Series MXP Precision Air Slide Table

Switch operating range Stroke (mm) 20 41 29 47 35 Type 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B MXP10 Auto switch MXP12 3 Screwdriver (Grip diameter 5 to 6mm) MXP16 2 Color indication solid state switch D-F9BW(V), D-F9NW(V), D-F9PW(V) mm Switch operating range Stroke (mm) 20 42 28 48 34 Type 25 47.5 33.5 30 56 46 10 32 18 15 37.5 23.5 A B A B A B MXP10 MXP12

CUJ

CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (without magnet) (mm) b Bore Size A (a) B (b) C (c) B 4 6 8 10 10 () 15 () 13 () 13 (13) 19 (22) 13 (33) c + Stroke C + Stroke 13 () 21 () 13 () A 13.5 (15) 22 (24) 13 (36) a Numbers in parentheses are the dimensions of SMC Series CU cylinders.

70pvvna

1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 10 (P2) Manual override VNA11 VNA12 12 (P1) 12 (P1) External pilot solenoid 1 (A) 2 (B) 2 (B) 1 (A) 17-4-7 4 Series VNA Port size 6A, 8A, 10A Applicable cable O.D. 6 to 8 (D.T) 125 (Conduit terminal: T DIN terminal: D) 108.2 (Grommet terminal: E) 106.7 (Grommet: G) 63 (Air operated) Pilot port (Back side P2) Manual override Courtesy of Steven Engineering, Inc

Mist Separator Regulator

Rc C4SF-2J-A G C4SFF-2J-A NPT C4SFN-2J(Z)-A Rc C4SF-2-A G NPT C4SF-2(Z)-A Appearance and part No. -19- Option symbol 8 8J Semi-standard symbol Semi-standard: 8 Semi-standard: 8J Piping port thread ty pe (9) Part No. Piping port thread ty pe (9) Part No. Rc G NPT C4LF-8(Z)-A Rc C4LF-8J-A G C4LFF-8J-A NPT C4LFN-8J(Z)-A C4LF-8-A Appearance and part No.

Ｍ icro Mist Separator Regulator

Rc C3SF-2J-A G C3SFF-2J-A NPT C3SFN-2J(Z)-A Rc G NPT C3SF-2(Z)-A C3SF-2-A Appearance and part No. -16- Option symbol 8 8J Semi-standard symbol Semi-standard: 8J Semi-standard: 8 Piping port thread ty pe (9) Part No. Piping port thread ty pe (9) Part No. Rc C3LF-8J-A Rc C3LF-8-A G C3LFF-8J-A G NPT C3LFN-8J(Z)-A NPT C3LF-8(Z)-A Appearance and part No.

VZ5000

Note 1) At rated voltage Note 2) Plug-in should be ZNR 3-3-68 5 Port Solenoid Valve Base Mounted Series VZ5000 (2) Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Type of actuation Weight (g) 1 4/2 (P A/B) 4, 2 (A, B) 1, 5, 3 (P , EA, EB) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Grommet 200(120) 240(160) C [dm3/(sbar)] Cv b Cv b Single Double Closed center Exhaust

Mist Separator

Assembly of Optional Parts Bracket 1) Mounting of bracket A Insert bracket A from the front of the mist separator so that the fingers of the bracket A hold the mist separator at the groove and the bottom of the body. Mist separator Groove Bottom of the body Fingers Bracket A 2) Mounting of bracket B Fix the bracket B with the set screw (2 pcs.) included in the package.

Micro Mist Separator

Assembly of Optional Parts Bracket 1) Mounting of bracket A Micro mist separator Insert bracket A from the front of the micro mist separator so that the fingers of the bracket A hold the micro mist separator at the groove and the bottom of the body. Groove Bottom of the body Fingers Bracket A 2) Mounting of bracket B Fix the bracket B with the set screw (2 pcs.) included in the package.

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

A Model Mounting Switch operating range A B A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

PSxx-OMM0006CN

(A-B)/4 n_1=B+(A-B)/4 A= H_1= (A-B)/2 H_1= (A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 ( 1) -35No.PS-OMM0006CN-E [F 5] / / 0 <> [F 5] -36No.PS-OMM0006CN-E [F 5] / 5 ms ooo1 C_5 10 ms o.r1 () () ( ) OUT2 C_5C_5 C_5() EEPROM -105.0105.0 kPa -210210 kPa -0.1051.050 MPa -1.1551.155 MPa 10.0-105.0 kPa -115.0115.0 kPa -37No.PS-OMM0006CN-E [F 6] 5R.D. <> [F 6] [FSC] 1 [F 6] -38No.PS-OMM0006CN-E

DOC1003626

HRS400-A-46 3.7 Communication sequence 3-7 DOC1003626 Chapter 3 Serial communication Table 3.8-1 ASCII mode message frame Address c)Function d)Data e)Checksum a)Start b)Device (LRC) f)End [:] XX XX XX XX XX XX XX XX [CR] [LF] a) Start The start of the message. [:](3Ah) (ASCII) b) Device Address This is a number to identify this product. 1" is the default setting.

Mist Separator

Assembly of Optional parts 1) Bracket 1) Mounting of bracket A Insert bracket A from the front side of the product so that the finger of the bracket A engages with the groove and the bottom of the body (see drawing on the left). Product Groove Bottom of the body Bracket A Finger 2) Mounting of bracket B Bracket B Fix the bracket B with the set screw (2pcs.) included in the package.

Compact Cylinder

A (Mounting groove no.) B (Mounting groove no.) C (Mounting groove no.)

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

/

Possible to use as a 2-port valve by plugging the 3(B) port.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

A 2 to 200 L/min flow range option has been added. A rear ported type has been added. A flow adjustment valve (0.05 to 5 L/min) has been added.

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

0.01

Dimensions SFD100 different diameters SFD200 different diameters One-touch fitting dimensions(A, B) One-touch fitting dimensions(A, B) Port size q Port size w Port size q Port size w 4 8 4.5 5.5 SMC 6 10 Basic dimension 114.5 Basic dimension 72 5.5 4.5 Fitting dimension A Fitting dimension B Fitting dimension A Fitting dimension B 8 12 5.5 5 Total length 81 (A + 72 + B) 76.5 (72 + A) 81.5