Vacuum Regulator

SET side tubing O.D. 6, 8, 10 1/4" , 5/16" , 3/8" 6, 8 1/4" , 5/16" 135 g (IRV10-C08) 125 g (IRV10A-C08) 250 g (IRV20-C10) 250 g (IRV20A-C10) Weight (Without accessories) Standard connections Single sided connections Note 1) Use caution it varies depending on the pressure in vacuum pump side.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 125 140 160 180 200 250 300 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VFS5100-06 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully

Membrane Air Dryer

rate (L/min [ANR]) 180 Existing model 160 Reduction ratio 140 31% IDG50A New New 120 Purge air flow rate (rated conditions) 100 80 Model Purge air flow rate Purge ratio Running cost 60 (L/min [ANR]) (%) (yen/year) 40 46,440 15 86 IDG50A New New 0 Existing model 67,500 20 125 0.0 0.5 1.0 [Calculation conditions] Air unit price: 3 yen/m3 Operating hours: 12 hours/day Annual operating days: 250

58

Smooth Cylinder Auto Switch Made to Order Fluid Air Proof pressure 1.57 MPa Maximum operating pressure 0.97 MPa Minimum operating pressure 0.05 MPa Piston speed 50 to 500 mm/s Cushion Air cushion 0 to 70C (No freezing) Without auto switch Ambient and fluid temperature JIS Symbol Double acting 0 to 60C (No freezing) With auto switch Lubrication Not required (Non-lube) Stroke Tolerance +1.0 0 250

AC Servo Motor Driver (CC-Link Type)

143 1000 500 250 Different from the initial value. *5.

Digital Pressure Switch

X576 Item Default setting Item Default setting [P_1] Set value of OUT1 250 Pa [P_2] Set value of OUT2 250 Pa [H_1] Hysteresis of OUT1 25 Pa [H_2] Hysteresis of OUT2 25 Pa X577 Item Default setting Item Default setting [P_1] Set value of OUT1 0.500 kPa [P_2] Set value of OUT2 0.500 kPa [H_1] Hysteresis of OUT1 0.050 kPa [H_2] Hysteresis of OUT2 0.050 kPa X578 Item Default setting Item Default

Fieldbus system DeviceNet TM compatible SI unit

Settings1 Content 3 4 OFF OFF 1 Mbps (Default setting) OFF ON 500 kbps ON OFF 250 kbps ON ON 125 kbps : This function is for possible extension. Keep the default setting of 1 Mbps. -22No.EX-OMN0030-D Diagnostics switch: Allocates the diagnostic data to the input data.

EXxx-OMN0029CN

kbps 0 1 1 2 500 kbps 0 2 2 3 : : : : PGM 6 2 62 9 6 3 63 6 4 : : PGM 9 DeviceNetPGMHW/SW ON -21No.EX-OMN0029CN-D V_SEL SI () Settings1 SI 1 2 OFF OFF 32 4 byte() OFF ON 24 3 byte ON OFF 16 2 byte ON ON 8 1 byte Baud Rate EX600 Settings1 3 4 OFF OFF 1 Mbps() OFF ON 500 kbps ON OFF 250 kbps ON ON 125 kbps 1 Mbps() -22No.EX-OMN0029CN-D Settings2 1 2 OFF OFF 0 () 0 byte OFF ON

EX510-GDN1.eng

(Removal procedure and ) Applicable message I/O message size Input: Max. 8 byte, Output: Max. 8 byte (Changeable by switch settings) 1 2 Baud rate 125 kbps 250 kbps 500 kbps 500 m or less Thick cable 250 m or less 100 m or less Max. length of Network 3 4 Thin cable 100 m or less 156 m or less 78 m or less 39 m or less Total extended cable length Note: Max. extended cable length is 6 m. 11

Digital Flow Switch for Water Series PF3W 3-color display ®

Bracket (Option) 11 $ 40 $ $ 20 $ $ 21 $ None Yes Nil S None Bracket Nil Note 1) 100 and 250 L/min types with flow adjustment valves are not available. Note 2) The flow adjustment valve of this product is not suitable for applications which require constant adjustment of flow rate.

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16”), 075(3/4”), 106(1 1/16”), 150(1 1/2”), 200(2”), 250(2 1/2”), 300(3”), 400(4”) Series NCQ8

Compact Cylinder Double Acting, Single Rod Bore size: 056(9/16), 075(3/4), 106(1 1/16), 150(1 1/2), 200(2), 250(2 1/2), 300(3), 400(4) Series NCQ8 How to Order Without auto switch B 056 025 NCQ8 B 056 025 Z M9BW S NCDQ8 With auto switch Built-in magnet X-Option Nil XB6 XC4 Standard High temp.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

Single Axis Electric Actuator Series LJ1

Standard motor LJ1H202NF-K 100W to 250 [Tamagawa Seiki Co., Ltd.]

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

rail 43.1 29.5 (5.25) (Voltage rating indication) L2 (DIN rail mounting hole pitch 12.5) L1 P=19 51 [Rc(PT) 1/4 port] 2n2-One-touch fitting Applicable tube O.D.: 8 10 SS5Y7-60Stations D [52.5] (5.5) (Light/surge voltage suppressor) (Station n) (Station 1) 25.4 39 49.1 (5.4) 2 3 4 5 6 7 8 9 10 Stations L1 135.5 148 173 185.5 210.5 223 248 260.5 285.5 L2 125 137.5 162.5 175 200 212.5 237.5 250

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5 198 225 235.5 169.5 209 237.5 248 180.5 220 250

IC

Note) If the set pressure is 250 kPa and the output pressure on the pressure sensor is 245 kPa, the deviation is 250 245 = 5 kPa. In order to correct the deviation, the controller increases the output signal until the pressure on the pressure sensor converges at 250 kPa. Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

Electromagnetic Digital Flow Switch

aqueous solution Karman vortex IP65 3-color display 0.1 L/min 5 40 10 100 1 L/min 50 250 2 L/min PVC piping type 1 L/min 10 100 Water, Ethylene glycol aqueous solution IP65 3-color display Karman vortex 2 L/min 30 250 PF2D 0.05 L/min 0.4 4 Deionized water (pure water), Liquids which do not corrode nor erode fluoropolymer IP65 1-color display Karman vortex 0.1 L/min 1.8 20 4 40 0.5 L/min

90

Annual cost reduction effect [Calculation conditions] Electric power cost: 1.55 yen/m3 [Work model] Working hours: 6000 h (250 days/year) Supply pressure: 1.0 MPa Set pressure: 0.2 MPa Comparison between IR3000-A and the current IR3000 Comparison between IR1000-A/IR2000-A and the current IR1000/IR2000 300 300 Annual cost of power consumed by compressor [1000 yen/year] 250 250 When 20 units

0.01

ISA2-G ISA2-H Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Standard pressure: 100 kPa Standard pressure: 100 kPa Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 2.0 0.4 0.6 Standard pressure Standard pressure 0.5 mm 0.25 mm Detection distance (mm) Detection distance (mm) 0.5 0.3 0.4 0.2 0.3 0.15 mm 0.15 mm 0.2 0.1 0.1 0.03 mm 0.01 mm 0 0 50 0 250 200 150 100 250