Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: [Reducing Union Elbow] Reducing Union Elbow, Applicable Tube Outer Dia. (in) D (D1): 1/2, Applicable Tube Outer Dia. (in) D2: 1/4, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: [Reducing Union Elbow] Reducing Union Elbow, Applicable Tube Outer Dia. (in) D (D1): 3/4, Applicable Tube Outer Dia. (in) D2: 3/8, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body

Type: Fitting Body, Material: PFA, Connection Type: Pipe⇔Pipe, different diameters connection, Pipe-to-Pipe Unequal Diameter Connection Type: [Reducing Union Elbow] Reducing Union Elbow, Applicable Tube Outer Dia. (in) D (D1): 1, Applicable Tube Outer Dia. (in) D2: 1/2, Maximum Operating Temperature(°C): 200, Packing: Clean Packaging Class M3.5 Equivalent, Nut Material: PFA, Size of Body:

PFxx-OMP0001CN

500] 500 L/min(PFMB7102) [F 1][oU1] [1000] 1000 L/min(PFMB7202) 28 [ 25] 25 L/min(PFMB7501) [H_1] OUT1 [ 50] 50 L/min(PFMB7102) [100] 100 L/min(PFMB7202) [CoL] OUT1 [SoG] ONOFF [oU2] OUT2 2 [HYS] [2ot] OUT2 2 [2_P] [ 250] 250 L/min(PFMB7501) 2 [P_2] OUT2 [ 500] 500 L/min(PFMB7102) [F 2][oU2] 36 [1000] 1000 L/min(PFMB7202) [ 25] 25 L/min(PFMB7501) 2 [H_2] OUT2 [ 50] 50 L/min(PFMB7102) [100

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

Bore) -F5PSDPC NCDA1 Tie Rod Mounting NBT-150 (1.5" Bore) NBT-200 (2" & 2.5" Bore) NBT-325 (3.25" & 4" Bore) "SC" auto switch CDQ2/NCDQ Direct Body Mount BQ-2 (32/40/50/63/80/100 Bore) Screw & Nut Kit included with cylinder "SC" auto switch CDRA1 Rail Mounting P294020-24 Screw & Nut Kit for 2 Auto Switches (50/63/80/100 Bore) -F7PSAPC -F7PSC CD85-A Rail Mounting BQ-1 (8/10/12/16/20/25 Bore

Air Combination

Application 11 3. Specifications 11-15 4. How to Order 16-20 5. Options 21 6. Structural Drawing and Replacement Part 21 7. Trouble Shooting 22 8. How to Replace the Products 23 9. Disassembly Drawing 24 10. Dimensions 25-29 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

E-P HYREG ® Series VY1 1

4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Without adjuster type is not available for the 11-MXP6 series. 11-MXP How to Order MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicone-free + Low particle generation Stroke 5 10 5 mm 10 mm 22 Vacuum suction type With auto switch type is not available for the 11-MXPJ6 series.

PSxx-OMV0003CN

.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

High-precision Digital Pressure Switch

The display accuracy Refer to Trouble No.11 does not meet the specifications. The Display Refer to Trouble No.12 measurement unit cannot be changed. Buttons do not work. Refer to Trouble No.13 Refer to Trouble No.14 -78No.PS-OMV0009-E Troubleshooting list Problem No.

Pressure Sensor Controller

kPa to 100 kPa -100 kPa 100 kPa For low pressure 0 to 100 kPa 0 100 kPa -10 kPa 0 to 1 MPa 0 1 MPa -0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa -50 kPa Range Rated pressure range C D F For low differential pressure 0 to 2 kPa 0 2 kPa -0.2 kPa -32No.PS-OMG0002-G Dimensions Body dimensions Mounting using mounting option Mounting by bracket Mounting by panel mount -33No.PS-OMG0002-

PF-OMN0011_C

[ooo] [F20] [iNP] [iNP][-] OFF [-] [F20] -45No.PF-OMN0011CN-C [F22] 5 V20 mA [F22] [AnA] [AnA][-] tEMP FLoW [F22] ON OFF -46No.PF-OMN0011CN-C OFF ON 5 V 20 mA 10% [ V ] 4 L/min 1~5 V [F22] 5.6 V110 -47No.PF-OMN0011CN-C [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200 3.8 [F30] [SAVE] OFF 2 5 [F30] 2 5 OFF OFF 2 5 OFF B 2 /5 -48No.PF-OMN0011CN-C [F80] 12% 30 ON [F80]

Series 10-MGF Guide table ø40, ø63, ø100

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air

Water-cooledThermo-chiller

Thermo-chiller with exhaust from the side: Body space: W15.7in (400 mm) x D 33.3 in (845 mm) Ventilation space: 3.9 in (100 mm) 15.0 (380) HRW008-H : Body space: W15.0 in (380 mm) x D 26.2 in (665 mm) Ventilation space: 0 15.7 (400) 3.9 (100) 33.3 (845) 26.2 (665) 10.0 ft2 (0.93 m2) 5.5 ft2 (0.51m2) 98 High Performance Easy Maintenance Temperature stability: 0.54F (when a load is stable)

Series 10-MGF ø40, ø63, ø100 Guide Table

8.7 120 X T V 1/4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

The tightening torque should be approximately 0.05 to 0.1 Nm. 8-17-11 11 Series CYP Specific Product Precautions 1 Be sure to read before handing. Operation Handling Caution Caution 1. Open the inner package of the double packaged clean series inside a clean room or other clean environment. 2.

VXD21/22/23

N) 99(4) 100(4) AC DC AC/DC 60 40 1 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

Blow Gun Series VMG

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

Blow Gun Series VMG

Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 VMG1-R02-300 VMG1-R02-350 VMG1-R02-400 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 Nozzle size Nil 01 02 03 04 05 06 07 11 12 13 21 22 23 24 1 1.5 2 2.5 3 3.5 4 1 1.5 2 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 Connection size Piping connection method Symbol Size and model no.

Precision Regulator Series IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 l/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400 500 600 700 Flow rate (l