Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper 1 N1 1 N1 11221122112211222 N2 2 N2 2 N2 2 N2 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D 1 N1 MHZ2-10D MHZ2-16D MHZ2-20D MHZ2-25D Specifications and dimensions other than the above are the same as the basic type (including narrow type).
PAB-OM-K007 Operation Manual Process pump PAF5410 Contents 1. Precautions for handling P2 2. Precautions for installation P3 3. Description and function of individual port P3 4. How to use P3 to 4 5. Maintenance and check P4 6. Specification and how to order P5 to 6 7. Discharge capability P7 to 8 8. Troubleshooting P9 to 10 9.
JIS cass 2 Standad @w $enhs C[028 Distance From Auto Switch Side Face e1 ili-l ffi 7T\ '1 (f|/ l r : 1 1 Distance From Auto Switch Top Face : t l . : : : : : : : . . 9 ^ ^ .9 o t2 ,r,rl fl^l rtu 1 0 : : : : : : : : : , : : azw, 7 Sg|'ies C[028P flislr ilrulrtric rierd Rt$i$h Through Hole Mount:CDQ2BPtrnDM-n I Note Eemale lhredd and rod drmensrons are the same as for clevis and head llange
Suction cover PVF 1 9 Sound absorbing material B ZL112-SP01 Front cover Without valve PVF 2 10 Sound absorbing material A (set no. for 9, 10 &11) End cover PE 3 11 Suction filter Body 4 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.
Table 1 shows the tightening torque for reference. LQHB Table 1 Tightening Torque of Union Nut TL TIL 6.
List of Ozone Resistant Products 1: Standard (HNBR) . 9 7. List of Ozone Resistant Non-HNBR Type Products 2: Series 80. 10 Reference Data: Photochemical Oxidants . 11 1.
JIS cass 2 Standad @w $enhs C[028 Distance From Auto Switch Side Face e1 ili-l ffi 7T\ '1 (f|/ l r : 1 1 Distance From Auto Switch Top Face : t l . : : : : : : : . . 9 ^ ^ t2 ,r,rl fl^l rtu .9 o 1 0 : : : : : : : : : , : : azw, 7 Sg|'ies C[028P flislr ilrulrtric rierd Rt$i$h Through Hole Mount:CDQ2BPtrnDM-n I Note Eemale lhredd and rod drmensrons are the same as for clevis and head llange
Seal cap (for M12 connector socket): 1 pc. Accessory Seal cap (for M12 connector socket): 17 pcs. EX500-DX B Install the product using 2 M5 screws x 20 mm minimum with a head 9 to 11.
(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt xing brackets 2 pcs.
Same as page 3-3-9 Manifold Specifications Type 25 Type 25F Stacking type, non plug-in type Stacking type, plug-in type Common SUP and EXH 2 to 20 stations 2 to 20 stations Valve C6 (One-touch fitting for 6) Model Manifold type P(SUP), R(EXH) Valve stations 4(A), 2(B) port location 1(P), 3/5(R) port Port size 4(A), 2(B) port M5 x 0.8 Valve effective (1) 1 2: 0.48, 4 3: 0.85 VZ1120 area
An actuator can be mounted from two directions, which can be selected depending on the equipment or work piece. 1. Front mount type 1.
9 @0 @1 @2 @3 Rod seal Set of left nos. !9, @0, @1, @2, @3 Piston seal MGF100-PS O-ring A NBR Seal kit is not compatible with the clean series. Seal kit includes !9 to @3. Order the seal kit based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-L-010 (10g) O-ring B O-ring C 136
Lead wire length symbols: 0.5 m Nil(Example) C73C 1 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 9-2-16 for details. For details about auto switches with pre-wire connector, refer to page 9-15-66. 9-2-10
pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.
9 @0 @1 @2 @3 @4 @5 26 Cylinder tube gasket NBR Set of left nos. !9, @0, @1, @2, @3, @4, @5, #0 Wear ring A Special resin Wear ring B Special resin Note) Cushion seal @4 may be difficult to be replaced. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.
9 @0 @1 @2 @3 Rod seal Set of left nos. !9, @0, @1, @2, @3 Piston seal MGF100-PS O-ring A NBR Seal kit is not compatible with the clean series. Seal kit includes !9 to @3. Order the seal kit based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-L-010 (10g) O-ring B O-ring C 136
9 @0 @1 @2 @3 @4 @5 26 Cylinder tube gasket NBR Set of left nos. !9, @0, @1, @2, @3, @4, @5, #0 Wear ring A Special resin Wear ring B Special resin Note) Cushion seal @4 may be difficult to be replaced. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.
>) +# = 8 "$ >) +# = 9 ' ) Table (1) Rated Voltage Electrical EntryElectrical Option Caution Be sure to read before handling. Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. 4 ' C ' C 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) ) D G C D, T S S L, Z 3 ) E E 3 0 ( 2 17-3-69 2 The VX series will be revised shortly.