Modular F.R.L. Unit

T-interface (T) Factory mounting of a piping adapter on the AC models is available as a special order. M5 x 0.8, 1/8, 1/4, 3/8, 1/2 Using a T-interface facilitates the redirection of air flow.

AC Servo Motor Driver (SSCNET /H Type)

Refer to LECSS2-T Operation Manual, section 5 for details. Recommended Parameter Values [LEF] LEFS25T6 LEFS32T7 LEFS40T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Free Mount Cylinder

S T S T S T S T S T C(D)UK6C(D)UK10C(D)UK16C(D)UK20C(D)UK25C(D)UK32For the auto switch weight, refer to page 68 to 72.

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

-fl Seies

cenler .1&t*080 PEEA A P B EBPE Main Parts No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The rotation range under the adjustment of an angle at 60 is indicated below. e g n R o t a a ti o r n r n a R n o o g ti t e a a ti o t n o r R a n Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clockwise direcNote) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clock-wise direction.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

cenler .1&t*080 PEEA A P B EBPE Main Parts No.

F

O O R D E R (N)AS S E R I E S W I T H O N E-T O U C H F I T T I N G S 1F NAS A R E A C O D E A P P L I C A B L E T U B E OD Japan, Asia, Australia, UK N Canada, USA MM 23 3.2 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 B O D Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03

Aluminum High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 416 b XLA/XLA V Series Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

MG

(Nm) + T (Nm) For non-rotating accuracy without load, use a value no more than the values in the table as a guide.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

Series VQ Base Mounted Metal Seal/Rubber Seal

unit (3) S kit P kit F kit T kit Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and w P kit (20 pin).

Environment

LEF How to Order LEJ LEL S2 25A-LEJS 40 500 A H LEM Series compatible with secondary batteries w e r q t y u i o !

Air Cylinder

CS2 D-X Technical Data 207 CM2 Series Construction Spring return t y !1 q !3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

MGP

(Nm) + T (Nm) Stroke (mm) For non-rotating accuracy without load, use a value no more than the values in the table as a guide.

REA/REB

Mounting freedom is improved by providing T-slots on the mounting surfaces. A top cover mounted over the sliding parts of the cylinder prevents scratches and damage, etc. To ensure a permanent path When a large load, large moment or high precision is required When used for pick-and-place operations, etc.

REA/REB

Mounting freedom is improved by providing T-slots on the mounting surfaces. A top cover mounted over the sliding parts of the cylinder prevents scratches and damage, etc. To ensure a permanent path When a large load, large moment or high precision is required When used for pick-and-place operations, etc.

Rotary Actuator/Vane Style Series CRB2

Single vane type Double vane type , 0 5 Chamfer +4 0 a a r r n n 9 0 n n e g g 0 o o g e e i i n t t 1 2 a a 0 a 8 7 t t r o o 1 +4 0 0 0 n R R o e +4 0 +4 0 i t g 0 a n 9 t o a e r R g n n o a ti r a n t o o R ti a t o R Chamfer Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer.

Vacuum Pad

ZP3-T(10/13/16)UM;(J/K)3-@ ZP3-T(10/13/16)B;(J/K)3-@ ZP3-T(10/13/16)UM;(J/K)6-@ ZP3-T(10/13/16)B;(J/K)6-@ ZP3-T(10/13/16)UM;(J/K)10-@ ZP3-T(10/13/16)B;(J/K)10-@ ZP3-T(10/13/16)UM;(JB/K)15-@ ZP3-T(10/13/16)B;(JB/K)15-@ ZP3-T(10/13/16)UM;(JB/K)20-@ ZP3-T(10/13/16)B(JB/K)20-@ Buffer assembly part no. Note 3) Buffer assembly part no. Note 3) Pad unit part no.