VFR3000 Series

Note 1) Maximum number is 8 stations. Note 2) It is used as +COM and -COM. Note 3) Station numbers are started from D side although connector is mounted on D or U Side. Note 1) Maximum number is 8 stations. Note 2) It is used as +COM and -COM.

Micro Mist Separator Series AFD20/30/40

Applicable model AFD20 to 40 Nylon bowl Symbol Nil B Body size Body size Port size Metal bowl with level gauge Symbol 20 30 40 AV 20 30 40 (3) Thread type With bowl guard 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 (5) (4) C AFD20 to 40 Nil N (1) Drain guide 1/4 Rc AU Flow direction: Right Left NPT (4) D AFD30/40 Drain cock with barb fitting: 6 x 4 nylon tubing Name plate and caution plate for bowl

Mist Separator Series AFM20/30/40

4 AFM30/40 Float type auto-drain (N.C.) (4) Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right Left AFM20 to 40 N (1) Drain cock with barb fitting: 6 x 4 nylon tubing Float type auto-drain (N.O.) (4) W F (2) AFM30/40 D AFM30/40 Note 1) Drain guide is NPT 1/4 (applicable to AFM30 and 40), and the exhaust port for auto-drain comes with 3/8" Onetouch fitting

Electric Actuator Triple Axis P&P Unit

800 18 6 750 16 5 700 16 5 650 14 4 600 14 4 550 22 8 950 22 8 1000 11 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 12 6 (26) 14 2-M5 x 0.8 Effective screw length 10 130 80 4-M6 x 1depth14 4-M8 x 1.25depth18 31 4H10depth 5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60

MHT2

Rail mounting Direct mounting D-F7BA D-F7lW D-F7lF D-J79W D-A7lH/A80H D-A73C/A80C D-F7l/J79 D-F7lV/J79C D-F9BA D-F9lW D-F9lWV D-F7lWV D-A9l D-A9lV D-F9l D-F9lV D-A79W D-A7l/A80 Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 7 9.5 12.5 15.5 A 10 14 12 14.5 B 10.5 13 16 19 A 13.5 17.5 15.5 18 B 3.5 6 9 12 A 6.5 10.5 8.5

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

VXZ

80 60 10 60 40 1 AC DC AC/DC Maximum 10 (1) 5 (2) Minimum Note 1) Dew point is below 10C Note 2) Below 50 cSt Note 3) D, E, N, P, etc. in parentheses represents option symbol.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

The maximum piston speed for retraction is approximately 70% that of extension. 848 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Auto Switch Proper Mounting Positions (Detection at Stroke End) CXSJ6 / CXSJ6 11122122D B (mm) D-M9 23 (24) 2 (1) 13 (11.5) 8 (9) D-A93 19 (20) 14.5 (15.5) 6.5 (7.5) Symbol A B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for

Ejector Valve Unit, Series ZYY/ZYX

SX3000-75-1A SY3140-5LZ SY3240-5LZ ZYY35LZ-10S-E15C 1 SET 1 SET 1 SET 1 SET is the symbol for a built-in assembly. Add the symbol at the beginning of part numbers for solenoid valves, etc. to be mounted, and enter these together in order from the D side.

Miniature Tubing & Miniature Fittings Series TU/M

(mm) Fitting size D 3.2 4 Weight g B C E F A Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Parts list Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 3

DM

Removing Loosen clamp ring (1), and separate the multiconnector into two parts, multiconnector into two parts, socket side and plug side. (1) Clamping ring K (3) Case B M D H Insertion and removal of tube D + Driver (5) Barb (6) Clamp bolt (3) Case (2) Stopper Connection 1.

HRX-OM-X010

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

wire (PNP) M9PAV*1 M9PA*1 M9PAV*1 M9PA*1 v v V v v 2-wire 12 V M9BAV*1 M9BA*1 M9BAV*1 M9BA*1 v v V v v Grommet Water resistant (2-color indicator) With diagnostic output (2-color indicator) 4-wire (NPN) 5 V, 12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V A72 A72H V V Grommet 100 V A93V*2 A93 A93V*2 A93

HRX-OM-W002

HRX-OM-W002 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

HRX-OM-M005

HRX-OM-M005 Table of Contents Table of Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using this Product . 1-1 1.2 Hazards. 1-2 1.2.1 Hazard Levels . 1-2 1.2.2 Definitions of Serious injury and Minor injury . 1-2 1.2.3 Symbols . 1-3 1.3 Hazard Warning Label . 1-4 1.3.1 Type of hazard warning label . 1-4 1.3.2 Location of hazard warning label . 1-5 1.4 Location of Model Label . 1-

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type

Mixed mounting type Nil M 24 Standard Note 1) Connector mounting position Specify the valve stations not exceeding the maximum stations. Mixed mounting Note 2) Mounting position D side Symbol D Connector entry direction Note 1) There is no need to enter anything when you operate either the SJ2000 or SJ3000 series alone.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

to 300mm/s 20, 25: 0.5 to 300mm/s Piston speed Minimum Strokes for Auto Switch Mounting Unit: mm D-A9, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 Note) 20 Note) 10 10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

E-P HYREG

sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Symbol Base mounted 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 A (3) (3) M5 3(R) 1 8 2(A) 1(P) 1 (3) (3) 1 4 1 4 3 3 8 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 3(R) 1 4 1 1 2 2(A) 1(P) 9 2 2 Note 3) Only bracket or foot may be mounted.