Electric Actuator / Low profile slider type

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In posn[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -23- Example of step data input (2) < Positioning operation Relative > a b c d e f g h i j k No.

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

Guide Cylinder/Compact Type Series MGC

MGJ Front mounting flange MGP MGQ 2 x P (Rc, NPT, G) MGG MGC MGF MGZ R Y + Stroke MGT (mm) R Y P Bore size (mm) 20 25 32 40 50 1/8 14 88 1/8 14 88 1/8 14 90 1/8 15 101 1/4 16 116 D-X Individual -X 395 Series MGC Slide Bearing Allowable End Load and Deflection F Y MGCM 20-R MGCM 25-R MGCM 32-R Stroke Stroke Stroke (Slide bearing type) (Slide bearing type) (Slide bearing type) Deflection Y

Compact Guide Cylinder Series MGQ

100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 0UT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 MGF 0UT 201 40 60 80 101

Air Slide Table Series MXW

(N) MTS Symbol Specifications Operating pressure (MPa) Piston area (mm2) Bore size (mm) Rod size (mm) Operating direction -X7 -X9 -X11 -X33 -X39 -X42 -X45 PTFE grease 0.2 0.3 0.4 0.5 0.6 0.7 Grease for food R 20 30 40 51 61 71 101 Adjusting bolt, long specification (Adjustment range: 15 mm) 8 4 Without built-in auto switch magnet L 15 23 30 38 45 53 75 Fluororubber seal R 45 68 90 113 136

Compact Manometer Series PPA 1

G PPA AL 14-12-3 4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell

ZSP1

From the above 2. position, turn the adjustment needle 1/4 to 1 turn clockwise. 1 kPa = 7.5 mmHg 1 kPa = 7.5 mmHg 101 101 Supply pressure (kPa) Supply pressure (kPa) Applicable adsorption nozzle range Applicable adsorption nozzle range 50 50 3. 2. 1. 20 20 ZSE ISE Right 0.2 0.3 0.4 0.5 0.6 0.7 0.3 0.5 0.7 0.9 1.1 1/4 to 1 turn Right Left PSE Adsorption nozzle diameter (mm) Adsorption nozzle

ZCUK

Vacuum port pressure range: 101 kPa to 0.6 MPa Pressurize only when releasing the vacuum. At that time, use it under the cylinder operating pressure. Rod piping Lighter weight than the cap piping. Can also be used for air blowing. Vacuum port pressure range: 101 kPa to 0.6 MPa 55 2 Free Mount Cylinder for Vacuum Series ZCUK How to Order Nil 2 pcs.

Compact Manometer Series PPA 1

G PPA AL 14-12-3 4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell

TABLE OF CONTENTS

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99 NUMBERING SYSTEM CHART FOR SOLENOID OPERATORS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100 NUMBERING SYSTEM CHART FOR SERIES 58 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101

CV/MVGQ

stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 10-15-71 Series CVS1 Rod Side Flange Style: CVS1F Lube type (CVS1F), Non-lube type (CVS1FN) With rod boot Width across flats B1 Connection port h + l S + Stroke ZZ + l + Stroke ZZ + Stroke Bore size (mm) Stroke range (mm) A AL B B B1 C D E FD FT FV FX FY FZ H1 HX J K 40 50 63 80 100 Up to 500 501 to 800 30 35 35 40 40 27 32 32 37 37 71 81 101

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 2-4-39 VQ0/1000/2000 Kit (D-sub connector) F VQ1000 51.5 (M plug connector) 300 mm Lead wire length AC, Latching 46.5 (M plug connector) 52.5 L2 L1 6.2 45 (L plug connector) 48 AC, Latching P = 11 13.2 40 (L plug connector) Manual override 30.5 Indicator light DIN rail clamp screw (11) D-sub connector mounting screw R4.5 9 95 (M plug connector) 101 (L plug connector) 65 5.5 66 61.5

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

kPa For low pressure 0 to 100 kPa For positive pressure 0 to 1 kPa 0 0 0 101 kPa 100 kPa 1 MPa 10.1 kPa 10 kPa 0.1 MPa 5 Analog output (V) 1 0.6 C B A Pressure 775 Series ZSE1/ISE1 Calibration Procedure Hysteresis Internal Circuit and Wiring Example Set the ON-pressure by the pressure setting trimmer.

Thermo-con

HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 2.2 (57) 0.16 x 0.20 (4 x 5) 15.4 (390) Power switch External temperature sensor connector Alarm output connector Display/Operation panel Communication connector Warning/Caution label 11.7 (298) Power connector 5.7 (145) Tank lid with gasket Power cable (Accessory) Model no. label Handle 4.0 (101) 2.0 (51) 5.7 (145) Handle 60

CNA

RY FY BF e 8 f l ZZ + Stroke Z FT RT FZ FX ZZ + l + Stroke h + l (mm) Bore (mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8 M8 X 1.25 to 800 35 32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 M8 X 1.25 to 1000 35 32 86 27 101

Series PPA PPA100/101/102 Compact Manometer 4

4 Compact Manometer Series PPA PPA100/101/102 How to Order Unit specifications PPA10 0 M Pressure specifications Nil M Option/Case holder With the unit switching function(1) 0.1 to 1 MPa (For high pressure) 101 to 10 kPa (For vacuum) 10 to 100 kPa (For low pressure) 0 1 2 Fixed in SI unit (2) None With PPA-B Nil B Note 1) With unit switching function is not permitted to sell for the domestic

Cylinder with Lock

A K M ZZ + l + Stroke h + l FZ FX S + Stroke H ZZ + Stroke (mm) Bore size (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H H1 Up to 800 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 50 16 12 12 10 51 8 Up to 1000 35 32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56 20 13 15 12 58 11 Up to 1000 35 32 86 27 101

Basic type / Direct mount type Series CY3B/CY3R

Graph (1) 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Graph (2) 105 Particle concentration (particles/m3) Class M3.5 [Class100] 104 103 Class M2.5 [Class10] 102 Class M1.5 [Class1] 101 100 0.01 0.1 1 10 Particle diameter (m) Note 1) This chart indicates the level of cleanliness inside the measurement chamber.

Blue F-2815-101-NORYL - $0.50 F-2815-101-B80-NORYL - $1.35 F-2815-101-B85-NORYL - $1.35 .011 White / Orange -- F-2815-111-B80-NOR-W - $1.40 F-2815-111-B85-NOR-W - $1.40 .012 Green F-2815-121-NORYL - $0.50 F-2815-121-B80-NORYL - $1.35 F-2815-121-B85-NORYL - $1.35

Blue F-2815-101-NORYL - $0.50 F-2815-101-B80-NORYL - $1.35 F-2815-101-B85-NORYL - $1.35 .011 White / Orange -- F-2815-111-B80-NOR-W - $1.40 F-2815-111-B85-NOR-W - $1.40 .012 Green F-2815-121-NORYL - $0.50 F-2815-121-B80-NORYL - $1.35 F-2815-121-B85-NORYL - $1.35