Precision Regulator

Setting spring Setting knob Flapper Diaphragm C Nozzle Diaphragm A Fixed orifice Diaphragm C SUP.side passage BLEED Exhaust valve SUP OUT Main valve Valve guide Exhaust F i x ed ori f i ce S UP F or ce N F o rce N Nozzle flapper MPa/ m Diaph.(C) m 2 Main valve MPa/ m (S) 1 1 Setting spring N/m Displ Press Press.

High Vacuum L Type Valve

Model Starting Holding Power(W) Current(A) Power(W) Current(A) *G/C/D/T , P5G 36 1.5 4.8 0.38 P1G 50Hz 30.5 0.47 14.8 0.35 XLS-1660Hz 10 0.27 P2G 50Hz 30 0.24 4.9 0.11 60Hz 2.3 0.10 *G/C/D/T , P5G 47 2.0 5.3 0.5 P1G 50Hz 42 0.62 20 0.46 XLS-2560Hz 13.5 0.36 P2G 50Hz 45 0.35 6.7 0.15 60Hz 3.0 0.12 7 XL*-OMI0013-B 4.

5 Port Air Operated Valve Series VFA3000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

ALB900

Description Material Aluminum casted Aluminum casted Top cover Bottom cover q w VOA301-M V0307E-D-X56 3 port switching valve (for operation control) e 1 VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 x 6 x 2 JIS B 2401P3 r t y u i o !0 !

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

Compact Guide Cylinder/Wide Type MGPW Series 20, 25, 32, 40, 50, 63 How to Order MGP M W 25 M9BW 50 Compact Guide Cylinder Made to Order For details, refer to page 499. Wide type Bearing type M L A Number of auto switches Nil S n Slide bearing Ball bushing High precision ball bushing 2 pcs. 1 pc. n pcs.

Electric Actuator / Guide rod Slider

Move M Speed Position Pushing F TriggLV IN pos mm/s mm % % mm 0 Absolute 250 50.00 0 0 1.00 Input 30 Step Data No. Move M Speed Position Pushing F TriggLV In pos mm/s mm % % mm 0 Absolute 250 30.00 0 0 1.00 6. Controller setting software screen explanation Refer to the Help / Easy mode menu in the ACT Controller setting software.

HRX-OM-W004

HRX-OM-W004-H Operation Manual Communication function Thermo-chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRR010-A-10HRR012-A-10HRR018-A-10HRR010-A-20HRR012-A-20HRR018-A-20HRR024-A-20HRR030-A-20HRR050-A-20HRR050-A-40HRR010-W-10HRR012-W-10HRR018-W-10HRR010-W-20HRR012-W-20HRR018-W-20HRR024-W-20HRR030-W-20HRR050-W-20HRR050-W-40Keep this manual available whenever necessary

EX600-SEN_eng

NS LED is Off MS LED is off Off URL http://www.smcworld.com PWR(V) Display ST(M) PWR MS NS Displays the network status. for 2 hours each in direction X, Y and Z respectively (De-energized) Displays the module status. Displays the status of the power supply voltage for outputs. Displays the status of the power supply voltage for control and input.

EX500-Sx03_eng

System configuration How to order: EX500-AC 030 SSPS Cable length (L) 003 0.3 [m] Connector Power supply cable GW unit SSPS Socket side: Straight Plug side: Straight With SI unit Valve manifold (SY/SV/VQC/S0700 Series) 005 0.5 [m] Display Description 010 1 [m] SAPA Socket side: Angled Plug side: Angled LED is OFF The power supply for input and control is OFF PWR Thank you for purchasing an

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Construction 3 1 Component Parts Description Material No. q w e r t y u 4 Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Resin Stainless Steel Stainless Steel Stainless Steel NBR NBR, Resin 2 5 6 7 4.3-5 Series VQ20/30 Dimensions/Series VQ20 In-line style/Grommet(G) VQ21A1-mGm-m Dotted line: Bracket mounting style (-F) 4.3-6 Series VQ20/30 For Dry Air,

PSxx-OMU0005CN

NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5 M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2 LCD 4 ON

EX600-SDNA_eng

Red ST(M) LED is flashing Red PWR(V) LED is On Red ST(M) LED is On Green MS LED is On Red PWR LED is On Green LEDs are On Red MS LED is On LED display LED display Off Off URL http://www.smcworld.com PWR(V) Display ST(M) PWR MS NS Displays the network status. for 2 hours each in direction X, Y and Z respectively (De-energized) Displays the module status.

EX600-SPRA_eng

. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply SI unit common status PROFIBUS DP status Red SF LED is On and red BF LED is flashing Diagnostic Commissioning LED Display Outline with Dimensions Specification Troubleshooting Red/green ST(M) LED is flashing alternately Vibration resistance 147 m/s2 3 times each in directions of X, Y and Z respectively (De-energized)

EX600-SMJ_eng

LED Display Commissioning Specification Outline with Dimensions Troubleshooting Vibration resistance 147 m/s2 3 times each in directions of X, Y and Z respectively (De-energized) Impact resistance Settings2 For use in Pollution Degree 2 Environment (UL508) Pollution degree Solenoid valve with lamp and circuit of protection of surge voltage of 24 VDC 1.5 W (SMC) Connected load Either of the

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) W 4 A 15.5 W 5.5 A 11.5 12 16 20 25 0.5 4.5 0 4.5 16 4 6 12 3.5 1 20 7.5 2.5 16 5.5 -1 21 9.5 0.5 17 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

EX600-SPN3_4.eng

(M4 x 20) Tightening torque: 0.7 to 0.8 Nm. The tightening torque at the valve side depends on the valve type. Refer to the operation manual of the corresponding valve manifold. Summary of Product parts Troubleshooting 5 Refer to the LED Display.

EX250-SCA1A_eng

Bus cable specification Termination resistance [] Bus length [m] 6 Switch protective cover Sets the node ID etc. with the switch inside.

FH150

(Including O-ring for element) 5 m 10 m 20 m Model FH150-02 FH150-03 FH150-04 Element size EP910-005N EP910-010N EP910-020N 55 x 90 Note 1) The symbol at the end of the element part no. indicates the hydraulic fluid type. N: Petroleum, V: Phosphoric ester, W: Water-glycol, Emulsion (10 m only) Note 2) Refer to page 528 for micromesh elements.

High Vacuum L Type Valve

1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside

High Vacuum L Type Valve

1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized