ITV

Note) Breathing hole (M3 x 0.5) 3.7 3.7 13.7 1 SUPz VACz OUT port (4, 5/32") SUP, VAC port (4, 5/32") OUTx 3 EXHc ATMc 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L-bracket (Option) Flat bracket (Option) 6-3.5 19 74 2-3.5 19 27 19 64 Minimium bending radius 80 28 Body +50 0 3000 15 35 (30.9) 4 8.7 9.9 Cable connector (4-wire) Straight type (Option) 7

3 Port Solenoid Valve

Turbine oil P-32 Viscosity according to ISO Grade Classification of viscosity cst (40C) Classification of viscosity cst (40C) 32 32 Kyushu Oil Co. Stork Turbine 32 Nippon Oil Corp. Turbine oil 32/ Mitsubishi turbine 32 Showa Shell Sekiyu K.K. Turbine 32 Cosmo Oil Co., Ltd. Cosmo turbine 32 Tonen General Sekiyu K.K. General R turbine 32 Japan Energy Corp.

Fieldbus system CC-Link compatible SI unit

OFF ON 2.00 1 128/128 32 word/32 word 8 times 7 OFF ON ON 2.00 2 384/384 64 word/64 word 8 times 8 ON ON ON 2.00 3 640/640 96 word/96 word 8 times : The default operation mode at the time of shipment is mode 1. : The last register of bit area (16 bits) cannot be used as they are allocated for the system area.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.

Clean Room Rodless Cylinder Series CYP ø15, ø32

CY MG Bore size 15 32 15 mm 32 mm CX Auto switch Nil Without auto switch DFor the applicable auto switch model, refer to the table below.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

268 Theoretical Output (N) Piston area (mm) Operating pressure (MPa) Bore size (mm) 0.2 0.3 0.1 15 53 35 18 176 32 241 161 80 804 8-17-8 8 Clean Room Rodless Cylinder Series CYP Construction CYP15 MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX

SI unit for DeviceNet ®

Discrete Input Assembly instance ID Type Description No. of bytes Product model 17 Input 32 Discrete input Points 4 EX250-SDN1 18 Input 32 Discrete input Points 6 EX250-SDN1-X102 -25No.EX-OME0003-H The data format is shown below.

VVX31/32/33

Series VVX31/32/33 Normally Closed (N.C.), Normally Open (N.O.), Common (C.O.)

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

EXxx-OMU0020EN

Enter one of the "Valves (16 coils)" or "Valves (32 coils)" modules in Slot 1. Enter all other modules that are connected on the left hand side of the SI Unit (max. 8 modules).

Metering Valve with Silencer Series ASN2 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-11-2

Compact Vacuum Unit

2 mm one-touch fitting L4: Elbow 4 mm one-touch fitting Applicable tube O.D.: 4 mm Applicable tube O.D.: 2 mm 0.5 0.788 0.039 0.85 0.343 0.63 0.37 0.787 (0.05) 1.496 0.039 0.394 0.213 0.181 0.331 0.327 LN1: Elbow 1/8" one-touch fitting LN3: Elbow 5/32" one-touch fitting Mounting the left side of the unit to the inside Applicable tube O.D.: 1/8" Applicable tube O.D.: 5/32" 0.394 0.85 0.5

ZB-OM00301

" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Bore size 12 12 mm 40 40 mm 16 16 mm 50 50 mm 20 20 mm 63 63 mm 25 25 mm 80 80 mm 32 32 mm 100 100 mm Auto switch Nil Without auto switch (Built-in magnet) *: For applicable auto switches, refer to the table below. Port thread type Nil M5 x 0.8 Rc TN NPT TF G Cylinder stroke [mm] Refer to Standard Strokes on page 433. *: For bore sizes 12 and 16, only M5 x 0.8 is available.

CYV

18 35 53 176 268 32 80 161 241 804 1 Rodless Cylinder for Vacuum Series CYV Construction CYV15 @0 #7 #5 @9 #0 !

2/3 Port Valve for Various

VX31/32/33 VX3 &'((+& &'((+, &'(('& &'((-& VXA VN LVC ! VXA21/22 ! VXA31/32 LVA &'((, &'((&.& LVH /" 0& " 1 2 # % 2 3 '.(2 /" 0& " 1 2 # % 2 3 '.(+2 % " 0 " 4 " 52 LVD LVQ LQ LVN TI/ TIL PA PAX PB 17-3-1 2/3 Port Valve For Fluid Control Solenoid Valve/Air Operated Valve For Water, Air, Oil, Gas, Vacuum and Steam Series VX21/22/23 ! " #$ %&'()* Series VXD21/22/23 .

Rodless Cylinder for Vacuum Series CYV ø15, ø32

18 35 53 176 268 32 80 161 241 804 1 Rodless Cylinder for Vacuum Series CYV Construction CYV15 @0 #7 #5 @9 #0 !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

[mm] Load position [mm] Load [N] High rigidity guide LEKFS LEFS 25 0.022 (50% reduction) 0.044 25 200 32 0.036 (50% reduction) 0.072 30 450 40 0.027 (50% reduction) 0.053 37 500 MZero table clearance Table Clearance 300 mm Size Displacement due to table clearance [mm] High rigidity guide LEKFS LEFS 25 0 0.079 Amount of displacement from the 300 mm position 32 0 0.068 40 0 0.052 1 Electric

Series AP500

PTFE (Option: PCTFE) 20 0.14 Dimensions inch (mm) 15 0.10 AP500 10 0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8