Vacuum System Peripherals:

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Modular, Regulator Series AR Flow rate (l/min (ANR)) Set pressure (MPa) Pressure gauge connection port Rc Construction Port size Rc Model ZL AR10 AR20 1 16 1 8 1 8 1 8 1 4 1 4 1 4 1 4 100 0.05 to 0.7 600 M5 x 0.8 1 8 1 4 , ZY AR25 , 1200 1 4 3 8 AR30 AR40 AR40-06 AR50

2

Including 2 mounting screws for the AR50(K)-B and AR60(K)-B Note 2) Please consult with SMC regarding the set nuts for the AR50(K)-B and AR60(K)-B. Note 3) in part numbers for a round pressure gauge indicates a pipe thread type. No indication is necessary for R; however, indicate N for NPT. Please contact SMC regarding the pressure gauge supply for psi unit specifications.

CL

15 17 17 21 21 16 16 18.5 22 27 27 32 41 11 11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5 13.5 13.5 19 19 19 40 45 50 65 75 85 100 106 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) LS LT LX LY MM N S W X YA P YB

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

CL

22 27 27 32 41 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 9 9 11.5 13.5 13.5 19 19 19 40 45 50 65 75 85 100 106 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 67 78 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot Bore size (mm) LS LT LX LY MM N S W X YA P YB

Combination Cylinder

40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 14 14 14 8 11 11 13 16 M8 M8 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 6 7 7 11 11 15 15 17 9 9 40 45 50 65 75 85 100 106 11.5 13.5 13.5 19 19 19 112.5 121 133 141.5 150 167 18.5 18.5 18.5 Without rod boot With rod boot Bore (mm) 40 50 63 80 100 125 140 160 LS LT LX LY MM N S W X YA YB

JXCx-OMU0026

Y axis Target position (Xa, Ya) Centre coordinate (Xc, Yc) Transit point (Xb, Yb) X axis Start position (0,0) -71No. JXC-OMU0026 Caution Setting of the electronic Gear is necessary when actuators with different a lead are used. If the electronic gear is not set, the step data operation may not be produced.

CL

78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 15 17 17 21 21 16 16 11 11 11 11 11 16 16 14 18 18 22 26 31 31 36 9 9 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 32 40 40 52 52 14 14 14 15 17 17 21 21 16 16 11.5 13.5 13.5 19 19 19 112.5 121 133 141.5 150 167 18.5 18.5 18.5 Without rod boot With rod boot Bore (mm) 40 50 63 80 100 125 140 160 LX S X LS LT LY MM N W YB

Table of Contents

Note 2) There are four YA and YB dimensions with a 50 mm stroke. 8-16-16 16 Series CY1F Magnetically Coupled Rodless Cylinder Low Profile Guide Type Proper Auto Switch Mounting Position (Detection at stroke end) D-A9, D-A9V (mm) Bore size Mounting patternq A1 Mounting patternw A2 Mounting patterne A3 Operating range B1 B2 B3 (mm) 10 15 25 9 38 60 18 80 38 80 10 39 66 19 86 39 86 11 44.5