Size: 3/8, Model Combination: AF+AR+AL, Port Size: 3/8, Size 31, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41

Size: 3/8, Model Combination: AF+AR, Port Size: 3/8, Size 31, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41

Size: 1/2, Model Combination: AF+AR+AL, Port Size: 1/2, Size 41, Accessory: None, All Sizes, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41

Size: 1/2, Model Combination: AF+AR, Port Size: 1/2, Size 41, Accessory: None, All Sizes, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41

Size: 3/8, Model Combination: AF+AR+AL, Port Size: 3/8, Size 31, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Flow Direction: Right to Left, Size 31 & 41

Size: 3/8, Model Combination: AF+AR, Port Size: 3/8, Size 31, Accessory: Float Auto Drain, N.O., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41

Size: 3/8, Model Combination: AF+AR, Port Size: 3/8, Size 31, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41

Size: 3/8, Model Combination: AF+AR+AL, Port Size: 3/8, Size 31, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41

Type: 41 (Feedback Sensor Type), Bar Length: 580mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: Z (10m), One-Touch Fitting: ø8, Bracket: B (Bracket), Sensor: F (Feedback Sensor for Type 41)

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

) (67) (73) Pilot port threaded type 20 39 30 A A 32 2 x 5 MAX 14 (52.6) M5 x 0.8 Depth 5 Pilot port M5 x 0.8 Depth 5 Pilot port 44 36.5 23.5 1/8 1/8 9.5 (41) 4.5 (67) 501 Tube Extensions Series LVD How to Order Body class LVD 2 0 06 T Option Symbol 2 3 4 5 None With flow rate adjustment Nil 1 Orifice dia. 4 8 10 16 Body class 2 3 4 5 Note) Refer to Variations in the table below for option

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

H J M N 10-/21-AR20-B 10-/21-AR25-B 10-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41

Series 10-, 21- AW-B Filter Regulator

Optional specifications Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41

60

61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4 90.9 119.4 123.4 152.3 31.3 40 53 55 71 25.3 33 44 46 60 53.3 30 41

XLAQ/XLDQ

assembly (Maintenance parts) (Material: Stainless steel 304 plus sealant) S valve (Material: Stainless steel 304) i Valve side exhaust Refer to page 478 for the maintenance parts. 473 XLDQ Series Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41

10-cna2-e

Contents Bore size (mm) MB40-PS MB50-PS MB63-PS 40 50 63 80 100 MB40-PS MB50-PS MB63-PS MB80-PS MB100-PS #9 $0 41 Piston seal NBR Rod seal A NBR Set of left nos. #9, $0, $3, $5 Rod seal B NBR MB80-PS 42 $3 44 $5 46 Release piston seal NBR MB100-PS 41, 42, 44 and 46 to 49 are non-replaceable parts, so they are not included in the seal kit.

10-cna2w-e

. #8, #9, $2, $4 Rod seal B NBR MBW80-PS 41 $2 43 $4 45 Release piston seal NBR MBW100-PS 40, 41, 43 and 45 to 48 are non-replaceable parts, so they are not included in the seal kit. Cushion seal Urethane Since the lock of the CNA2 series cannot be disassembled and is normally replaced as a unit, kits are for the cylinder section only.

Size: 3/8, Model Combination: AF+AR, Port Size: 3/8, Size 31, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 3/8, Model Combination: AF+AR+AL, Port Size: 3/8, Size 31, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 3/8, Model Combination: AF+AR+AL, Port Size: 3/8, Size 31, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 3/8, Model Combination: AW+AL, Port Size: 3/8, Size 31, Accessory: Float Auto Drain, N.O., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -