Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).
-2 5 NL/min 50 NL/min PF2A750 18 CFM10 -2 176 CFM10 -2 10 NL/min 100 NL/min PF2A711 3.5 CFM10 -1 35.5 CFM10 -1 20 NL/min 200 NL/min PF2A721 7 CFM10 -1 71 CFM10 -1 50 NL/min 500 NL/min PF2A751 18 CFM10 -1 176 CFM10 -1 0.927= -41No.PF-OMO0007CN Revision history Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation
(3 m) PZ With power supply cable (10 m) G1 With AC adapter (with AC cord) G2 With AC adapter (without AC cord) Note) The AC cord is only for use in Japan.
Dimensions Refer to P13, P14 and P15 for the dimensions of the magnet gripper, valves and auto switches. 10 - 3-5. Connector and pin layout Attached cable is fixed to the product. Connect the communication cable correctly. Refer to P.18 for assembling method. NPN output M8 8 Pin connector (Plug) PIN No.
15 20 25 30 40 35 0 2 4 6 8 10 12 16 14 18 20 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Parts list Material Number Parts o !
Refer to P.18 for assembling method.
Specifications Fluid Air Proof pressure 1.5MPa Max. operating pressure 1.0MPa Min. operating pressure 0.05MPa -10 to +60oC. -10 to +60o Ambient and fluid temperature C with built-in magnet (No freezing) Lubrication Not required (non-lube) Stroke length tolerance to 250st +1.0 mm 0 +1.4 mm 251 to 1000st 0 Cushion Air cushion or Rubber bumper Piston speed 50 to 500mm/sec Action Double acting
No.SFOD-OMO0004-B PRODUCT NAME Electrostatic Sensor Monitor MODEL/ Series IZE11 Table of Contents Safety Instructions 2 Model Identification and How to Order 7 Summary of Product parts 8 Mounting and Installation 10 Installation 10 Wiring 11 Setting 14 Measurement mode 15 Function selection mode 18 Default setting 18 F0 Select connect sensor 19 F1 Operation of OUT1 20 F2 Operation of OUT2
OFF Secret code input Selects the necessity of secret code input for key lock. page 18 OFF The value in ( ) is for the indication unit "P".
OFF: Aulo currenl down lunction olt OFF Half step Fullslep Felease Seftng Aulo current down; Funclion lo automatically reduce 50% Of current output 10 moor when stopped.
Dimensions Refer to P13, P14 and P15 for the dimensions of the magnet gripper, valves and auto switches. 10 - 3-5. Connector and pin layout Attached cable is fixed to the product. Connect the communication cable correctly. Refer to P.18 for assembling method. PNP output Conversion cable M8 8 Pin connector (Plug) PIN No.
Dimensions Refer to P13, P14 and P15 for the dimensions of the magnet gripper, valves and auto switches. 10 - 3-5. Connector and pin layout Attached cable is fixed to the product. Connect the communication cable correctly. Refer to P.18 for assembling method. PNP output M8 8 Pin connector(Plug) PIN No.
Side ported type is approximately 10% smaller. Note 3) Note 4) Note 4) Note 2) Based on JISB8375-1981 (Values for supply pressure of 0.5MPa with light/surge voltage suppressor. This will change depending on pressure and air quality.)
Setting Setting range 10 0 to 6 1 0 to 9 1: The station number should be any number from 00 to 63. If a node is set to a number greater than 63, the "NS" LED will light up.
Electrical wiring 10 8. Maintenance 11 9. Mounting accessories (option) 12 10.
10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.
Size M Size N Unit number Pilot unit part number Part number Orifice size Stroke 10 to 85mm (Accessory Nil) Actuator Capacity 90cm3 P368010-20 125 150 P565010-18 P36801080 0.7 35 to 100mm (Accessory E) 180cm3 P368010-21 110 195 P565010-19 P36801081 1 50 to 140mm (Accessory F) P368010-22 110 275 Fork lever joints (IP8100 type) Two types of the fork lever joints are available dependent upon
D Blue (BU) Fixed end MS Translucent (N) LQ Fluid Air MQR Burst Pressure Characteristics Curve and Operating Pressure Max operating pressure (at 20C) 0.8 MPa T One-touch fittings Applicable fittings 10 18 24 30 36 Min. bending radius (mm) 5 Refer to the burst pressure characteristics curve.
3-050 4-070 5-080 6-100 8-125 10-125 14-150 18-150 22-150 26-150 30-150 36-150 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M36 x 1.5 180 200 180 200 Caution Maintenance Warning 1.
2 outputs SI unit only Note 10) r Rated Voltage Note 8) w Nominal Nozzle Size Unit selection function Note 9) NPN 1 output Digital pressure System Nominal size Voltage Symbol 00 07 10 12 15 Symbol 5 6 0 SI unit only Note 10) switch for vacuum 100 to 100 24 VDC Vacuum pump system Unit selection function Note 9) with energy saving PNP 1 output 12 VDC 0.7 function Note 11) SI unit only Note