Cylinder with Lock

120 125 130 n (Same surface) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 105 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 120 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 125 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 130 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 D-F5NT 1 100 105 120 125 130 2 (Different surfaces, same surface) 1 60 80 105 110 115 D-A5 D-A6 n (Same surface) 60 + 55 (n 4) 2 (n = 4, 8, 12, 16)2 80 + 55 (n 4) 2 (n =

0.5

Conductor Insulator Outside diameter 1.4 mm Blue, Brown 0.7 mm White, Green, Light green, Purple, Gray, Yellow Sheath Material Heat resistant PVC Outside diameter 6.2 mm AC adapter IZF21-CG1 (with AC cord) 98.8 2144 +105 100 1820 50 46.8 AC adapter AC cord IZF21-CG2 (without AC cord) 2144 +105 100 32.1 98.8 46.8 Inlet IEC60320-C6 AC adapter *: The input (AC) side and output (DC) side of the

25

A 13 15 22 06 08 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 End bracket/IZS40-BE 35 22 4.5 30 44 2 x 5.4 18 105 33 L 33 Intermediate bracket/IZS40-BM 55 35 22 4.5 36 30 18 2 x 5.4 A 105 33 A A-A section 432 Ionizer IZS40/41/42 Series Dimensions Feedback sensor/IZS31-DF 2 x 3.4 Amplifier 2 x 3.4 Head 1500 3500 IZS IZS 9 16.6 13 SMC IZN 4.8 10.2 25 58 4.8 69 23 87.5 IZF 78 ZVB

Thermo-con/Rack Mount Type

125 139.7 38 38 0 10 0 61 0 484 447 251 38 9.5 474.5 Handle (for installing/removing the product to/from the rack) Label Ventilation hole (air inlet) Circulating fluid level gauge Power supply connector Ventilation hole (air outlet) Communication connector External temperature sensor connector Alarm output connector 104 256 289 69 Model no. label 0 129 144 144 124 118 105 0 23 0 10 Label

CNS

NDH10 125 140 160 I-12 I-14 I-16 0.1 0.3 25 32 +0.084 0 2033 27 46 54 100 M30 x 1.5 E1 0.1 0.3 28 36 +0.084 0 39 30 48 54 105 M30 x 1.5 NX 0.1 0.3 32 40 +0.100 0 Data 39 34 55 60 110 M36 x 1.5 L1 U1 RR1 Rod End Nut Material: Rolled steel 30 d Applicable bore size (mm) d H B C D Part no.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 0.032 0.059 63 1200 600 600 600 18 11.5 11.5 110 40 92 49 107 166 3.2 34 16 24 206 40 23 196 212 148 162 50 59 86 40 16 28 90 16 93 92 25 171 MGZ 1000 (1001 to 1400) 204 (215) 119 (124) 18 (28) 130 (164) 76 (84) 160 (198) 53 (59) 0.040 0.073 80 1400 750 750 750 25 116 112 102 112 31.5 110 13.5 13.5 140 45 61 129 204 4.5 44 16 27 247 48 28 235

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D C B E1 L1 MM H A A1 R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 21 25.4 22 8 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 12 16 +0.070 0 0.1 0.3 26 31.2 27 11 74 27 28 60 M18 X 1.5 15.5 20 M18 X 1.5 12 16 +0.070 0 0.1 0.3 31 37.0 32 13 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 18 28 +0.070 0 0.1 0.3 39 47.3 41 16 37 40 83 M26 X 1.5 24.5 28 M26 X 1.5 105 20 30

Vacuum Ejector Series ZM

When ventilative or leaky work must be adsorbed, please note that vacuum pressure will not be high. 0 0 0 0 25 20 15 5 10 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Flow rate l/min (ANR) Supply pressure (MPa) ZM10M Exhaust Characteristics Flow Characteristics 90 90 135 80 80 120 Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate l/min (ANR) Air consumption l/min (ANR) 70 70 105

MLGC

Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30 160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105

Single Axis Electric Actuator Serriies LJ1S Slider Guide

92 Standard Motor/Horizontal Mount Specification Series LJ1S30 Dimensions/LJ1S303SC Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 246.5 200 Z section detail 63.5 63 Stroke + 245 (table movement range) 31.5 221.5 Z section 110 3.3 69 113 105

PC Wiring System

Dimensions 10.5 10.5 103 (3.6) 16.7 28.3 45 OD/040LP OUT RS4.1 CH 1 CH 5.1 53.5 55 (3.7) 113 0 + 1 3 2 4 7 6 5 10 9 8 13 12 11 14 15 Refer to page 50 in CAT.E02-20 for the junction cable part number. 101 100 102 104 103 106 105 109 108 107 112 111 110 113 114 115 4.5 Models Output Circuit diagram PCW-993193 PCW-993194 PCW-993225 Page 37 in CAT.E02-20 Page 37 in CAT.E02-20 Page 39 in CAT.E02

MXQ

piping type (S: Stroke (mm)) With end lock With buffer 10 20 30 40 50 75 100 125 150 Extension end Retraction end Extension end Retraction end Extension end Retraction end MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 25 5 5 6 10 100 120 140 180 200 13 + 0.2 S 40 35 10 23 10 10 30 23 140 170 210 250 315 385 26 + 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

consumption [L/min(ANR)] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 60 Suction flow 40 Air consumption 20 0 0 20 40 60 80 Suction flow [L/min(ANR)] Supply pressure [MPa] ZHP-15 ZHP-15 (Supply pressure: 0.35 MPa) 100 100 90 80 70 60 50 40 30 20 10 0 150 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] 135 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 120 105

PSE100

for display (Optional) 2-4.4 mounting hole ZSE4 ISE4 1 2 3 4 5 ZSE5 ISE5 PRESSURE SWITCH ZSE6 ISE6 8 10 ZSE3 ISE3 l50 l45 l48 56 70 4.5 (MAX.8) 35.5 12.5 GS PS ISA 9 8 7 6 10 ZSE1 ISE1 17 10-M3 ZSE2 ISE2 11 23 6 38 50 ZSP 48 (54) ISl ZSM DIN rail L PFl 7.5 10 25 5 IFl 4.5 35 27 Material: Aluminum Part number of DIN rail Part number ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L 105

Safety Speed Control Valve (SSC Valve) Series ASS 1

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

High Vacuum Angle Valve, XL Series

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

VQ7-6/7-8

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing March, 1999 D-SMC.L.A. P-77.5 (YG)

Air Slide Table Series MXQ

145 165 I 12 12 12 12 20 15 18 23 NN 2 2 2 2 3 3 4 5 H 39 39 48 58 52 44 44 G 18 18 19 19 21 36 17 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45 52 88 88 Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 MXQ16L10 MXQ16L20 MXQ16L30 MXQ16L40 MXQ16L50 MXQ16L75 MXQ16L-100 MXQ16L-125 Note) Note) Note) Refer to the bottom view of MXQ16L-50. 112 Air Slide

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

Air Slide Table

MXQ 12B-mZN Shorter total length type Dimensions [mm] M 3 Model M MXQ12B-10ZN 85 MXQ12B-20ZN 95 MXQ12B-30ZN 105 MXQ12B-40ZN 122 MXQ12B-50ZN 132 MXQ12B-75ZN 163 MXQ12B-100ZN 207 MXQ12B-125ZN 232 *3 As the total length has been reduced by removing the extension stroke end adjuster mounting holes, an extension stroke end adjuster cannot be mounted afterward.