EXxx-OML0010CN

(Clr Counter Value) ON/OFF 31 5. (Parameter Default) 32 6. (Clear Error Log) 32 -27No.EX-OML0010CN-C 1. 1. Tag Input (23 ) -28No.EX-OML0010CN-C 2. EX600 (SI SW ) SI SW Re Register 2. Re Register PROFIBUS DPSI -29No.EX-OML0010CN-C 3. Hold/Clear Hold/Clear SI PLC Hold/Clear 3. Hold/Clear HandheldSwitch HandheldPLCHold/Clear SwitchSI Hold/Clear -30No.EX-OML0010CN-C 4. 4.

M-E05-1-LQ1

LQ1E-T p. 5-15 Male Branch Tee LQ1B-M p. 5-5 Tubing Extension Union Tee LQ1T-T p. 5-16 Female Branch Tee LQ1B-F p. 5-5 Tubing Extension Union Elbow Reducing LQ1E-T-R p. 5-17 Union Elbow LQ1E p. 5-6 Tubing Extension Union Tee Reducing LQ1T-T-R p. 5-18 Union Tee LQ1T p. 5-6 Space Saving Type Union Elbow LQ1E-SN p. 5-19 Panel Mount Union LQ1P p. 5-7 Space Saving Type Union Tee LQ1T-SN p. 5-20

High Vacuum L Type Valve

The maximum operating 0 5 10 15 20 25 30 ( temperature for the valve is 150oC. If the heater temperature is over 200oC or valve temperature is Time (sec.) Duration of the inrush current flow (as a guide) over 150oC, please use thermostat to control the heaters to prevent overheating.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

Input block

No.EX-OME0004-F PRODUCT NAME Input block MODEL / Series / Product Number EX250-IE1 EX250-IE2 EX250-IE3 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 8 Mounting and Installation 9 Installation 9 Wiring 10 Internal circuit 12 Display/Setting 18 Troubleshooting 19 Specifications 20 Dimensions 21 Option 22 -1No.EX-OME0004-F Safety Instructions

Compact Guide Cylinder

INFORMATION Compact Guide Cylinder With Flange 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Plate side flange type added.

Safety Speed Control Valve (SSC Valve) Series ASS 1

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

VZA2000

VV5ZA2-20-051 1 pc. VV5ZA2-50-051-01 1 pc. VZA2121-M51 pc. VZA2141-21 pc. VZA2221-M53 pcs. VZA2241-23 pcs. VVZ2000-31A-2 1 pc. VVZ2000-31A-31 pc. Base mounted 2 position double 2 position single Sub-plate Assembly Part No.: VZA2000-S-01 Thread type Mounting bolt and gasket are not included.

TM

Cut the groove for separation with side cutters. 15-6-31 1 Related Products: Multi-holder Series TMA Can be used to secure the KE series exhaust valve with One-touch fitting. One-touch fitting can also be secured. Union tee: KQT, Elbow: KQL, Straight: KQH Depending on the number of holders required, they can be separated as desired.

Plug-in/Plug Lead: Single Unit

Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 Single VQ51 0 12 35 or less 0.59 (0.67) 0.14 38 or less 2.9 38 or less 14 0.18 3.4 Metal seal 2 position 3 position VQ51 1 16 40 or less 0.58 (0.66) 0.33 43 or less 4.4 43 or less 17 0.31 4.7 Rubber seal VQ52 0 12 20

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ5000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 10 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 155.00000 lb. VVD.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 169.00000 lb. VVD.

VNH

Switching nozzles on supplying coolant liquid. 1 5 1 5 Ex. 3) 2 port valve: Nozzle ON/OFF 1(P) port (Coolant liquid SUP port) 1(P) port (Coolant liquid SUP port) 2(A) Port (Coolant liquid EXH port) 2(A) Port (Coolant liquid EXH port) VNH 1(P) 12(P1) Nozzle 2(A) 3(B) port (Coolant liquid EXH port) 3(B) Plug Tank Coolant Pump 2 port valve application (Not applicable for 7.0 MPa model) 17-4-31

Electro-Pneumatic Proportional Valve

Long life 20 million cycles or more (PVQ30) Low leakage Direct poppet construction enables low leakage, while deenergized. External low leakage Series PVQ30 Series PVQ10 SMC supports innovations in automatic and energy saving systems by way of electropneumatic control for medical, general industry, etc.

Thermo-con/

(Page 20) Communications RS-232C/RS-485 Weight Approx. 14 kg Approx. 18 kg Approx. 21 kg Approx. 31 kg Approx. 33 kg Accessories Power supply connector, Operation Manual Power supply cable should be ordered as an option (sold separately, page 22) or prepared by the user.

Flat Type Pad/Bellows Type Pad with Groove

Form/Diameter Model Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-P1 V V V V ZP3EA-P2 V V ZP3EA-P3 V V V ZP3EA-P4 V V ZP3EA-P5 V V ZP3EA-P6 V Pad diameter 32 to 50 Pad form Flat type with groove Dimensions: Pad Unit ZP3E-32UMlZP3E-40UMlZP3E-50UMl36 31 27 27 23 20 27 23 20 10.3 (Plate) 10.3 (Plate) 10.3 (Plate) 13.5 13 13

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SYJ 5 port manifold, clean room, 4/5 PORT SOLENOID VALVE, VVD, 0.237 lb

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ5000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 10 port sizes available 4/5 PORT SOLENOID VALVE. SYJ 5 port valve manifold. 100.00000 lb. VVD.

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, "MFLD, 4/5 PORT SOLENOID VALVE

The series is available in base mounted or body ported styles.Bar stock type manifold for SYJ5000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 10 port sizes available, SYJ 5 PORT VALVE MANIFOLD, 4/5 PORT SOLENOID VALVE, VVD, 155 lb