Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 5,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 2, Drain Exhaust: Float switch, Flow Direction: [Right] From Left to Right, Size of Body: 2B, Accessory: Bracket, Float

Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 5,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 2, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 2, Drain Exhaust: Float switch, Flow Direction: [Right] From Left to Right, Size of Body: 2B, Accessory: Panel, Float

Rated Flow Range: 102 (10 to 1000 L/min), Thread Type: Rc, Port Size: 04 (1/2), Output Specifications: A (Out 1: NPN; Out 2: NPN), Option 1: w/Lead Wire and M8 Connector, 3m, Unit Specification: Unit Selection Function, Option 2: No Bracket, Calibration Certificate: A (Yes)

High Vacuum L Type Valve

1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3) for 0.5MPa 46 102

Servo Motor Controller (24 VDC)

Upgrade software be able to download on SMC website. http://www.smcworld.com/ 46 - 11.5 Teaching box LEC T1 3 E G Enable switch Teaching box Nil No enable switch Cable length S Equipped with enable Initial language 3 3m Stop switch E English J Japanese G Equipped with stop switch Dimensions No Name Function 102 34.5 (1) LCD Liquid crystal display (with backlight) (2) Ring The ring to hang

LG1H

When a positioning unit loaded with a differential line driver method is used, it is 10 m or less. 102 Incremental Type Series LECSA Absolute Type Series LECSB Control Signal Wiring Example: LECSB LECSBLECSB Positioning unit 24 VDC Note 2) Note 4) QD75D (Manufactured by CN1 Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 46 DOCOM Zero speed detection

LJ1H

When a positioning unit loaded with a differential line driver method is used, it is 10 m or less. 102 Incremental Type Series LECSA Absolute Type Series LECSB Control Signal Wiring Example: LECSB LECSBLECSB Positioning unit 24 VDC Note 2) Note 4) QD75D (Manufactured by CN1 Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 46 DOCOM Zero speed detection

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

When a positioning unit loaded with a differential line driver method is used, it is 10 m or less. 102 Incremental Type Series LECSA Absolute Type Series LECSB Control Signal Wiring Example: LECSB LECSBLECSB Positioning unit 24 VDC Note 2) Note 4) QD75D (Manufactured by CN1 Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 46 DOCOM Zero speed detection

Centering Unit

For safety instructions, actuator and auto switch precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http:// www.smcworld.com Stroke [mm] 12 20 30 50 Table center movable range [mm] 24 40 60 100 Centering accuracy [mm] 1 or less Action Double acting Fluid Air Operating temperature 32 to 140F [0 to 60C] Operating pressure 58 to 102

Floating Joint

Reduction of length when using JT and JCM Max. 77 mm Product length Reduction when using JT Overall Length Comparison JT Series New New Size JA + CM2 Series New NewJT + JCM Series Reduction rate Workpiece 20 139.5 mm 90.2 mm 35% 32 149.0 mm 96.0 mm 36% 40 189.0 mm 112.0 mm 41% Cylinder (JCM) Weight Comparison JA Series Size JA + CM2 Series New NewJT + JCM Series Reduction rate 20 190 g 102

Return Filter FH100 Series

switch. 519 FH100 Series Dimensions Differential pressure indication switch 62 F Differential pressure indicator Blanking cap (65) A 2 x Rc (d) (34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102

Suction Filter with Case FH99 Series

120 130 78 78 130 20 5 20 4B Weight (kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 23 M8 x 1.25 Thread depth 8 35 6 84 180 2.4 3.4 28 35 M8 x 1.25 Thread depth 8 50 8 91 240 3.6 5.0 44 50 M8 x 1.25 Thread depth 9 62 10 103 300 5.4 7.8 62 77 M10 x 1.5 Thread depth 12 10 118 360 9.7 13.5 90 102

Hydraulic Filters

pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA-24 FHIA-28 FHIA-32 22.2 90 72 116 154 38 60 11 M8 x 25 56 260 1.8 27.7 110 80 133 177 44 70 11 M8 x 25 70 290 2.7 34.5 43.2 128 95 185 234 49 86 15 M10 x 30 86 340 4.6 49.1 61.1 152 110 214 268.5 54.5 100 15 M12 x 35 102

Thermoelectric Bath

Fan Alarm output connector 0.77 (19.5) 3.8 (96) Signal cable Model no. label 3.4 (86) 0.87 (22) 1.45 (37) 2.67 (68) Display/Operation panel Signal connector 4.6 (116)0.79 (20) Air OUT 5.4 (138) 3.9 (99) 2.4 (62) 1.4 (36) THERMO-CON 3.7 (95) SIGNAL WARNING Air IN Air IN 6.7 (170) 7.1 (180) ALARM PV WARNING SV OUT1 OUT2 DC AL1 DI RDY COM AL2 OUTPUT FUNC MODE COMMUNICATION AC 2.1 (53) 4.0 (102

Lightweight and Compact

IDH Anchor bolt fixing position 1015 (Dimension of anchor bolt fixing bracket) 4 x 15 (Thermo-chiller dimension) (377) 173 102 Facility water outlet Rc1/2 597 (970) (Thermo-chiller dimension) 28 Facility water inlet Rc1/2 354 View A 208 Accessory: Y-strainer mounting view For water-cooled type Mount it by yourself on the circulating fluid return port. 153 Circulating fluid return port Rc1

Refrigerated Air Dryer

37.8C), Outlet air temperature: 50F (10C), Ambient temperature: 100F (37.8C) C E B IDH Grommet with membrane Power cable outlet (0.7 [17 mm]) K Option symbol ID Dimensions Unit: inch [mm] Moderate pressure specification Auto drain bowl: Metal bowl with level gauge A B C D E Model IDFB6E to 37E IDG 0.6 [15] 1.3 [32] 9.0 [230] 3.8 [97] 1.3 [34] IDFB4E, 6E, 8E, 11E IDK 1.7 [43] 10.2 [258] 4.0 [102

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 44.5 L2 = 11.5n + 59 n: Stations (Max. 12 stations) Dimensions 12 182.5 197 225 235.5 11 171 185.5 212.5 223 10 159.5 174 200 210.5 9 148 162.5 187.5 198 8 136.5 151 175 185.5 7 125 139.5 162.5 173 6 113.5 128 150 160.5 5 102 116.5 137.5 148 4 90.5 105 125 135.5 3 79 93.5 125 135.5 2 67.5 82 112.5 123 1 56 70.5 100 110.5 L1 L2 L3 L4

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS20-10 S SS ZZ Z 10 92 116 30 20 102 126 40 30 112 136 40 40 122 146 40 21-/2210-/11-/12CXS20-20 CXS20-30 CXS20-40 CXS20-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 132 156 60 21-/2210-/11-/12100 182 206 80 CXS20-75 CXS20-100 21-/2210-/11-/1275 157 181 60 21-/2210-/11-/12857 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS25, CXSL25 10-/11221221Air Preparation Equipment

Support Guide/11-LEFG Series

(= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180 11-LEFG16-S-150 244 157 230 11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102

Series AP3500

(P.124) 102 Series AP4500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish