F/ISE

Option Part no. 1 Bracket A ZS24A With 2 pcs. of mounting screws 1 Bracket D ZS24D With 2 pcs. of mounting screws 1 Panel mount ZS24E 1 ZS24F Panel mount + Front protection cover 1 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Specifications ZSE50F (Compound pressure) 100 to 100kPa 100 to 100kPa 500kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (Positive pressure) 0.000

EXxx-OMO0027

Ignores excess current per unit for 100 msec. after inrush. Disable Does not ignore excess current Enable Ignores excess current.

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

ITV0000

D side 1 2 3 ...

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

S Single vane D Double vane 90 90 180 180 270 270 Double vane 90 90 100 100 Nil Without auto switch (Built-in magnet) Single vane S 1 pc.* Nil 2 pcs.** M Without M9 type auto switch (Built-in magnet) u Connecting port location * For applicable auto switch model, refer to the table below. ** The operating range and hysteresis of the D-M9 are different from those of the other auto switches.

XLG Series

66 2 11 55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62

ZSM1-115/121

Example: Full scale reading 100 [kPa] Setpoint for output 50 [kPa] Repeatability 1 [% F .S.] F .S. = 100 [kPa] 0 [kPa] = 100 [kPa] 1 [% F .S.] = 100 [kPa] x 0.01 = 1 [kPa] The deviation from the setpoint is 1 [kPa]. This means that the output can become energized anywhere between 49 to 51 [kPa]. (Refer to the chart below.)

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Hydraulic Cylinder

Hydraulic Cylinder 20, 25, 32, 40 CHN Series 7 MPa CHQ How to Order CHK CHN CHN CHN 25 100 M9BW L C CHM Auto switch mounting bracket Note) Note) This symbol is indicated when the D-A9 or M9 type auto switch is specified. This mounting bracket does not apply to other auto switches (D-C7 and H7, etc.) Applicable to 20 only.

AMD

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122

EX500-GEN2_eng

Branch port C (COM A) 6 Max. 16 devices (Input unit: Max. 2 devices/Output unit: Max. 2 devices per branch) Slave connection nember 7 Branch port D (COM D) 20 m or less total extension per branch Branch cable length Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result.

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Digital Pressure Switch

D Shows how precisely the pressure can be indicated or set by the digital Pressure switch. When 1 digit = 1 kPa, the pressure is given with an increment of 1 kPa, e.g., 1, 2, 3, , 99, 100. Digit (Minimum setting unit) E Error indication With the self-diagnostic function of the Pressure switch, this indicates that there is an error which could cause a switch failure.

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

ZL3-OM00601

(mg/m3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 point() 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000 3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 3.3.2 Air pressure 1) Operation with a pressure exceeding the maximum operating pressure leads to breakage of the product.

30

D-X Technical Data 1141

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100

Multi-channel Digital Sensor Monitor ( compatible)

(Additional range) Relation between the sensor input and pressure display Pressure range Set value A B Fine differential pressure 0.002 0 kPa 2 kPa Vacuum pressure -0.1 0 kPa -101 kPa Compound pressure F0.1 -100 kPa 100 kPa Low pressure 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa Positive pressure 1.0 0 MPa 1 MPa 1.6 0 MPa 1.6 MPa 2.0 0 MPa 2 MPa 5.0 0 MPa 5 MPa High pressure 10.0 0 MPa 10 MPa 20.0