1.1

Specify the quantity of units necessary for use with your piping system. 29 Series HRG Dimensions [Dustproof filter set] HRG-FL001 HRG-FL005 A A (10) (25) (25) B (25) (25) (10) B Surface fastener HRG-FL010 A (10) (25) (25) B (390) (390) HRG-FL015 A (10) A (10) (25) (25) (25) (25) B (Large) (Small) B (390) (390) (mm) A B C Part no.

MGP

E MGPL (ball bushing)/Dimensions A, E (mm) (mm) E E A 10 to 39st 43 49 A Bore size (mm) Bore size (mm) 10 to 74st 42 46 75 to 100st 60.5 64.5 101 to 250st 85 95 10 to 74st 0 0 75 to 100st 18.5 18.5 101 to 250st 43 49 40 to 100st 55 65 101 to 250st 85 95 10 to 39st 1 3 40 to 100st 13 19 101 to 250st 43 49 12 16 12 16 A E A E Bore size (mm) Bore size (mm) 20 to 74st 53 53.5 75 to 200st 84.5

MHZ2/MHZJ2

Flat Finger Type [3] 4-MM thread depth L Attachment mounting thread K J A A D G B D B K J F C S W O Unit: mm Weight g F G Open Closed 2 2.5 3 4 J K MM L B C D Model A W 5.4 7.4 4.45 5.8 7.45 8.9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 55 115 235 420 5.2 8.3 10.5 13.1 10.9 14.1 17.9 21.8 2.45 3.05 3.95 4.9 6 8 10 12 5 8 10 12 +2.2 0 2H9 2.5H9 3H9 4H9 1.4 1.4 1.6 2 0 -0.2 0 -0.2 0 -

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D-K39 D-A3m D-A44 D-M9m(V) D-M9mW(V) D-M9mA(V) D-A9m(V) D-F5NTL D-A5m D-A6m D-A59W D-P4DW Bore size A B A B A B A B A B A B A B A B A B 32 14 10.5 10 6.5 10.5 7 15.5 12 4 0 8 4.5 7.5 4 4 0 7 3.5 40 14 14 10 10 10.5 10.5 15.5 15.5 4 4 8 8 7.5 7.5 4 4 7 7 50 15.5 14.5 11.5 10.5 12 11 17 16 5.5 4.5 9.5 8.5 9 8 5.5 4.5 8.5 7.5 63 16.5 15.5 12.5 11.5 13 12 18 17 6.5 5.5 10.5 9.5 10 9 6.5 5.5

Speed Controller with Indicator

06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

5 Port Solenoid Valve Series VQZ1000/2000/3000

4" 8, 5/16" 10, 3/8" 9.4 1/4 [4(A), 2(B) port] SJ 1/4 SY SV 1/4 [5(R1), 3(R2) port] D side U side L4 L3 SYJ 11 L5 PE port 3/8 [1(P) port] Manual override SZ Output no. (5.5) 5.5 + + 13 11 VP4 + + (8) 9 7 (DIN rail) S0700 150.3 [154.7] 50.4 (42) 136.8 [141.2] 36.9 42 1 P 5 R1 3 R2 1 P 3 R2 5 R1 B B B B B B B 21 21 73 (35) VQ 23 26 35.9 67.9 [70.1] A A A A A A A (5.5) VQ4 34.5 VQ5 12 10 8 6

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1 2 1 2 1 2 3 1 2 1 2 1 2 A A B C A B A B A B A B Symbol E T P U F Type Union elbow Union tee Panel mount union Union Union flange Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Note) For each body

Hydraulic Filters

Reset button 12 Suction Guard Series FHG Dimensions A 135 170 10 A I 10 Port size: 04 to 16 Port size: 20, 24 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 B H 10 10 L L M C D M Cap C D Cap Air breezer Air breezer (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

CNG

Operating Range Auto switch model Bore size (mm) 20 25 32 40 D-C7/C-80 D-C73C/C-80C 8 10 9 10 D-B5/B64 8 10 9 10 D-B59W 13 13 14 14 D-H7, D-H7W H7BAL/H7NF 4 4 4.5 5 D-H7C 7 8.5 9 10 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.) There may be the case it will vary substantially depending on an ambient environment.

High Purity Fluoropolymer

Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.

Modular Design with Uniform Body Style

5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

Refrigerated Thermo-chiller

Note 10) Required flow when a load is applied as shown in the cooling capacity when the facility water temperature is at 25C.

Fieldbus System

One-touch fitting (C12: 12 One-touch fitting) Output connector 8 Station 7 6 5 4 3 2 1 U side n D side DIN rail clamping screw C10: 10 One-touch fitting C10 [3(R) EXH port] DIN rail clamping screw 56.6 30 R R 8 11.5 76.5 3 3 X X 49.5 B B B B B B B B 12 P12 P 30 25 1 A 1 A A A A A A A 13.5 10 (12) 25 (7.5) C10: 10 One-touch fitting C10 [1(P) SUP port] 45 P = 16 C4, C6, C8 [4(A), 2(B) port

CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view

CQS

Double clevis Without auto switch With auto switch Bore (mm) Stroke range (mm) A 40.5 41.5 51 57.5 B 17 17 19.5 22.5 CL 34.5 35.5 42 47.5 A 45.5 46.5 61 67.5 B 22 22 29.5 32.5 CL 39.5 40.5 52 57.5 12 16 20 25 5, 10 Bore (mm) RR L1 L CZ CX CW CU CT CD 12 16 20 25 6 6 9 10 14 15.5 18.5 22.5 3.5 3.5 4.5 5 10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 *Refer to p.2.3-18 for detail

Air Slide Table Series MXS

) MXS Stroke adjustment range A dimension (Retracted side mounting) Retraction end Extension end Model MXQ Stroke 10 Shock absorber at retraction end MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 11 21 31 31 26 32 32 32 5 10 20 20 15 20 20 20 Shock absorber at extension end Stroke 75 to 125 MXF A A Maximum 25 MXW MXJ Shock absorber at retraction end MXP MXY Other

Stainless Steel 316 Fittings

10 17 39 24 30.6 22 D Applicable tube 46 19 12 18.6 60 81 113 10 24.9 22 M A L 10 12 33.2 29.4 16 24.6 20.8 Connection thread (with sealant) Reference dimensions after installation of R thread Note 1) D is maximum diameter.

Mechanically Jointed Rodless Cylinders

92 108 10 10 14 14 5 5 6 6 Note) Floating brackets are shipped as a set of left and right brackets.