Vacuum Manifold for fieldbus system

The purity class of compressed air quality based on ISO8573-1:2010 2 : 6 : 3 Solid particle Moisture Oil Max number of particles per m3 Oil concentration (mg/m3) 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 Pressure dew point Particle size d (m) Class Class Class (oC) at air pressure of 0.7 MPa 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000

ZQ-OM01301

filter AF series Main Line Filter Air filter AFM Series AFF Series AF Series Screw Screw air compressor Air compressor vacuum ejector Vacuum ejector Regulator Regulator AF series Refrigerated Air Dryer Refrigerated Air AR Series Dryer 2 : 6 : 3 Solid particles Moisture Adhesion of oil Oil Maximum particle count per m3 for particle diameter d(m) Pressure Clas Clas Clas concentration dew s (mg

ZQ-OM01401

1) () PD M3 / PD M4 2 (PD 0.28~0.34Nm / PD :0.68~0.83Nm (4 ) (4 ) 11 - No.ZQ-OM01401-B 3.1.4 1 2 3 3.2 1) 2) () 3) ZFC 4)( ) 5) 6)CE / UKCA CE / UKCA 7) 8) 9) 10) 11) 12) 12 - No.ZQ-OM01401-B 3.3 3.3.1 1 2 3ISO8573-1: 2010 (JIS B 8392-1: 2012)2:6:3 ISO8573-1: 2010 (JIS B8392-1: 2012) AFM AFF AF AR 2 : 6 : 3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 oC) ( (mg

ZL3-OM00601

class based on ISO8573-1:2010 (JIS B8392-1:2012) Air preparation equipment Mist separator Main Line Filter Air filter AFM Series AFF Series AF Series Screw Air compressor Vacuum ejector Regulator Refrigerated Air AR Series Dryer 2 : 6 : 3 Solid particles Moisture Adhesion of oil Oil Pressure Maximum particle count per m3 for particle diameter d(m) Class Class Class dew concentration (mg

ZL3-OM00801

0.290.31[Nm] 3.1.2 ZL212 1ZL212 ZL3-AD3-A ZL212 2 ZL3-AD3-A 4xM5x0.8 6 1.31.5[Nm] 7 No.ZL3-OM00801-A 3.1.3 1) 2) 3) 3.2 1) 2) () 3) AFJ 4)( ) 5) 6)CE/UKCA A CE/UKCA 7) 8) 9) 10) 11) 12) 8 No.ZL3-OM00801-A 3.3 3.3.1 1 2 3ISO8573-1:2010(JIS B 8392-1:2012) 2:6:3 ISO8573-1:2010JIS B8392-1:2012 AFM AFF AF AR 2 : 6 : 3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 () (mg

Air preparation filter

60OC (No freezing) Proof pressure 1.5MPa (2.4MPa) Note1) Air flow capacity m3/min(ANR) Note2) 7.0 11.0 14.5 Rated conditions Flow capacity of the compressor intake condition m3/min Note3) 7.3 11.5 15.1 Inlet air pressure 0.7MPa Filtration Note 4) 0.01m (Filtration efficiency: 99.9%) Oil mist density at outlet Note 5) Max 0.1mg/m3 (ANR)(0.08ppm) (Before saturated with oil,less than 0.01 mg

Mist Separator

Oil mist concentration on the filter inlet side = 10 mg/m3 Flow capacity, inlet pressure, and the oil mist concentration at the filter inlet are stable. New element Note 3) Conditions: Inlet pressure: 0.7 MPa. Note 4) Based on ISO8573-1:2010 Compressed air Part1: Contaminants and purity classes. The compressed air quality class on the inlet side is [ 4 : 7 : 4 ]. -8- 4.

Micro Mist Separator

Oil mist concentration on the filter inlet side = 1 mg/m3 Flow capacity, inlet pressure, and the oil mist concentration at the filter inlet are stable. New element Note 3) Conditions: Inlet pressure: 0.7 MPa. Note 4) Based on ISO8573-1:2010 Compressed air Part1: Contaminants and purity classes. The compressed air quality class on the inlet side is [ 2 : 7 : 3 ]. -8- 4.

Micro Mist Separator

Oil aerosol concentration on the filter inlet side = 1 mg/m3 Inlet air temperature: 25oC Flow capacity, inlet pressure, and the oil aerosol concentration on the filter inlet side are stable. New element Note3) Inlet pressure: 0.7MPa Flow rate at 20oC, atmospheric pressure, and 65% of relative humidity. Note4) Based on ISO8573-1:2010 Compressed air Part1: Contaminants and purity classes.

m (95% filtered particle size)Maximum 1.0 mg/m3 (ANR) (approx. 0.8 ppm) (2)PolycarbonateStandard450.44

m (95% filtered particle size)Maximum 1.0 mg/Nm3 (approx. 0.8 ppm) (2)Relieving typePolycarbonateOptional0.79

m (95% filtered particle size)Maximum 1.0 mg/Nm3 (approx. 0.8 ppm) (2)Relieving typePolycarbonateOptional0.79

m (95% filtered particle size)Maximum 1.0 mg/Nm3 (approx. 0.8 ppm) (2)Relieving typePolycarbonateOptional0.79

m (95% filtered particle size)Maximum 1.0 mg/Nm3 (approx. 0.8 ppm) (2)Relieving typePolycarbonateOptional0.63

m (95% filtered particle size)Maximum 1.0 mg/Nm3 (approx. 0.8 ppm) (2)Relieving typePolycarbonateStandard1.06

m (95% filtered particle size)Maximum 1.0 mg/Nm3 (approx. 0.8 ppm) (2)Relieving typePolycarbonateStandard1.06

m (95% filtered particle size)Maximum 1.0 mg/Nm3 (approx. 0.8 ppm) (2)Relieving typePolycarbonateStandard1.89

m (95% filtered particle size)Maximum 1.0 mg/Nm3 (approx. 0.8 ppm) (2)Relieving typePolycarbonateStandard1.89

m (95% filtered particle size)Maximum 1.0 mg/Nm3 (approx. 0.8 ppm) (2)Relieving typePolycarbonateStandard1.89

m (95% filtered particle size)Maximum 1.0 mg/Nm3 (approx. 0.8 ppm) (2)Relieving typePolycarbonateStandard1.89