Low Differential Pressure Sensor

Description ZS-28-A Note D Power supply/Output connection cable Mounting screw (M3 x 8L) (accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

Micro-Mist Separator with Prefilter Series AMH

D-SMC, P-63 (M) 2nd printing September 1996. D-SMC, P-59(YG) March 1997. 29(YG) Printed in Japan.

HEC-OM-S008

to 100% = FF9CH to 0064H 0050h Control operation See chapter 5.10.3 0051h Target temperature 10 to 60.0oC = 03E8H to 1770H *1) 0052h Offset value -9.99 to 9.99oC = FC19H to 03E7H 0053h PB range 0.30 to 9.90oC = 001EH to 03DEH *1) 0054h Reserved R/W 0055h I constant 1 to 999 sec = 0001H to 03E7H 0056h D constant 0.00 to 99.90 sec = 0H to 2706H *1) 0057h Heat output limit 0 to 100% = 0H to

Pressure Sensor Controller

kPa to 100 kPa -100 kPa 100 kPa For low pressure 0 to 100 kPa 0 100 kPa -10 kPa 0 to 1 MPa 0 1 MPa -0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa -50 kPa Range Rated pressure range C D F For low differential pressure 0 to 2 kPa 0 2 kPa -0.2 kPa -32No.PS-OMG0002-G Dimensions Body dimensions Mounting using mounting option Mounting by bracket Mounting by panel mount -33No.PS-OMG0002-

PFxx-OMS0001CN

d. == 1 / ,/ ([F20](47 )) e. ( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

LFE-OMZ0012

Remarks Weight Lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

JXCx-OMT0030CN

46 - DC24VSVON a) b) c) d) e) 47 - D 100 154 1. 2. 3. 4. 5. 6. 7. 8. -10603585% 48 - 155 5 156 49 - 16/ 161 / UL1310Class2 162 ON 50 - 5 () 51 - 163 50mm 164 () 52 - 165 166 D 100 167 53 - Revision history No.JXC-OMT0030CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are

Compact Vacuum Unit Ejector/ Vacuum Pump System

When increasing the number of stations, order the required number of single unit of the body type 3 valve (b) and the required number of either the pressure sensor (d) assembly (c) or the vacuum pressures switch assembly (d).

SI unit for EtherNet/IP TM

Fieldbus interface connector layout BUS OUT: M12 4-pin socket, D-coded (SPEEDCON) No. Designation Description 1 TD+ Transmit Data + 2 RD+ Receive Data + 3 TDTransmit Data 4 RDReceive Data BUS IN: M12 4-pin socket, D-coded (SPEEDCON) No.

CYV

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing o u Resin materials eliminated Laser marking is employed for the model designation. d t g e a c 2 s u s d i e Reduction of outgassing due to surface treatment n o u d t R g g e a c 1 s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

t o o g e a n L c 2 s u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Solid state auto switch: D-M9B, D-M9N B E Model Auto switch operating range Stroke Stroke A 40 50 150 100 75 100 10 20 30 125 75 20 30 125 150 10 40 50 13-/22-MXS6 0.4 0.4 0.4 11.6 17.5 9.6 9.6 9.6 21.6 27.6 1.5 10 13-/22-MXS8 4.9 0.1 0.9 8.9 16.9 41.9 14.9 9.9 10.9 18.9 26.9 51.9 1.5 11.6 13-/22-MXS12 74.4 32.4 22.4 12.4 14.4 24.4 22.4 12.4 2.4 4.4 14.4 35.4 64.4 2.5 45.4 15.6 13-/22

4/5 Port Air Operated Valve Series SYJA3000

Station 20 372 359 353 340 3 83 70 81 68 6 134 121 129 116 8 168 155 161 148 10 202 189 193 180 Station 2 66 53 65 52 4 100 87 97 84 5 117 104 113 100 7 151 138 145 132 9 185 172 177 164 11 219 206 209 196 12 236 223 225 212 13 253 240 241 228 14 270 257 257 244 15 287 274 273 260 16 304 291 289 276 17 321 308 305 292 18 338 325 321 308 19 355 342 337 324 Station n L1 L2 L1 L2 A, B port size

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

Rotary Actuator

Size 30 Size 50 to 100 Stopper screw AFor end adjustment in clockwise direction Stopper screw BFor end adjustment in counter clockwise direction Fig. (1) Rotation range of shaft keyway (size 30) Fig. (2) Rotation range of shaft keyway (size 50 to 100) 19 - Internal structure and parts description Rotary actuator internal structure Component parts No.

53

Wired remote controller HRS HRS CV004 1 HRS 090 Accessories HRS 100/150 Symbol Accessories Nil None 1 With cable (Approx. 20 m) 2 With cable (Approx. 50 m) 3 With cable (Approx. 100 m) HRSH 090 HRSH 090 HRSH HRSE HRZ HRZD Wired remote controller Displayed items Operable items HRW Circulating fluid discharge temperature Operation start/stop Circulating fluid discharge set temperature Circulating

Compact manifold regulator ARM5 Series

150 200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1