MICRO MIST SEPARATOR

DISASSEMBLY DRAWING 1) AFD20-A 2) AFD30, 40-A Body Body Tension bolt Tension bolt Element assembly Element assembly Bowl packing Bowl packing Bowl assembly Bowl assembly 23 12.

MGP-OM0242Q

Intermediate strokes Spacer installation type Spacers are installed in the standard stroke cylinder. 12 to32: Available by the 1 mm stroke interval. 40 to63: Available by the 5 mm stroke interval. Description Model no.

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Air Filter

-30- Revision history 40-06,50,60 size added, Corrected.

VY511, VYU5

P 500 150 144 400 104 100 300 P 66 43 26 16 90 200 50 56 34 22 14 8 5 100 0 0 20 30 40 50 60 70 80 90 100 10 20 30 40 50 60 70 80 90 100 10 Bore size (mm) Bore size (mm) 1.15-33 Series VY511/VYU5 Precautions Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instruction and common precautions on the products mentioned in this catalog.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

S 1 pc. n n pcs. 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm * Not available with auto switch. With rod boot/cushion Built-in Magnet Cylinder Model Rod boot Nil Without rod boot J Nylon tarpaulin K Heat resistant tarpaulin If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch.

Platform Cylinder Series CXT ø12, ø16, ø20, ø25, ø32, ø40

Nil S n Bore size/Stroke (mm) Stroke (mm) Bore size (mm) 15 25 50 75 100 125 150 175 200 250 300 Auto switch Nil Without auto switch (Built-in magnet) 12 16 20 25 32 40 For the applicable auto switch model, refer to the table below. Option Adjusting bolt with bumper only (Standard) Nil With 2 shock absorbers (Set on the driving cylinder side only when packed.)

How to Order ø 6, ø 8, ø 12, ø 16, ø 20, ø 25 MXQ  A Series Air Slide Table Double-ported Type

buffer, axial piping 6 Centralized adjuster 7 Centralized adjuster (Symmetric) 8 Buffer, Centralized adjuster 9 Buffer, Centralized adjuster (Symmetric) Nil 2 S 1 n n Port Switch mounting groove Port Switch mounting groove 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 For details, refer to the next page. i Made to order 16 10, 20, 30, 40, 50, 75, 100, 125 Port Switch mounting groove

Line filter

P A B C D E G J M N Q R S T U V W AFF20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AFF30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AFF40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl drain Auto Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with

Mist Separator

P A B C D E G J M N Q R S T U V W AM20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AM30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AM40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level

Micro Mist Separator

Standard specifications Bracket mount Indicator mount P A B C D E G J M N Q R S T U V W AMD20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AMD30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AMD40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard

Low Friction Cylinders Metal Seal Type

Low Friction Cylinders Metal Seal Type 30, 40 newly added Compact Low Friction Cylinder Series MQQ Bore size (mm) 10 16 20 25 30 40 Operating pressure range (MPa) Actuation speed (mm/s) Series MQQT Standard type 0.005 to 0.5 0.3 to 300 0.5 to 500 MQQL Lateral load resisting type (Built-in ball bushing) 0.005 to 0.7 Lateral Load Resisting Low Friction Cylinder Series MQM Series Bore size

AIR FILTER

DIMENSIONS Bracket Accessory Port size Maintenance space Drain Model Standard specifications M5 1/81/4 1/43/8 1/43/81/2 3/4 3/41 1 J AF10-A 25 59.9 7 12.5 25 12.5 AF20-A 40 87.6 9.8 20 25 20 AF30-A 53 115.1 14 26.7 30 35 26.7 AF40-A 70 147.1 18 35.5 38.4 40 35.5 AF40-06-A 75 149.1 20 35.5 38.4 40 35.5 AF50-A 90 220.1 24 45 30 45 AF60-A 95 234.1 24 47.5 30 47.5 Model Bracket mount dimensions

CG1-OM0227

GR-S-010(10g )GR-S-020(20g ) (XC85,X446)P25 1 2 3 4 8 1 100 83(g) L100mm 1 2 1mm 8. 8. g 20 25 32 40 100st 2 3 3 34 50st 0.5 0.5 0.5 1 20 3-2-4. 1) 8, 9 2 ( 8,) 10 3( 8,) 1mm 9. 10. 3-3. CG1/CG1*A 3-3-1. 20 25 32 40 CG1N20Z-PS CG1N25Z-PS CG1N32Z-PS CG1N40Z-PS GR-S-010(10g) (10g) 1 GR-S-010 (10g) GR-S-020 (20g) 1 21 3-3-2. 22 3-4. 1.

MONOSASHI-KUN

32 260 297 334 371 408 445 482 556 630 40 462 499 536 573 610 684 758 906 1054 50 1015 1243 1699 63 1105 1333 1789 3-3-3 Load mass and Piston Speed (m1+m2)V2 Kinetic Energy E (J) = 2 m1Mass of cylinder movable parts m2Load mass kg kg m/s VPiston speed 4.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Digital Flow Switch

When hysteresis mode is selected: Refer to page 40. When window comparator mode is selected: Refer to page 41. When accumulated output mode is selected: Refer to page 42. When accumulated pulse output mode is selected: Refer to page 43. -39No.PF-OMO0005-F a. When hysteresis mode is selected Set value [P_2] or [n_2] and [the current set value] are displayed in turn.

Process Pump

Change the part number of amp for the sensor. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved 15

Process Pump

(MPa) 0.3 0.3MPa 0.2MPa 0.2 0.1 0 0 5 10 15 20 Discharge rate [L/min] (L/min) Recommended typical condition A: Calculate air pilot pressure in case of discharge rate 6L/min and pressure 0.25MPa 1.

RS2H-OM0045P

(mm) 50 30 63 30 80 40 1-4. (mm) (Kg) 50 1.70 / 63 2.78 80 4.96 4 - RS1H 1. mA 2. V(m/min) (Kg) 3.