MFLD, VFS2000 W/TERMINAL BLOCK

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High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

CQS

MU Theoretical Output (N) OUT IN DAllowable Kinetic Energy (J) Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm 2) Bore size (mm) 12 16 20 25 Bore size (mm) 0.3 0.5 0.7 -X Standard 0.022 0.038 0.055 0.09 84.8 IN 25 42 59 12 6 With rubber bumper 0.043 0.075 0.11 0.18 20113 OUT 34 57 79 151 IN 45 75 106 16 8 Data Minimum Operating Pressure (MPa) 201 OUT 60 101 141

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857

CQS

JIS symbol Theoretical Force Unit: N OUT IN Operating pressure (MPa) Rod diameter (mm) Piston area (mm 2) Bore size (mm) Operation 0.3 0.5 0.7 84.8 IN 25 42 59 12 6 CU 113 OUT 34 57 79 151 IN 45 75 106 16 CQS 8 201 OUT 60 101 141 236 IN 71 118 165 CQ2 20 10 314 OUT 94 157 220 MU 378 IN 113 189 264 25 12 491 OUT 147 245 344 Intermediate Strokes Spacer is attached on standard stroke body.

LJ1H

screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101

SMC

0.5 thread depth 4 (With stroke adjuster at extension end) 2 (Stroke adjuster at retraction end) 23 40 15 30 37 10 3H9 depth 3 +0.025 0 12 F +0.025 0 N 1 x F 2 3H9 depth 3 30 24 M 0.5 23 24 Z ZZ (NN1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 depth 3 +0.025 0 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101

LEY-OM007

41 19 POM 101 42 20 43 21 44 22 45 23 46 NBR / 16 LEYG-S016 16 LE-D-2-1 2 /P.46 7.4 /P.47 7.5 25 LEYG-S025 25 LE-D-2-2 32 LEYG-S032 32 LE-D-2-3 -16- 4. 4.1.

MXS

(Unit: N) Operating pressure (MPa) Bore size (mm) Rod diameter (mm) Piston area (mm2) Operating direction MXP 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 MG 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 MGP Standard Stroke 15 23 30 38 45 53 75 OUT IN 45 68 90 226 113 136 158 Model Standard stroke (mm) 12 6 MGQ 34 51 68 85 IN 170 102 119 MXS 6 10, 20, 30, 40, 50 80 121 161

Nozzle Diameter: ø1.3, Body Style: Body Ported, Vacuum Pressure: -660mmHg, SUP: Screw-in Rc(PT) 1/8, VAC: Screw-in Rc(PT) 1/4, EXH: Screw-in Rc(PT) 1/4

Nozzle Diameter: ø1.3, Body Style: Body Ported, Vacuum Pressure: -48KPa{-360mmHg}, SUP: Screw-in Rc(PT) 1/8, VAC: Screw-in Rc(PT) 1/4, EXH: Screw-in Rc(PT) 1/4

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -48, Air Consumption Flow Rate(l/min): 84, Vacuum Port Connecting Port Shape: Rc1/4, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: Rc1/8, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature Range(°C): -5～50, Suction

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 84, Vacuum Port Connecting Port Shape: Rc1/4, Vacuum Port One-Touch Fitting Size: -, Air Supply Port Connecting Shape: Rc1/8, Air Supply Port One-Touch Fitting Size: -, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature Range(°C): -5～50, Suction

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

With stroke adjuster at extension end) 2 (Stroke adjuster at retraction end) 23 40 15 30 37 10 3H9 ( ) depth 3 +0.025 0 12 F +0.025 0 3H9 ( ) depth 3 N 1 x F 2 30 24 M 0.5 23 24 Z ZZ (NN 1) x H G H 13 6.5 6.5 13 B A 3.2 6.5 7 7 15 1 3H9 ( ) depth 3 +0.025 0 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101

JXCx-OMT0030CN

5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23 62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101

C95

-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 42 43 52 52 58 65 23 23 25 25 29 29 12.5 12.5 12.5 12.5 12.5 12.5 25 25 25 25 25 25 37.5 37.5 37.5 37.5 37.5 37.5 50 50 50 50 50 50 75 75 75 75 75 75 75 75 87 87 103 103 88 88 100 100 116 116 100 100 112 112 128 128 113 113 125 125 141 141 138 138 150 150 166 166 32 40 50 63 80 100 1.11

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Basic With rear lock: CBM2B Bore size A-HN Stroke 20 Manual release non-locking style (Suffix: N) With air cushion (mm) S ZZ Double lock 137 141 141 167 Bore size (mm) 20 25 32 40 WB WA Double lock 83 83 83 101 Rear lock 72 72 72 93 Rear lock 126 130 130 159 Front lock 73 73 75 96 Front lock 127 131 133 162 8.5 10 11.5 15 11.5 11.5 11.5 14.5 -H -R -W N L Axial foot: CBM2L Bore size Stroke

MXS Series Air Slide Table

5H9 4 deep +0.030 0 Cross section AA Cross section BB HA GA (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101

PC Wiring System Series PCW

100 4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3