hydraulic Cylinder

1800 Rod series (mm) B-series rod C-series rod Bore size (mm) MM A MA D E K G H ZZ MM A MA D E K G H ZZ 32 34 M16 x 1.5 25 22 18 7 14 55 207 0.025 0.064 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 212 M16 x 1.5 25 22 18 7 14 55 207 0.025 0.064 50 46 40 M24 x 1.5 35 32 28 11 24 65 231 M20 x 1.5 30 27 22.4 9 19 60 226 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 257 M24 x 1.5 35 32 28 11 24 70

CNA

27 81 108 1/4 1/8 52 20 40 10 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (

CNA

27 81 108 1/4 1/8 52 20 40 10 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (

JXCx-OMT0034CN

ID Bit[70] 3 RWrn 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWrn+1 1) Bit[F8] 0 Bit[70] H RWrn+2 1) 2 065500 mm/s Bit[F8] L Bit[70] H RWrn+3 1) 2 0300 % Bit[F8] L Bit[70] 3 RWrn+4 1) Bit[F8] 2 ID1 4 2147483647 0.01mm Bit[70] 1 RWrn+5 1) Bit[F8] 0 Bit[70] 0 0255 RWrn+6 1) Bit[F8] 1 0255 4 Bit[70] 2 0255 RWrn+7 1) Bit[F8] 3 0255 RWrn+8 IF (ID=1) ID2 RWrn+917 ID1 ID3 RWrn+1826

LX

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

IDU/IDF

P N M L K J I H G F E D C A B Model Port size 70 65 580 580 470 317 289 363 157 77 405 (450) 131 (85) 152 630 570 260 620 R 3/4 IDF11C/11D 70 65 580 580 470 337 309 383 207 77 405 (450) 131 (85) 175 680 620 280 620 R 1 IDF15C/15C 70 30 700 700 600 351 323 398 199 642 405 (530) 98 183 760 680 295 750 R 1 IDF22C/22C1 70 30 776 780 680 376 348 423 249 722 405 (610) 98 208 810 730 320 830 R 1

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

IDX-OM-Y002

IDF60/70/80/90 Series 9.1 Safety instructions for use 9-1 IDX-OM-Y002 Chapter 9 Option M 9.2 Specifications Motor type auto drain (ADM200) is installed instead of the float type auto drain (standard). Table 1.

Environment

SpeedWork Load Graph (Guide) for Step Motor (Servo/24 VDC) LECP6, LECP1, LECPMJ Horizontal Vertical LEY25m LEY25m for acceleration/deceleration: 2000 mm/s2 80 35 Lead 3: LEY25C 70 30 Lead 3: LEY25C Horizontal work load [kg] 29 Vertical work load [kg] 50 55 60 Lead 6: LEY25B 20 40 Lead 6: LEY25B 15 Lead 12: LEY25A 30 10 20 7 10 Lead 12: LEY25A 0 0 0 300 200 400 100 500 600 0 300 200 400 100

Table of Contents

(mm) Model Effective area (mm2) Weight (g) 3-connection thread M L 8 6 4 DT04-00 32 DT06-00 36 10 10 10 12 5.7 14 15 16 23.5 23.5 DT08-00 47 12 14 16 25 24.5 DT10-00 10 12 26.5 70 DT12-00 28.5 14 17 70 17 19 49 55 17 17 Female Connector: DHF H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Modular Type Air Filter Series AF

53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specification Model With barb fitting B 137 173 177 253 266 With drain guide B 136 172 176 252 265 Metal bowl B 66 97 142 178 182 258 271

SY

Manifold spec. sheets Order made Dimension L 66 67 68 69 70 71 923 935.5 948 960.5 973 985.5 No.