2/3 Port Valve for Various

Refer to pages 17-3-30 and 17-3-31 for specifications and models.

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BT-IS 10 10 BT-12 BT12 10 ;J;lA5EJ1A60 17 17 , . ' 0A59W .. 17 0 0 I: C" iD :IJ 0 a. ~ [,lrH5901Y690 I' D-V7P/Y7PV ; ", BSI-1 60 8S'-140 881-125 7 13 12 , D-Y7f:jWIY7OWV .' . 0Y7BAL ' .. 0Z7IJIZ80 D-Y591J1Y690 0.V7P/Y7Pi/ . 8$4125 !

2/3 Port Valve for Various

LVC Refer to pages 17-3-40 and 17-3-41 for specifications and models.

High Purity Fluoropolymer

CAT.ES70-17 C High Purity Fluoropolymer Fittings & Tubing PAT.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection

LVQ

(mm) Dimensions A C D M N S T U V B Model LVQ20S07-3 LVQ30S11-3 LVQ40S13-3 LVQ50S19-3 LVQ60S-V25-3 V S 25.5 46 31.5 58 7 15 83 34.3 10.6 7 V S 25.5 51 31.5 63 7 15 113.5 36.9 16.5 10 V S 25.5 51 31.5 63 7 15 119 37.9 22 10 V S 38 76 44 88 7 20 171.5 64 25 17 38 76 44 88 7 20 182.5 66 32 17 LVQ60 available only as V.

CLS

17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 8 7.5 7 12 13 D-Y7BAL 7 7 7 6 6 B D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL Proper Auto Switch Mounting Position/ Auto Switch Mounting Height 6 6 5.5 5 5 D-G39/K39 D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL 10 10 10 11 11 Common for each auto switch Since this is a guideline including hysteresis, not meant to be guaranteed.

Cylinder with Lock Series CLS

17 17 17 17 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL MLU D-A3/A44 D-G39/K39 BS1-125 BS1-140 BS1-200 BS1-160 BS1-180 12 13 7 7.5 8 MLGP D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F59F D-F5W/J59W D-F5BAL/F5NTL BS4-125 BS4-125 BS4-160 BS4-180 BS4-200 ML1C 5 5 5.5 6 6 D-G39/K39 11 11 10 10 10 [Mounting screw set made of stainless steel] Since this is a guideline including hysteresis

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

4 54 8 50 Up to 1000 32 40 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16 106 4 6 5.1 37 244 66 46.5 24 5 69 63 Up to 1000 32 45 20 G 3/8 16 M8 x 1.25 8 M16 x 1.5 17 38.6 16 121 4 9 6.3 37 259 77 56.5 24 5 69 80 Up to 1000 40 45 25 G 3/8 16 M10 x 1.5 10 M20 x 1.5 22 38.4 17 128 4 11.5 6 46 300 99 72 30 86 100 Up to 1000 40 55 25 G 1/2 18 M10 x 1.5 10 M20 x 1.5 22 42.9 17 138 4 17 10 51 320

CLA

-600 20-600 :J2 35 86 11 5 '/, Y. 64 20 40 10 95 17 27 59 13 12 MaX 1 25 7 30 80 20 40 10 102 17 26 67 18 15 Ml0Xl .2S 25 52 14 11 3 21 30 72 23 17 M1 2X 175 30 52 14 124 21 31 76 25 19 M12X1.75 7 40 99 80 1 750 20750 37 40 102 129 'I.

CS1

59 35 16 90 14 47 36 43 29 25 64 M30 X 1.5 Lube Non-lube Air-hydro 1/2 M14 X 1.5 36 to 1000 75 31 15 161 128 50 17 59 35 16 90 14 47 36 43 32 28 72 M30 X 1.5 3/4 M16 X 1.5 40 to 1200 80 36 18.5 17 182 144 56 53 20 40 90 59 43 14 39 36 32 80 M36 X 1.5 3/4 M18 X 1.5 50 to 1200 41 90 115 18.5 20 204 162 17 63 60 23 45 70 48 39 44 40 100 M40 X 1.5 Lube Non-lube 3/4 1 M20 X 1.5 50 to 1200 90

Step Motor Controller

L DIN rail AXT100-DR-l 5.25 12.5 (Pitch) 7.5 For l, enter a number from the No. line in the table below. * Refer to the dimensions on page 17 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimension [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 110.5 135.5 160.5 185.5 210.5 235.5 260.5 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 No. 21 22 23 24 25 26 27 28 29 30

C95

45.5 19.5 17 10 22 20.5 49 23 20.5 18 30 28.5 41.5 57 31 28.5 31.5 13 25 23.5 36.5 52 26 23.5 26.5 10.5 22.5 21 34 49.5 23.5 21 24 6.5 18.5 17 30 45.5 19.5 17 20 CG1 MB MB1 Auto Switch Mounting Height CA2 D-Y69 D-Y7PV D-Y7WV D-A3, D-G39 D-K39 D-A44 D-Z7, D-Y59 D-Z80, D-Y7P D-Y7W D-F5, D-F5W, D-F5NTL D-J5, D-J59W D-F59F, D-F5BAL D-A5 D-A6 D-A59W Bore size (mm) D-Y7BAL CS1 Hs Ht Hs Ht

Air Fittings Fitting Series For Special Environment

12 25 20.5 17 23.3 10 17 28.5 23 29.0 1 2 KRT10-04S 39.5 67.3 32.5 42.5 22 1 4 3 8 KRT12-02S KRT12-03S 38 39.5 17 24 45.2 17 30.5 1 2 KRT12-04S 25.7 42 69.5 12 22 Note: Fitting cover ordered separately.

Speed Controller with Uni One-touch Fitting AS Series

17 18 19 19 32 33 33 34 36 54 55 57 54 55 57 94 96 14.5 5 32" 1 8 14.2 36.1 31.1 30.5 25.5 14.3 3 16" 16.5 17 18.5 14.5 16.5 17 18.5 21 17 18.5 21 17 18.5 21 21 22 12 1 4" 5 16" 5 32" 3 16" 17.2 17 1 4 1 4" 18.5 39.4 34.4 32.0 26.6 5 16" 3 8" 19 1 4" 1 4 45.9 40.9 38.1 33.1 23.0 19 20.3 5 16" 3 8" 1 4" 5 16" 19.4 45.0 40.0 37.6 32.6 19 3 8 23.0 3 8" 3 8" 1 2 18.6 24 22.4 54.6 47.1 44.5 37.0

MNB

/4 55 189 114 89 170 37.5 25 96 40 41 22 30 20 20 Bore size (mm) T V VA W ZZ L S RR U GE GF J K MM N P Q H Z 32 M10 x 1.25 6 154 13 6.5 18.3 23 47 224 234.5 10.5 34 1/8 13 6.5 37 27 M6 x 1.0 88.5 40 M14 x 1.5 6 161 13 8 19.5 23 51 235 246 1/4 11 39.5 16.5 9 27 41.5 M6 x 1.0 96.5 50 M18 x 1.5 7 183 17 9 22.4 30 58 271 286 15 47 1/4 10.5 20 31.5 47.5 M8 x 1.25 111.2 63 M18 x 1.5 7 197 17 8.5

MNB

26 37 to 750 Bore size (mm) MM J T S U V GF K L Q RR H VA W Z ZZ P GE N 32 M6 x 1.0 34 154 M10 x 1.25 13 6.5 18.3 6 23 37 10.5 47 13 6.5 224 234.5 1/8 88.5 27 40 M6 x 1.0 39.5 161 M14 x 1.5 13 8 19.5 6 23 41.5 11 51 16.5 9 235 246 1/4 96.5 27 50 M8 x 1.25 47 183 M18 x 1.5 17 9 22.4 7 30 47.5 15 58 20 10.5 271 286 1/4 111.2 31.5 63 M8 x 1.25 55.5 197 M18 x 1.5 17 8.5 20.7 7 30 55 15 58 23

MNB

31.5 47 5 111.2 47.5 63 197 58 285 12 23 M18 x 1.5 3/8 15 8.5 30 7 M8 x 1.25 20.7 300 17 31.5 55.5 9 123.5 55 80 245 72 359 14 33 3/8 10.5 M22 x 1.5 23 42 10 M10 x 1.5 26 382 26 38 61.5 11.5 157 61 100 265 72 379 15 37.5 1/2 10.5 M26 x 1.5 23 42 10 M10 x 1.5 26 402 26 38 69.5 17 177 68 Double Clevis Pivot Bracket Material: Cast iron Surface treatment: Black coated Strength is the same as

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

OMU0023

Software Specifications . 11 5.1 Serial Communication Specification . 11 5.2 Memory Outline . 12 5.3 Message Frame Formats . 13 5.4 Details of Function Codes supported by LATCA . 17 (1) 01h Read the status of output signals . 17 (2) 02h Read the status of input signals . 19 (3) 03h Read data contents of holding register addresses . 21 (4) 05h Write (force) a single output signal . 23 (5)