(The terminal screw is an M3 cross head screw.) (1) Be sure to connect each signal line to its dedicated terminal. (Refer to Fig. 1) The applicable size of the cross head screwdriver is No.2 (6 mm or less). Tighten the screws securely with a torque of 0.5 to 0.6 Nm. Fig. 1 (2) Be sure to connect a terminating resistor between DA and DB at both ends of the CC-Link system.
SI () SI SI SI () ()SI SI SI IP67 M12/M8 SI ( ) SI SI ()SI CE -6No.EX-OMP0004CN-I
SI SI PLC PLC SI IP -7No.EX-OMP0004CN-I
EX260-SMJ 1 1 M12 32 /PNP() 2 M12 32 /NPN() 3 M12 16 /PNP() 4 M12 16 /NPN() MJ CC-Link -8No.EX-OMP0004CN-I
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?
, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?
, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?
, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?
, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateOption80.18