Total cooling capacity: 9.5kW (air)/11.0kW (water) (CH1 oscillator, CH2 optical system combined); Power supply "20": 200VAC/50 Hz or 200-230VAC/60 Hz, 3-phase; Power supply "40"; 380-415VAC (50/60 Hz) or 460-480VAC (60 Hz), 3-phase; Temperature set range: CH1 = 15 to 25°C, CH2 = 0 to 15°C; Temperature stability: CH1 = ±0.1°C, CH2 = ±0.5°C; Refrigerant: R410A; Communication: contact/analog

Total cooling capacity: 9.5kW (air)/11.0kW (water) (CH1 oscillator, CH2 optical system combined); Power supply "20": 200VAC/50 Hz or 200-230VAC/60 Hz, 3-phase; Power supply "40"; 380-415VAC (50/60 Hz) or 460-480VAC (60 Hz), 3-phase; Temperature set range: CH1 = 15 to 25°C, CH2 = 0 to 15°C; Temperature stability: CH1 = ±0.1°C, CH2 = ±0.5°C; Refrigerant: R410A; Communication: contact/analog

SI unit for CC-Link

Supply 15 to 30 VDC to the power supply for communication. Check the power supply for communication voltage.

ATX-OM-F004E

Outer dimensions and descriptions of each part part 2) Descriptions of each part HAA7 to 22 24 12 15 5 HAA37 11 22 23 13 7 9 10 4 21 28 29 30 1 13 19 8 25 27 17 3 14 Components of aircooled aftercooler and descriptions No.

Series SY100 3 Port Solenoid Valve Rubber Seal

Grommet style L, M Plug connector Style 0.14 (0.008) 3 4 Standard SY11 0 to 0.7 N.C. 100kPa to 0.6 100kPa to 0 Large flow capacity 0.22 (0.012) SY1l3 (A): 13 SY1l4 (A): 24 SY1l3 (A): 15 SY1l4 (A): 26 3 4 0 to 0.7 SY11 A 100kPa to 0.6 100kPa to 0 N.C.

BP1000

to 200 psig (0.1 to 1.4 MPa) 15 to 300 psig (0.1 to 2.1 MPa) Code No code P 01 02 10 20 30 Connections (Inletq, Outletw) 3) Panel mounting hole: dia. 1.42 inch (36.1 mm).

Pin Cylinder/Single Acting, Spring Return

When embedded O-ring Air Machining dimensions for mounting Sealed with O-ring Air Bore size (mm) Stroke A B C D E F G 5 12 8.5 6 4 3.5 M8X1.0 6.5 3 10 20 16.5 14 15 28 24.5 22 5 16 12.5 10 6 3.5 M10X1.0 8.5 3 10 23 19.5 17 15 30 26.5 24 5 17 13.5 10.5 10 3.5 M15X1.5 12 4 10 23.5 20 17 15 30.5 27 24 5 19 14.5 11.5 16 4.5 M22X1.5 19 5 10 25 20.5 17.5 15 31.5 27 24 Note) E and F should be machined

Cylinder Speed Checker (Request for Special) For pneumatic cylinder with built-in magnet (round groove)

Meaning 1 +15 V 1 +15 V 2 2 Sensor input 3 GND 3 GND 4 Sensor input 4 Sensor input PCA-1557785 Pin No. Meaning Pin No. Meaning 1 +15 V 1 +15 V 2 Sensor input 2 Sensor input 3 GND 3 GND 4 Sensor input 4 Sensor input 5 Unused 5 Unused -11No.SFOD-OMS1007-A Operation details Power ON The power turns ON when the button is pressed.

KS/KX

SKS, #1 to #15 Male connector: KXH (High speed) Tube O.D. (mm) Connection thread R(PT) Effective area (mm2) Min. hole dia. Weight (g) H (Hex.) Part No.

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

Combination of simple specials and Made to Order Size Refer to pages 256 to 270 for details. 10 15 20 30 40 Suffix symbol 10 15 20 30 40 Symbol Size Cushion Without cushion Rubber bumper Air cushion Nil C Port type Made to order Refer to page 247 for details.

Slide Tables MX Series

Bolt used Max. tightening torque Nm(kgf/cm) Max. screw-in depth l (mm) Type MXS 6 MXS 8 MXS12 MXS16 MXS20 MXS25 0.9{9.2} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 5 6 8 10 13 15 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 This causes vibration, increase of moving part and air leakage.

XLGR Series

Dimensions E C D E E L (Width across flats) M (Width across flats) M8 (KF Flange) (K Flange) Fn Fd C Detail of (a) (a) M Rc1/8 J H K B A G A Model A B C D E Fn Fd XLGR-80*-1* 90 250 117 45.5 38.5 114 110 XLGR-100*-1* 108 270.5 154 55 38.5 130 102 XLGR-160*-1* 138 339 200 65 38.5 180 153 Model G H J K L M XLGR-80*-1* 83 105 44 9 13 4 XLGR-100*-1* 102 92 58 9 13 4 XLGR-160*-1* 153 124 62 12.5

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

Model LEFS25G LEFS32G LEFS40G LEFS16G Stroke [mm] Note1) 50800 501000 1501200 50500 Horizontal 14 15 12 25 30 20 45 50 25 55 65 Work load [kg] Note2) Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 400 10800 5400 201500 12900 6500 241300 161000 8500 301200 201000 10500 401450 10700 5360 201100 12750 6400 241300 16950 8500 301200 201000 10500 451500 10600 5300 201100 12750 6400 241300 16950 8500 301200

Solenoid Valve

Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as follows. 8.

VFR5000 Series

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be as fllows. DC coil3% or less of rated voltage.

High Vacuum L Type Valve

(KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9

Mechanically jointed rodless cylinder With cam follower guide, With single-axis linear guide With double-axis linear guide

Foreign matter entering the product. -15- Failure Major causes Countermeasures Operation at high speed Adjust the speed by the speed controller and keep the Damage to the parts. specified range.

Ozone Resistant

Rubber Materials Ozone Concentration and the Time It Takes for Ozone to Generate Cracks (Deterioration) on Rubber In most cases, there is a clear-cut relationship between ozone concentration (C) and the time it takes for ozone to generate cracks ().

MHT2

Rail mounting Direct mounting D-F7BA D-F7lW D-F7lF D-J79W D-A7lH/A80H D-A73C/A80C D-F7l/J79 D-F7lV/J79C D-F9BA D-F9lW D-F9lWV D-F7lWV D-A9l D-A9lV D-F9l D-F9lV D-A79W D-A7l/A80 Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 7 9.5 12.5 15.5 A 10 14 12 14.5 B 10.5 13 16 19 A 13.5 17.5 15.5 18 B 3.5 6 9 12 A 6.5 10.5 8.5

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88