Electric Slide Table / High Precision Type 《 Battery-less absolute 》

Do not place the hand and the finger, etc. because it is dangerous and do not crowd. 17. The product should be mounted as shown below in the figures marked with the . Unstable mounting of the product may cause operation failure, generation of abnormal noise or increase in the deflection etc. 18.

CEx-OMB0060

Unused 14 DATA Reading OK signal 32 N.C. Unused VALID 15 N.C. Unused 33 N.C. Unused 16 COM Signal ground 34 COM Signal ground 17 N.C. Unused 35 N.C. Unused 18 COM Signal ground 36 COM Signal ground The above output is displayed in the digit of 10-2 to 103 when the counter is connected to SMC CEP1 series (decimal point setting is . ).

HRX-OM-K003

Contact the system supplier for request of inspection and repair. 17 Interlock Fuse Cutout FLT Stop An overcurrent was passed through the control circuit. An overcurrent was passed through the solenoid valve (optional).

FILTER REGULATOR

Rc Rc C4SF-2J-A C4SF-2-A G G C4SFF-2J-A NPT C4SF-2(Z)-A NPT C4SFN-2J(Z)-A B B External appearance drawing and part no. 1/4 Hex17 17 Option Semi-standard Semi-standard 8 Semi-standard 8J Port thread Port thread Part no. Part no.

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

FILTER REGULATOR

Rc Rc C4SF-2J-A C4SF-2-A G G C4SFF-2J-A NPT C4SF-2(Z)-A NPT C4SFN-2J(Z)-A B B External appearance drawing and part no. 1/4 Hex17 17 Option Semi-standard Semi-standard 8 Semi-standard 8J Port thread Part no. Part no.

VDW Series

20.5 28 20.5 17 20.5 28 20.5 VDW10 VDW20 VDW30 VDW200 VDW300 2 Compact Direct Operated 2 Port Solenoid Valve for Water and Air Series VDW10/20/30 How to Order Valves (Single Type) VD W 2 1 1 G 2 01 For water, air and vacuum Series Option 1 2 3 10 20 30 None Foot type bracket Nil F Note) Foot brackets are packed with valves.

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

Thermo-chiller

is not sufficient space for maintenance. 17) In locations where liquid that exceeds the conditions required for the degrees of protection IPX4 may splash on the product. 18) Insects or plants may enter the unit. 2.

VS7-6

VS7-6-FG-S AXT500-12-2 VFS3000-17-2 AXT500-13 AXT500-13 AXT500-13 AXT503-35 AXT503-35 AXT503-35 AXT503-12-1 AXT503-12-1 AXT503-12-1 MY-11N MY-11N MY-11N Description No.

Vacuum Unit Series ZK2

Note 17) Select when no pressure switch for vacuum, pressure sensor, or pressure switch for vacuum with connector without lead wire is used.

ZQ-OM01301

Refer to the Operation Manual of the V100 Series for details. 17 - Doc. No. ZQ-OM01301-A .

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

How to find the flow rate for water Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) Q = 0.8 S 10.2 P l/min Q: Flow rate (l/min), P: Pressure differential (P1P2), P1: Upstream pressure (MPa) P2: Downstream pressure (MPa), S: Effective area (mm), Cv: Cv factor 17

HAW

AFF 17 36 40 45 5 5 AM 0.03 0.03 0.06 0.002 Even heat exchange Sharp edge of flower fin causes air turbulence resulting in even heat exchange and high cooling efficiency.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Valve 10-VQD1000 Dimensions Plug lead unit manifold: 10-VV4QD15Lead wire length 300 mm Indicator light 4 x Rc1/8 (P, R port) 2-4.5 (Mounting hole) 57.5 52.5 51 1(P) 3(R) 1(P) 3(R) 32 16 17 9 10 P=11 10 4 4 36.5 L2 L1 41.5 45 M plug connector (M) D side Stations U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread 2(B) 2(B) 27.5

SI unit for Ethernet POWERLINK

Group of valves not working Too many valves SY/SV/S0700 series: 32 points VQC series: 24 points -23No.EX-OMV0023-A Fault No.8 Fault Probable cause Recommended error handling Recommended action Tighten the screws with the specified tightening torque (i.e. 0.6 Nm) and make sure there is no gap between the SI unit and the valve manifold.

EXxx-OML0010CN

(Parameter Default) 32 6. (Clear Error Log) 32 -27No.EX-OML0010CN-C 1. 1. Tag Input (23 ) -28No.EX-OML0010CN-C 2. EX600 (SI SW ) SI SW Re Register 2. Re Register PROFIBUS DPSI -29No.EX-OML0010CN-C 3. Hold/Clear Hold/Clear SI PLC Hold/Clear 3. Hold/Clear HandheldSwitch HandheldPLCHold/Clear SwitchSI Hold/Clear -30No.EX-OML0010CN-C 4. 4.

CM2x-OM0230Q

(XC85,X446)P19 c) 4. 17 - 3-2. 3-2-1. 1 2 3 3-2-2. 1 2 3 4 5 6 7) 8 1) 2) 33. 331. 4. 20 25 32 40 CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS 1 3-3-2. 1 2 3 4 18 - 4. (XC85,X446) 4-1. -XC85 GR-H-010(10g) <> <> 4-2. PTFE X446 GR-F-005(5g) 1) 19 - 2) () 5. 5. 20 - 6. 1.

Jxx-OMT0084

Dimensions JT Symbol Applicable cylinder Nominal screw size For 20 20 20 M81.25 For 25 25 M101.25 32 For 32 M101.25 For 40 40 M141.5 Maximum Connecting Width depth of Weight Model screw A B C D E F G across the thread M flats H P JT20 M8 x 1.25 19.2 8 11 25.4 23 10 13.7 22 9.5 22g JT32 M10 x 1.25 23 10 13.4 30.8 28 12 16.3 27 11.5 38g JT40 M14 x 1.5 29 14 19 40.4 37.4 17 20.3 36 15.5

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 11-/22MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4M3 x 0.5 depth 3 +0.030 0 0.05 D B 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2-M4 x 0.7 Piping port 2-M3 x 0.5 (Plug: M-3P) F 6 QL 13.5 17