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310 150 1401 to 1500 270 130 Max. acceleration/deceleration [mm/s2] 20 (Refer to page 4 for limit according to work load and duty ratio.) o0.02 Positioning repeatability [mm] Note 4) Lead [mm] 16 8 20 10 Impact/Vibration resistance [m/s2] Note 5) 50/20 Actuation type Ball screw Guide type Linear guide Allowable external force 4.5 lbf (20 N) Operating temperature range 41 to 104F (5 to 40C

Next, pour water at 5 to 40C, then measure the flow rate with a pressure difference of 0.075 MPa. However, the pressure difference needs to be set with a large enough difference so that the Reynolds number does not go below a range of 4 x 104 . By substituting the measurement results for formula (8) to figure out Av.

Note) 20 Min. bending radius mm Min. bending radius mm 10 15 27 35 75 60 48 36 24 25 13 20 to 60C, With water: 0 to 40C (with no freezing) 100 20 to 60C, With water: 0 to 40C (with no freezing) Operating temperature Operating temperature Polyurethane Material Material Nylon 12 Note) Best Pneumatics No.4, page 2.4-1 Note) Best Pneumatics No.4, page 2.4-3 20m roll O.D. I.D.

Model IZN10E-Cm-m Input voltage*1 100 to 240 VAC, 50/60 Hz Output voltage 24 VDC Output current 1 A max Ambient temperature Operating 0 to 40C Stored 20 to 60C Ambient humidity Operating/Stored 10 to 90%RH Standards/Directive CE, cUL *1 For the AC cord type, note that the rated voltage of the AC cord included as an accessory is 125 V (See page 13). 11 Nozzle Type Ionizer IZN10E Series Accessories

Store away from direct sunlight at 40C or less. 2. Open the inner package of double packaging in a clean room or other clean environment. R 1/4 12 to 14 R 3/8 22 to 24 R 1/2 28 to 30 3. Tightening tools Tighten with an appropriate wrench using the hexagon wrench flats on the body. Position the wrench on the base as close as possible to the threads.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Motor capacity 200W 100W 200W 100W 5 to 40C 5 to 50C 5 to 40C 5 to 50C Operating temperature range Electric power 640VA 300VA 640VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return direction

VXK VXD VXD (4) Test method Connect the equipment for the test to the test circuit shown in Fig. (3), and run water at 5 to 40C. Then, measure the flow rate with a pressure difference where vaporization does not occur in a turbulent flow (pressure difference of 0.035 MPa to 0.075 MPa when the inlet pressure is within 0.15 MPa to 0.6 MPa).

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

Power supply 200/230V : 40C Installation of multiple products Keep sufficient space between products so that the air vented from one product will not be taken in by other products.

Switch Semi-Conductor Sensor High Reliability Easy Operation Low Power Consumption Digital Display of Low Limit during setting 5 Options of Displayed Pressure Unit P r e l i m i n a r y A l a r m D i s p l a y g i v e s w a r n i n g t h a t pressure is within 10% of set point T E C H N I C A L SPECIFICATIONS Fluid Air and Insert Gas Differential 3% F.S (Full Span) or less Accuracy 3% F.S (5~40C

Viscosity according to ISO Grade 32 Classification of viscosity (cst) (40C) Turbine oil P-32 Idemitsu Kosan Co.,Ltd. Caution Turbine oil 32 Nippon Mitsubishi Oil Corp. Cosmo turbine 32 Cosmo Oil Co.,Ltd. Series LV Kyodo turbine 32 Japan Energy Corp. Turbine oil 32 Kygnus Oil Co. 1.

Fluid Set pressure range Hysteresis ZY Air 0 to 101 kPa 3% Full span or less 3% Full span (5 to 40C) 5% Full span (0 to 60C) 12 to 24 VDC (Ripple 10% or less) M5 x 0.8 Note) If not operated within the specified range of pressure and temperature, trouble may be caused. ZQ 1% Full span Accuracy ZF Voltage Port size ZP ZCU AMJ Misc.

HRX-OM-I051 Chapter 8 Appendix Specification for fluorinated fluid (wide temperature) Table 8-3 Specification for Fluorinated Fluid (Wide Temperature) Model HRZ002-W HRZ008-W Cooling method Water cooled refrigerant Cooling capacity*1 (50Hz/60Hz) kW 2.0 (At 20C) 8.0 (At 20C) Operating temperature range C -20 to 90 Temperature stability C 0.1*2 Galden HT135*3 FluorinertTM FC-3283*3 (-20 to 40C

Next, pour water at 5 to 40C, then measure the flow rate with a pressure difference of 0.075 MPa. However, the pressure difference needs to be set with a large enough difference so that the Reynolds number does not go below a range of 4 x 104 . By substituting the measurement results for formula (8) to figure out Av.

If air with a low dew point (40C or less) is required, do not use nylon tube or resin fitting (except for fluorine resin) for the outlet side of the membrane air dryer or heatless air dryer. Nylon tubing could be affected by the ambient air and it thus might not be possible to achieve the prescribed low dew point at the end of the tube.

Inlet Air Pressure 150psig (1.0MPa) Ambient Temperature 36-104 F (2-40C) Relative Humidity of 85% or less Power source 1 AC115V10% 60Hz (Note3) Electrical Specificat ion Operating current (Note2) 2.7A 3.0A 3.5A 6.5A 8.5A Power consumption (Note2) 240W 260W 310W 550W 800W GFCI Breaker Reted Current 15A:Sensivity 30mA Condenser forced air cooling Refrigerant R134a (HFC) Refrigerant Charge Quantity

Technical Data Related Products Applicable model Common for all models Circulating fluid recoverable volume Note 1) 3.2 gal (12 L) Nitrogen gas Purge gas Self-align fitting for O.D. 0.3in (8mm) Note 2) Purge gas supply port 58 to 102 psi (0.4 to 0.7 MPa) Purge gas supply pressure 0.01 or less Purge gas filtration 22 to 44 psi (0.15 to 0.3 MPa) Note 3) Regulator set pressure 50 to 104F (10 to 40C

6.7 VACUUM VACUUM SWITCH SERIES ZS VACUUM SWITCH SERIES ZSE1 Solid State Quick Response 10 ms Compact Size Semiconductor Type Pressure Sensor NPN and PNP Versions D I M E N S I O N S V A C U U M S W I T C H S E R I E S ZSE1 G R O M M E T T Y P E T E C H N I C A L SPECIFICATIONS Fluid Air Setting pressure range 0~760mmHg / 0~30inHg Hysteresis Adjustable 1~10% of range Accuracy 3% F.S. (5~40C

Compatible with low dew points Outlet air atmospheric pressure dew point 40C (IDG30L, IDG50L, IDG60L) IDG75L, IDG100L Outlet air atmospheric pressure dew point 60C (IDG60S, IDG75S, IDG100S) Discharged air noise reduced with built-in silencer Except IDG1, IDG3, IDG3H, IDG5, IDG5H, IDG30, IDG30H, IDG30L, IDG50, IDG50H, IDG50L Purge air discharge fitting for dehumidification Unit style Integrated

If air with a low dew point (40C or less) is required, do not use nylon tube or resin fitting (except for fluorine resin) for the outlet side of the membrane air dryer or heatless air dryer. Nylon tubing could be affected by the ambient air and it thus might not be possible to achieve the prescribed low dew point at the end of the tube.