VSA4

4 T Symbol EA, EB Side Side A, B Side P F 0 Side Side 2 Option 1 9 Bottom Others Manifold type Type V N Type E E Symbol Type Stations A and B port sizes are same as port sizes in standard body size.

Digital Flow Switch ( compatible)

(page 75) 8010 0x1F4A 0 R Flow rate PD intercept b F32 N The conversion method from the communication value to the actual measurement value is the same as the method for process data. 8030 0x1F5E 0 R Flow bottom value S16 0 N 8020 0x1F54 0 R Flow peak value S16 0 N -200 to 4200 0 R Accumulated mantissa F32 N 0 to 9 Accumulated PD Accumulated value conversion factor = Current accumulated

3 Port Solenoid Valve Series VQ100 1

L N Electrical entry U Option Note) Except latching and large flow type.

3 Port Solenoid Valve Series VQ100

L N Electrical entry U Option Note) Except latching and large flow type.

3 Port Solenoid Valve Series VQ100 1

L N Electrical entry U Option Note) Except latching and large flow type.

High-precision Digital Pressure Switch

(Page 66) 2001 0x07D1 0 R Process data Conversion formula Intercept b F32 N 2002 0x07D2 0 R Peak value U16 0 N 2003 0x07D3 0 R Bottom value U16 0 N information Diagnostic Number of pressurizing errors U16 0 N 0 ~ 1000 2004 0X07D4 0 R 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

Rotary Cylinder Series MRQ Size: 32, 40 1

Find the moment of inertia IB for the rotation of shaft (B). 2. Next, IB is entered to find IA the moment of inertia for the rotation of shaft (A) as a + b 2 2 A = ( ) b a 2 B = m 12 No. of teeth = b 11-10-3 4 Technical Data 3: Theoretical Output 5.

Compact Cylinder/Guide Rod Type Series CQM

magnet) Nil S n 2 pcs. 1 pc. n pcs.

VCC

3 A-y A-u A-i A-y B-q B-w B-e B-r B-w B-t B-y B-t Orifice body PTFE seal O-ring Sleeve O-ring O-ring O-ring Name plate O-ring O-ring Orifice body Name plate O-ring O-ring O-ring O-ring Orifice O-ring O-ring Name plate O-ring O-ring O-ring O-ring PEEK resin Special PTFE Special FKM POM Special FKM Special FKM Special FKM Special FKM Special FKM PEEK resin Special FKM Special FKM HNBR Special

Air Catch Sensor Series ISA

stations, the bracket is mounted on the first and n th sensor from the left. 1 2 n MPa MPa MPa Addition of Manifold Stations 1.

ZQ-OM01401

) (7)(8) 5 - No.ZQ-OM01401-B ZQ 05 1U A-K15LO B-VA M W-3 3-N (1) (2) (3) (4) (5) (6) (7)(8) (9) (1) (6) 05 0.5 07 0.7 W (2m) 10 1.0 (7) (V ) (8) (P ) (2) 1U 0 (M5x0.8) 3M 1 3.2 () 0 (M5x0.8) 2 4 () 2 4 () (3) 3 6 () 3 6 () 4 3.2 () 5 4 () B 5 4 () 1) (9) (4) ( [kPa] VA -100 to 100 NPN1 + VB PNP1 + N 1) ZFC (5) 2) M SI (kPa) 2) (99 10 ) ZZQ108A-B S C-A (1) (2

ZQ-OM01301

B Slotted locking type O.D.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 LE-CP-3-B 360 LE-CP-5-B 590 LE-CP-8-B 1060 LE-CP-A-B 1320 LE-CP-B-B 1920 LE-CP-C-B 2620 Robotic cable Connector B terminal no.

Multi-channel Digital Sensor Monitor ( compatible)

(page 80) 0x1F4A Process data 0x1F4B 0x1F4C 0x1F4D Conversion formula Intercept b 0 R N F32 (8010) (8011) (8012) (8013) 0 R H_Hi (Peak value) N U16 0x1F54 0x1F55 0x1F56 0x1F57 (8020) (8021) (8022) (8023) Refer to process data on page 76 to 80. 0x1F5E 0 R H_Lo (Bottom value) N U16 0x1F5F 0x1F60 0x1F61 (8030) (8031) (8032) (8033) 1: "R" means Read and "W" means Write. 1: When using IODD, only

High-precision Digital Pressure Switch ( compatible)

(Page 64) 2001 0x07D1 0 R Process data Conversion formula Intercept b F32 N 2002 0x07D2 0 R Peak value U16 0 N 2003 0x07D3 0 R Bottom value U16 0 N information Diagnostic Number of pressurizing errors U16 0 N 0 ~ 1000 2004 0X07D4 0 R 1: "R" means Read and "W" means Write. 2: Refer to the table below for the symbol.

ChemicalThermo-con

B A FG + EXT.SENSOR REMOTE ON/OFF POWER I N O N IN WATER WATER SIGNAL DC OUT AC 1.65 (42) 1.3 (33) OFF Model no. label (Heat exchanger) 0.2 (5) 0.08 (2) Terminal block 3.3 (83) 1.3 (33) Facility water outlet 3/8" x 1/4" 0.7 (18) 11.6 (294) 0.7 (18) (5.5 (140)) Model no. label (Controller) DC connector Power switch Purge inlet (M5) Circulating fluid inlet Signal connector Power connector 13.0

CEx-OMQ0011

8370: JIS B 9960-1:-((1:) JIS B 8433-1:2007--1 *2) 1. 2. 3. a. b. c. 4. a. b.

Serial Transmission System Series EX250 Series EX500

N.C N.C 2 position double (metal) 4 position dual 3 port valve (B) 24 VDC 5 4 2 A B Note) B 1 5 3 P EA EB N.O N.O C: Locking type (Manual) Note 1) Function 2 2 position double (rubber) 4 position dual 3 port valve (C) Standard type (1 W) High voltage type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y D: Slide locking type (Manual) Note) A B 4 2 C Seal Note 2)

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

LEC-OM036xx

Writing step data method (1)Write 0 in OUT Data n+3. (2)Write the motion profile (position, speed) in OUT Data n+4 to n+18 Refer to "7.1 Step data" of the operation manual of the controller(LEC6). (3)Write the step data number which is changed in Out Data n+2. (Setting data range is from 0 to 63.) (4)Write 1 in OUT Data n+3.