SMC Corporation of America
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Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

System error (Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 24 VDC 10%. (2) Supply power in the range 12 to 24 VDC 10%. "HHH" is displayed. 6 (1) Reset applied pressure to a level within the set pressure range. (1) Check if the pressure exceeds the upper limit of the set pressure range.

It is necessary to set it on the PLC side according to the kind of PLC. 38 - 6.3 The recommended value of the parameter [LEY] LEY25/ LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Initial value Recommended value Parameter *1,*2 Para.

It is necessary to set it on the PLC side according to the kind of PLC. 35 - 6.3 The recommended value of the parameter [LEY] LEY25/ LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

4.7 8.0 12 18 29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -6No.

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

12 25 17 18 25 5 1 3 46.5 12 12 2-3/8 EA,EB PORTS 22.5 22.5 L = 1/4 23.5 15 30.5 45 3/8 27 EA EB P 1/2 30.5 49.5 1/4, 3/8,1/2 P PORT 152.5 165.5 ALL DIMENSIONS ARE IN MILLIMETERS 11 Series VS R8b S ISO SIZE 2-3 SUB-BASE VS8w 03/04/06/10w SIZE 2 3/8, 1/2, 3/4 SIZE 3 1/2, 3/4, 1 2 PORTS A,B, PORTS 2-1/8 PILOT EXH PORTS A A B A B C SIZE 2 7 SIZE 3 9 2 MOUNTING HOLES SIZE 2 3/8 SIZE 3 1/2 5

A 3.0 D Specification Element Model A B SCFM Nm3/h C D In/Out Side Bottom Lbs Dimensions (in) Connections (NPT female) Flow Rate Weight Model Number 5.5 1/4 1/8 male 1 1.25 6 14 4.5 AFW150-N10DG-[a] 255 EL-AFW150-[a] 150 12 1/2 1/4 1-1/2 1.5 6.5 19 5.75 AFW225-N14DG-[a] 382 EL-AFW150-[a] 225 12 1/2 1/4 1-1/2 1.5 6.5 19 5.75 AFW300-N14DG-[a] 510 EL-AFW150-[a] 300 B 12 1/2 1/4 2 1.5 6.5 19

LE-CSNS: 10120-3000PE (connector)/10320-52F0-008 (shell kit) manufactured by 3M or equivalent item. 39 39 39 Regeneration option (LECSm common) 6 Mounting hole LA LEC MR RB (12) 144 12 (6) 15 Regeneration option type 032 12 Allowable regenerative power 30 W Allowable regenerative power 100 W Confirm regeneration option to be used in Model Selection. 5 156 168 Dimensions [mm] LB 119 169 LC

12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Option (-T): High Pressure Pump Mounted HRSE -A-10-T 012

EX600-ZT1 (6)Assembled type connector PCA-1446553: For EtherNet/IPTM communication, M12 (4 pin) Plug, D code PCA-1578078: For power supply, 7/8 inch, Plug, Cable O.D. 12 to 14 mm PCA-1578081: For power supply, 7/8 inch, Socket, Cable O.D. 12 to 14 mm (7)Power supply cable PCA-1558810: Cable with 7/8 inch connector, Socket, Straight 2 m PCA-1558823: Cable with 7/8 inch connector, Socket, Straight

Name Alarm flag 1,2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Unused 1 ERR01 System error 1 2 ERR02 System error 2 3 ERR03 Back-up data error Alarm flag 1 4-10 Unused 11 ERR11 DC power supply failure 12 ERR12 Internal temperature sensor High temperature failure 13 ERR13 Internal temperature sensor Low temperature failure 14 ERR14 Thermostat alarm Alarm given off status

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

Accessory: waterproof cap (for M12 connector socket) EX9-AWTS (2 pcs.) -40No.EX##-OMO0019 Dimensions When only input blocks for M8 connector are connected Stations 1 2 3 4 5 6 7 8 L1 [mm]: Rail length 98 110.5 123 135.5 148 160.5 173 185.5 L2 [mm]: Mounting pitch 87.5 100 112.5 125 137.5 150 162.5 175 L3 [mm]: Manifold length 74 86 98 110 122 134 146 158 L4 [mm] 12 12 12.5 12.5 13 13 13.5

3 x 7.2 (= 21.6) 8-M3 OUT2 NC Sensor 36 +0.5 0 8 Load 6.4 4 OUT1 Black 7 3 Load 1 2 3 4 Brown + 6 2 +0.5 0 Blue 19.4 5 1 12 to 24 VDC Series PF2D5 5 6 7 8 PF2D301-A(-M) Do not connect the white wire of the sensor to c of the display unit.

55 63 74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8 1 4 1 4 VND50D-32F VND60D-40F VND70D-50F 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 17-4-41 6 Series VND Precautions

Company Bs PLC I/O card Connector pin assignment (pin layout) Company As PLC I/O card Connector pin assignment (pin layout) Change of PLC manufacturers (Company A to Company B) + + + + 2F 2E 2D 2C 2B 2A 11 13 15 17 19 1B 1D 1F 21 23 25 27 29 2B 2D 2F 29 28 27 26 25 24 23 22 21 20 + + 19 18 17 16 15 14 13 12 11 10 + + 1F 1E 1D 1C 1B 1A 10 12 14 16 18 1A 1C 1E 20 22 24 26 28 2A 2C 2E General

It is also effective to restrict the flow rate of circulating fluid or remove the gasket of internal tank for the release to atmosphere. 12. If fluorinated fluid is used in the Thermo-con (HEC006/012), static electricity will be generated by the flow of fluid.

Motor cable: Counter axis side Lock cable: Counter axis side Encoder cable: Axis side (30) L 37.4 LE-CSNA LE-CSNB I/O connector LE C SNA 37.2 52.4 Controller type I/O connector (LECSA) I/O connector (LECSB) SNA SNB 39 39 Regeneration option 6 Mounting hole LA LEC MR RB LEC (12) 144 12 (6) 15 Regeneration option type 032 Allowable regeneration power 30 W 12 Allowable regeneration power 100