m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.49

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.49

m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.49

m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

Air Slide Table Series MXP ø 6, ø 8, ø 10, ø 12, ø 16

MXPJ6/Air Slide Table 6 Specifications Theoretical Output How to Order (N) MXPJ6 10 Bore size (mm) 6 Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.2 Air Slide Table Piping port size M3 x 0.5 0.3 0.4 0.5 0.6 0.7 Fluid Air 6 28 6 8 11 14 17 20 Action Double acting Operating pressure 0.15 to 0.7 MPa Standard stroke Stroke Mass Proof pressure 1.05 MPa 5 5 mm 10 to 60C (g) (mm) Ambient

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Suitable screw torque (Nm) Body size M3 0.07 M5 0.3 1/8 1 1/4 1.5 3/8 4 1/2 10 15-8-6 Flow Control Equipment Precautions Series ASN2 Handling of One-touch Fittings Caution Selection 1. Refer to page 15-1-11 for One-touch Fitting. Warning 1.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

Note Lead wire length: 2m With mounting screws (M3 x 5L: 2 pcs.)

Modular F.R.L. Unit

pressure 1.5MPa Maximum operating pressure 1.0MPa Minimum operating pressure 0.05MPa Set pressure range 0.05 to 0.85MPa Rated flow L/min (ANR) Note 2) 150 330 800 800 Relief pressure Set pressure + 0.05MPa [at relief flow rate of 0.1L/min (ANR)] Ambient and fluid temperature 5 to 60C (with no freezing) Nominal filtration rating AW: 5m; AFM: 0.3m (95% filtered particle size) Maximum 1.0mg/m3

Rotary Gripper Series MRHQ

sides) 10 3-3H9 long groove depth 3 + 0.025 0 M5 x 0.8 37h9 0 0.062 Port A M5 x 0.8 (one each on three sides) Port B 4-M4 x 0.7 Depth 6 N I J E A D P A A M N R R SMC E O P T P A I R R 6 G Y R A I 18 2 6 21 9 5 23 5 Side A Side B Scale: 60% 9 Series MRHQ Rotary Gripper Dimensions (mm) 1in = 25.4mm Scale: 60% MRHQ16 A B 41 50 66.5 30 4-M5 x 0.8 Depth 6 47h9 0 0.062 20.6 opened 5 0 0.1 8 4-M3

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

200 0.1MPa 0.1MPa 0 0 20 20 40 40 60 60 Gripping point L mm Gripping point L mm 4 Series MHS2 2 Finger Air Gripper Dimensions (mm) 1in = 25.4mm MHS2-16D to 25D 2-3.4, counter bore dia. 6.5 Counter bore depth SC (mounting hole) WA, depth 1.5 AA RA 3 AB RA VA, depth VB B NA RB NB RB XA, depth XB O Q 2-M4 x 0.7, thread depth 8 (mounting threads) 20 20 (Open DO) (Closed DC) FX FY FZ CB 7 4-M3

Compact Cylinder High Magnetic Field Design CDQ2BP Series

35.320 L 0.0353 L 0.2642 Weight g 0.0353 kg 2.2046 1.356 N . m 1.356 J 3.6 l\rJ mm3 cm3 (cc) m3 L L rn3 in3 Energy ft3 N. m f t 3 J gar(u.s.)

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

16 20 25 Female threads Male threads Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa 1.0MPa Rod end threads Rod end thread tolerance Stroke tolerance Vacuum port, relief port Ambient and fluid temperature +1.0 0 0.03MPa 0.025MPa Without auto switch: 10 to 70C With auto switch: 10 to 60C Piston speed Piston rod diameter 1 to 200mm/s 0.5 to 200mm/s 6 M3