6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 780 MXS 1322Air Slide Table Dimensions: MXS6 13221322Axial piping (6): MXS6-P 26.3 Max. 5.6 Operating port 2 x M3 x 0.5 12 5.5 11.5 8 Other dimensions are the same as those of basic type. 781 MXS 1322Air Slide Table Dimensions: MXS6L / Symmetric Type 1322Air
OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity
Use the manifold specification sheet to specify. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.
[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456
45 50 5 6 6 8 8 8 8 10 21 25 25 27 149 153 155 191 The bracket is shipped together.
Panel mounting hole T.T. 23 16.5 1.5 1.5 3 18.5 Max. 6 M5 x 0.8 (Pilot exhaust port) PE EXH.1 SUP.
4 6 6 4 21 Bore size (mm) 20 6 6 1.5 (1) 3.5 3.5 22.5 10 7.5 2.5 10 7.5 24.5 25 7 7 3.5 (1) 5.5 5.5 24.5 11 9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.
) M-5-4-P01 Cap nut C3604 (With electroless nickel plated) M-01H-6, M-5H-6 M-5HL-6, M-5HLH-6 M-5-6-P01 200
74 64 2 x 6 ERR PWR 38 27 15 ERR PWR 2 x 3.5 Mounting hole 4 x 3.5 Mounting hole L-bracket (Option) Flat bracket (Option) M8 x 1 Cable connection thread 15 6 50 82 73 Breathing hole Note) 3.7 3.7 (M3 x 0.5) 1 VACz OUT port (4, 5/32) VAC port (4, 5/32) 13.7 OUTx 13.7 3 5 ATMc 2 5 ATM port (4, 5/32) 3 6 7 3.5 L-bracket (Option) Flat bracket (Option) 19 Port Location No.
Technical Data 1519 A CY1L Series Auto Switch Mounting Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range (mm) Bore size Auto switch model 6 10 15 20 25 32 40 D-A7 /A8 D-F7 /J7 6 6 6 6 6 6 6 3 3 4 3 3 3 3.5 D-F79F 4.5 4.5 4.5 4.5 4.5 4.5 4.5 Since this is a guideline including hysteresis, not meant to be guaranteed.
8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.
8 10 12 12 10 6 8 10 Tube O.D.
S070 32 24 15 17 9 1/8 (P, R port) 42 VQ VKF VQZ L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (WO): SYJ54-WO-01 VZ VS VFN Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9
(Refer to pages 15-6-3 to 15-6-5 for details.)
Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.
Figure 5-6 Status Screen 3 Table 5-5 Status Screen 3 No.
8)1 65 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4, 6, 8)1 105 + 100 (n 2) (n = 2, 4, 6, 8)1 110 + 100 (n 2) (n = 2, 4, 6, 8)1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same surface