EX600-DM E EX600-DM F EX600-DY B EX600-DY E EX600-DY F EX600-DX B EX600-DX C EX600-DX D EX600-DX E EX600-DX F 1 1 2 1 1 Description Function 6 6 6 6 2 3 2 3 Displays the status of the unit. 2 2 5 5 5 5 3 3 4 4 1 1 2 1 1 6 6 6 6 2 3 2 3 2 3 5 5 5 5 3 4 4 Valve plate mounting groove 1 1 6 6 Valve plate (EX600-ZMV ) 1 5 2 2 3 5 5 3 Direct mounting (1)When joining six or more units, fix the middle
. 3-7 Chapter 4 Operation/ Shutdown . 4-1 4.1 CHECK POINTS BEFORE OPERATION . 4-1 4.2 OPERATION . 4-1 4.3 STOP . 4-2 4.4 CAUTIONS FOR RE-START . 4-2 4.5 CHECK POINTS BEFORE RESTART . 4-2 4.6 CAUTIONS WHEN THE PRODUCT IS SHUT DOWN FOR AN EXTENDED PERIOD OF TIME . 4-2 Chapter 5 Checks and Maintenance . 5-1 5.1 DAILY INSPECTION . 5-1 5.2 REGULAR MAINTENANCE . 5-2 5.2.1 Clean the dustproof filter
5 (4.1) 5 11 7 P A 4.9 8.5 4.9 3-M5 (M3) 30.2 36.6 ( ) : In case of M3 Dimensions with broken lines stand for a latching, 100VAC, and large capacity spec. type.
Auto Switch . 13 5.Operating method / operation . 14 5-1. Design . 14 5-2. Installation . 14 5-3. Air supply . 20 5-4. Piping . 20 5-5. Operating environment . 20 5-6. Lubrication . 21 6.Maintenance . 21 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
m 1 3 5 LE CP 1 (14.2) (Terminal no.)
Operating method / operation . 15 5-1. Design . 15 5-2. Installation . 15 5-3. URCap . 19 5-4. Air supply . 24 5-5. Piping . 24 5-6. Operating environment . 24 5-7. Lubrication . 25 6. Maintenance . 25 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
Auto switch . 15 5. Operating method or operation . 16 5-1. Precautions for Design . 16 5-2. Installation . 16 5-3. TMComponent . 20 5-4. Air supply . 24 5-5. Piping . 24 5-6. Operating environment . 24 5-7. Lubrication . 25 6. Maintenance . 25 1 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.
Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .16 5-3. CRX Plug-in software .20 5-4. Air supply .28 5-5. Piping .28 5-6. Operating environment .29 5-7. Lubrication .29 6. Maintenance .29 1 - Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
Effective area: 0.9 mm2 Weight: 0.6 g Effective area: 0.9 mm2 Weight: 0.7 g Barb Elbow for Soft Tubing: M-3ALU-3 Barb Elbow for Soft Tubing: M-3ALU-4 Width across flats 5 Width across flats 5 M3 x 0.5 M3 x 0.5 Effective area: 0.6 mm2 Effective area: 0.6 mm2 Weight: 0.8 g Weight: 0.9 g Universal Elbow: M-3UL Universal Tee: M-3UT Width across flats 5 Width across flats 5 M3 x 0.5 2 x M3 x
KRY P. 4 KRV KRE P. 5 P. 3 Use to connect tubes through a panel. Spatter cover Spatter cover Plug Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. Prevention of tube releasing unconformity due to an inside intrusion or adhesion of the spatter. P. 5 KR P. 5 KRC1 KRP P. 5 Use to plug unused One-touch fittings.
ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.
Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3. Air supply .22 5-4. Piping .22 5-5. Operating environment .23 5-6. Lubrication .23 6. Maintenance or inspection .23 6-1. Maintenance or inspection .23 6-2. Replacement part .24 6-3.
ON (+)ON 1 OFF ()ON OFF DC(+)DC(-) 2 ON 80 mA 3 () DC(+)DC(-) NPN PNP ( ) 4 OFF () ( ) 5 () DIN 6 -24No.PS-OMF0005CN-E No. 7 / ( 8 () ) -25No.PS-OMF0005CN-E ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 0.010.25 mm 0.030.50 mm (5 m) 30200 kPa 50200 kPa 1.5 20 50 kPa 5 10 L/min (ANR) 100 kPa 8 15 200 kPa 12 22 DC1224 V10 (p-p)10() 15 mA NPN PNP NPN PNP 1 1 1 80 mA 30 V(
Tubing size Tensile force of tubing [N] 2, 3.2, 1/8" 5 4, 5/32", 3/16" 8 6, 1/4" 12 8, 5/16" 20 10, 3/8" 30 12, 1/2" 35 16 50 2) Removal of tubing (1) Push the release button flange evenly and sufficiently to release the tube. Do not push in the tubing before pressing the release button. (2) Pull out the tubing while keeping the release button depressed.
Number of samplings Sampling method 0.5 to 5 m: Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520
Caution: 5. Check the display. kV kV POWER LIGHT POWER LIGHT Distance to a measured target Reference of 50 mm Battery low When the battery voltage becomes low "L" will be displayed. The display will vary depending on how much battery is left. WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.
Model Model name IC AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 VBA G36-10-01 G46-10-02 Pressure gauge 1.0 MPa (5)(6) Accessory (Option)/Part No.
0 1315506A 1315516-2 MYN-5 JIS B 2401P6 131545 1315513 131532 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions Panel mounting hole Flow rate (/min (ANR)) Thickness max. 3.5 Caution Pressure gauge (Option) Port size 1.
Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 6 10 16 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 5, 10, 15, 20, 25, 30