HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

MHF2

Auto Switch Mounting Groove Dimensions M3 x 0.5 5 1.7 15 33 4 20 Accessory option: Hexagon socket head screw (special screws) 3.3 2-2.5H9 +0.025 0 depth 2.5 3 9 9 2-M4 x 0.7 thread depth 5 Groove for auto switch mounting 14 14 Mounting thread 15 38 12-3-15 16 Series MHF2 Dimensions MHF2-12D1 3H9 +0.025 0 depth 3 42 3H9 +0.030 0 depth 3 2-M4 x 0.7 thread depth 10 Mounting thread 4 58 4 40

ASR

For the adjustment method, please refer to Selection and Adjustment on page 15-16-6 to 15-16-7. 4. For installation and removal, tighten the body B by applying an appropriate wrench to the two opposite sides of the hexagon. Using other parts may destroy the valve. For alignment after installation, rotate body A manually. 5.

MHF2

closing port Mounting thread E 7.7 14.8 15 19 25 E 0 -0.1 20 2-3.4 through (Mounting hole) 21 1 21 1 Finger opening port M5 x 0.8 +0.1 0 2-5.5 Close: 0 E-E Open: 241 Use the attached hexagon socket head screws for mounting holes. 8-M3 x 0.5 thread depth 4 4-M4 x 0.7 thread depth 5 Mounting thread 44 Attachment mounting thread Auto Switch Mounting Groove Dimensions M3 x 0.5 5 1.7 15 33 4

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A SOL.B SOL.A SOL.B (+) () () (+) 15 15 Oki Electric Cable Co,.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Refer to page 100 for part numbers. 105 Made to Order/Clean Room Specification Series LJ1H20 Dimensions/LJ1H202 (X60) Scale: 15% When two dimensions are shown, the top dimension is for 100 to 600mm strokes, and the bottom dimension is for 700 to 1200mm strokes.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

Micro Mechanical Valve Series VM1000

(Pre-Travel) 1 VH VHS 4 x 5.1 mounting hole 4 x M6 x 1 Thread depth 15 VHS 3 x 1/8 3.0 mm T.T. 2.0 mm O.T. 1.0 mm P.T. 23 N F.O.F. 2315 Series VM800 Series VM800 Roller lever VM830-01-01 Stainless steel sintered roller 17.4 x 7.1 Symbol (OUT) 2 10 12 3 (N.C.) 1 (N.O.) 4 x 5.1 mounting hole Hexagon socket head cap screw M5 x 12 4 x M6 x 1 depth 15 50 T.T. 30 O.T. 20 P.T. 20 N F.O.F. 3 x 1/

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

Multi-Axis Step Motor Controller

PLC VElectric actuators *1 Power supply for I/O signal 24 VDC VI/O cable (Option) p. 15 Part no.

EXxx-OMS0026CN

W.S. 032767 032767 +0+32767 3276865535 -0-32767 -0-32767 -52No.EX-OMS0026CN AD -3276732767 = 15 V 15 V 5000 1000 10001 V 20002 V 30003 V 40004 V 50005 V (5 V-1 V)(5000-1000)1/1000 15 V 1/1000 AD 1000 5000 (AD ) (ab) [V] [mA] 10 010 15 05 020 420 -3276632767 10 5 5 20 20 -3276732766 0 1 0 0 4 /(E.O./W.S.) () E.O.

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

End Lock Cylinder Series CBJ2

10 105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7 D-J79 D-C73C D-C80C D-H7C (16) D-F7V D-J79C (16) D-F7W D-J79W D-F7BAL D-F79F D-H7LF D-F7WV D-F7BAVL D-F7LF In addition to the models in

AC Servo Motor Driver (SSCNET /H Type)

Parameter list (Driver side) 15 6.

10

For with cap Applicable absorber B C h1 h2 MM d f h M6 x 0.75 MM B 2 C 8 For basic type RBC08S RBC10S RBC14S RBC20S RBC27S RJ06J RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S RJ08 12 13.9 6.5 23 M8 x 1.0 9 15 9.2 RJ10 M8 x 1.0 14 16.2 8 23 M10 x 1.0 11 15 4 12 13.9 RJ14 M10 x 1.0 19 21.9 11 31 M14 x 1.5 15 20 4 14 16.2 M14 x 1.5 RJ2015 27 31.2 16 40 M20 x 1.5 23 25 6 19 21.9

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) 6 tube M14 x 1 20 to 50 8 tube Ball joint rotation 15 Buffer Type Pad dia.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

thread Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 By chamfering as shown in the table below, machining of threads is easier and effective for burr prevention.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 11-9-21 22 Series