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.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series AME, AMF Size A B 63 76 90 106 122 160 850 319 220 114 150 250 350 450 550 650 127 153 168 195 225 HA AT ID AMG AFF AM Misc. 14-20-61 Precautions Be sure to read before handling.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153

Series VQ Base Mounted Metal Seal/Rubber Seal

487.5 498 23 421 441 462.5 473 22 405 425 450 460.5 21 389 409 437.5 448 20 373 393 412.5 423 19 357 377 400 410.5 18 341 361 387.5 398 17 325 345 375 385.5 16 309 329 350 360.5 15 293 313 337.5 348 14 277 297 325 335.5 13 261 281 312.5 323 12 245 265 300 310.5 11 229 249 275 285.5 10 213 233 262.5 273 9 197 217 250 260.5 8 181 201 225 235.5 7 165 185 212.5 223 6 149 169 200 210.5 5 133 153

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0.8 (Hexagon socket head plug) (Hexagon socket head plug) (mm) A B C E GA GB H KK J LD L LL LW M MM N NC Model G JJ K NE 80 6 3.5 2 9 16 37 6.5 M5 x 0.8 3.5 80 40 30 6 M4 x 0.7 20 14 MY1B16 14 M4 x 0.7 10 27.8 100 7.5 4.5 2 12.5 17.5 46 10 M6 x 1 4.5 100 50 37 8 M5 x 0.8 25 17.5 MY1B20 12.5 M4 x 0.7 12 34 (mm) NW PC PD T VV XX YH YW Z NH PA PB PG Q PP QW QQ RR SS TT UU WW Model 40 20 3.5 153

LEC-OM02704CN

14.3.5 147 14.3.6 148 14.3.7 148 14.3.8 149 14.4 14-10 14.4.1 14-10 14.4.2 14-15 14.5 14-18 14.5.1 14-18 14.5.2 14-20 14.5.3 14-21 14.5.4 (DIO) 14-24 14.5.5 ON/OFF 14-29 14.5.6 (DIO) 14-31 14.5.7 1ON/OFF() 14-32 14.5.8 14-33 14.5.9 14-40 14.5.10 14-41 14.5.11 14-42 14.5.12 14-48 14.5.13 14-49 15 15115-112 15.1 152 15.1.1 152 15.1.2 () 152 15.1.3 153

0.4

One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153

ZP

82.5 40 180.5 92.5 77 50 190.5 102.5 N S U F GN GS 20 51.5 33.5 Construction p. 118 J K ZP Y B Buffer Assembly p. 126 10 97 63 23 20 135 73 51 30 145 83 40 181 93 77 50 191 103 25 3.5 6 M10 x 1 14 3 52 34 10 102 68 23 20 140 78 51 30 150 88 40 186 98 77 50 196 108 32 57 39 10 142 74 20 139 84 30 149 94 50 194 114 75 50 40 62 44 N6 U6 A14 6 10 M14 x 1 19 4 10 146 78 66 48 50 20 143 88 30 153

Air Fittings & Tubing

53.5 60 61 61.5 63.5 71.5 72 73.5 80 80.5 82 KQ2VT04-01S KQ2VT04-02S KQ2VT04-03S KQ2VT06-01S KQ2VT06-02S KQ2VT06-03S KQ2VT08-01S KQ2VT08-02S KQ2VT08-03S KQ2VT08-04S KQ2VT10-02S KQ2VT10-03S KQ2VT10-04S KQ2VT12-02S KQ2VT12-03S KQ2VT12-04S 29 34 48 31 37 50 71 66 75 96 14 10.4 13.4 16 13.4 4 17 14 6 12.8 13.4 24.5 17 13.4 17 19 8 18.5 15.2 17.6 28.5 15.9 21 94 10 21 21 18.5 20.6 31.5 19.2 111 153

MGP

100st to 200st 58.5 52 62 57 50st or less 91 91 103 103 Over 200st 150 150 171 171 50st or less 21.5 15 21 16 Over 200st 80.5 74 89 84 A E HT Bore size (mm) 32 40 50 63 110 118 146 160 Over 50st to 200st 94.5 95 112 112 128 128 152 172 Over 50st to 200st 31.5 31.5 42.5 36 46 41 45.5 46 Over 200st 132 132 150 150 171 171 203 213 Over 200st 69 68.5 80.5 74 89 84 96.5 87 XC4 80 93 113 121 153

ZP

188 224 153 188 224 30 3 11.5 14.5 ZP2-XF40H(JB/JF)25 ZP2-XF40H(JB/JF)50 ZP2-XF40H(JB/JF)75 ZP2-XF50H(JB/JF)25 ZP2-XF50H(JB/JF)50 ZP2-XF50H(JB/JF)75 2 40 42 3 x M3 x 10 18 A 50 52 B ZP2-XF H JB JF 63 80 ZP2-XF H JB JF 100 125 Width across flat 17 (Hexagon) Width across flat 17 (Hexagon) D 21 21 Width across flat 30 (Hexagon) Width across flat 30 (Hexagon) Bushing 8 8 50 Bushing 8 8 50

Air Slide Table

magnet -X39 131 Fluororubber seal -X42 131 Anti-corrosive guide unit -X45 131 EPDM seal -X580 131 Low-speed specification (15 to 50 mm/s) -X2100 132 End plate compatible with the current MXQ series Heat-resistant specification (10C to 100C) -X2128 132 1 -X2192 133 Dual stroke specification -X2200 141 Side adjuster specification -X2201 147 Combined use of shock absorber + metal stopper -X2202 153

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D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . 137 138 138 138 139 139 140 150 151 152 153 154 155 157 159 159 159 160 163 165 173 174 174 175 178 179 180 182 185 185 188 189 190 191 194 195 196 197 201 203 203 204 205 206 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

CA2

Bore size (mm) Effective thread length Width across flats A D H K MM W ZZ 40 50 63 80 100 32 37 37 37 47 18 22 22 26 31 35 40 40 40 50 20 25 25 30 36 58 71 71 72 85 7 11 11 11 15 M18 x 1.5 9 9 9 0 0 153 172 183 205 228 M22 x 1.5 M22 x 1.5 M26 x 1.5 A B M30 x 1.5 With heavy duty scraper -XC4 Heat resistant (150C) -XB6 4 2 The cylinder seals are changed to a heat resistance (to 150C) material

0.4

one-touch fitting C6: 6 one-touch fitting C8: 8 one-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 one-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153

15

Dimensions: Ball Screw Drive LEFS40R (2.4) 28 FF Motor flange Motor 6H9 (+0.030 +0 ) depth 7 Body mounting reference plane Note) 4 x M8 x 1.25 thread depth 13 LEF 153 LEJ 58 LEL LEM 6H9 (+0.030 7 +0 ) depth 7 74 60 LEY 106 (170) LES 62.4 86 A (Table traveling distance) L Motor side stroke end LEPY LEPS (86) 13 90 LER 61 68 53.8 LEH F 68 LEY -X5 31 M4 x 0.7 11LEFS 8 thread depth 8 (F.G. terminal

5-Port Solenoid Valve

D-sub connector : p. 45 D-sub connector : p. 48 Flat ribbon cable : p. 51 Terminal block box (Spring type) : p. 62 Terminal block box : p. 71 Lead wire : p. 81 Circular connector : p. 91 EX500 (128 points) : p. 101 EX500 (64 points) : p. 107 EX600 : pp. 118, 119 EX250 : p. 129 EX260 : p. 137 EX126 : p. 145 EX120 : p. 153 163 Common Dimensions SY3000/5000/7000 Series Specific

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Series LXP Guide Rod Type . 2 Phase Stepper Motor Without Motor Brake Ball 146 149 151 153 154 164 184 185 187 188 189 190 191 191 192 193 194 195 197 199 199 199 200 201 202 203 203 203 204 204 206 209 209 211 216 223 217 225 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

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Series MHC2-6/MHCA2-6 Angular Style Air Gripper Standard Type 128 129 129 131 132 137 138 139 139 140 141 147 152 153 154 155 157 157 158 158 161 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 164 164 165 165 169 174 174 174 175 179 181 181 182 183 189 196 196 197

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com G: 300 mm H: 600 mm (Mounting hole) 2n-One-touch fitting (4(A), 2(B) port) Applicable tubing model C6: T0604 C8: T0806 (Lead wire length) (mm) Stations 2 3 77 49 96 68 20 419 391 L1 L2 19 400 372 18 381 353 17 362 334 16 343 315 15 324 296 14 305 277 13 286 258 12 267 239 11 248 220 10 229 201 9 210 182 8 191 163 7 172 144 6 153