Exhaust Cleaner Series AMC

101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

Series AP3500

Vespel is a registered trademark of DuPont. 101 Air operated type (For low pressure) Diaphragm Valve for Ultra High Purity Series AP4500 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed or normally open LOTO option available as an option (AP4540) Indicator switch available as an option (AP4550) How to Order (Inlet) (Outlet) AP

Process Valve

Note 1) Note 2) Note 3) Note 4) Note 5) VNB VNB Specifications (Vacuum pilot type) Fluid Vacuum SGC 101 kPa to Atmospheric pressure Pilot pressure range Operating pressure range Pilot Solenoid Valve Specifications 101 to 47.9 kPa SGH Port size 6A to 25A 32A to 50A VO307-1 VO307D DZ1-Q Symbol (Vacuum pilot type) Pilot solenoid valve Note1) SF4--23 SF4D DZ-23-Q VNC Valve type Type N.C.

New

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in XXX. D-DN

100

Vacuum pressure switch Compound pressure switch Pressure switch for vacuum with energy saving function Rated pressure range 0 to 101 kPa 100 to 100 kPa For details on compact digital pressure switch functions, refer to the Operation Manual of the ZSE10 series on the SMC website (https://www. smcworld.com).

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

to 101 kPa], Option: None, Analog Voltage Output(V): 1 to 5 V DC

to 101 kPa], Option: Connector for pressure sensor controller (1 pc.) + Sensor cable (3 m), Analog Voltage Output(V): 1 to 5 V DC

to 101 kPa], Option: Sensor cable (3 m), Analog Voltage Output(V): 1 to 5 V DC

The ZSE1 monitors vacuum level down to -101 kPa.  ZSE1 can be mounted in a ZM vacuum generator system, or by metric or NPTF male threads.  Rotary trimmers adjust the switch set point and variable hysteresis if 1 output, or two set point trimmers if 2 output.  A red/green LED indicator also lights when the output signal in ON.

Basic vacuum switch with rotary adjustment of a digital output signal; Vacuum range: -101 to 0 kPa; Output: 1 signal output (NPN or PNP); Power supply requirement: 12 to 24 VDC; Repeatability: ±1% of F.S.; Port sizes: 1/8 Rc or 1/8 NPTF male, or ZX or ZR gernerator mountable

The ZSE1 monitors vacuum level down to -101 kPa.  ZSE1 can be mounted in a ZM vacuum generator system, or by metric or NPTF male threads.  Rotary trimmers adjust the switch set point and variable hysteresis if 1 output, or two set point trimmers if 2 output.  A red/green LED indicator also lights when the output signal in ON.

Basic vacuum switch with rotary adjustment of a digital output signal; Vacuum range: -101 to 0 kPa; Output: 1 signal output (NPN or PNP); Power supply requirement: 12 to 24 VDC; Repeatability: ±1% of F.S.; Port sizes: 1/8 Rc or 1/8 NPTF male, or ZX or ZR gernerator mountable

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: R (External Pilot), Stations: 4 Stations, Symbol: 3, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 2 Stations, Symbol: 3, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 5 Stations, Symbol: 3, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 8 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: R (External Pilot), Stations: 4 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: R (External Pilot), Stations: 7 Stations, Symbol: 1, Port Size: 04 (1/2)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: R (External Pilot), Stations: 3 Stations, Symbol: 1, Port Size: 04 (1/2)