Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Symbol Nil R S RS Specifications Internal pilot specification External pilot specification Internal pilot specification/Built-in silencer External pilot specification/Built-in silencer Mounting position Symbol Applicable stations B 2 to 16 stations 2 to 10 stations 2 to 10 stations D U D side U side Both sides M Special specifications Indicate special specifications separately on a manifold

PSxx-OMM0006CN

-0.1051.050 MPa 500 kPa 500 kPa 1.5 MPa 0.1 kPa 0.1 kPa 0.001 MPa DC1224 V 10 (p-p)10() 45 mA NPN PNP 2 80 mA 28 V(NPN ) 1 V (80 mA ) 2.5 ms(20,100,500,1000,2000 ms ) 0.2F.S. 1 digit 0 1 () 15 V2.5F.S. 0.65 V2.5F.S. 1F.S. 2 1 k () 420 mA2.5F.S. 2.420 mA2.5F.S. 1F.S. 3 12 V 300 24 V 600 50 ()Low 0.4 V 5 ms 3 1/2 7 LCD 2 (/) 2 F.S.1 digit(253 ) ON OUT1OUT2 IP65

Low Differential Pressure Sensor

CAT.ES100-49 A Low Differential Pressure Sensor Rated differential pressure range: 0 to 2 kPa 0 to 2 0 to 2 kPa kPa 0 to 2 0 to 2 kPa kPa Accuracy: 1% F.S. 1% % F.S. F.S. 1% % F.S. F.S.

NCY2 series

Standard Stroke 2 , 3 , 4 , 5 , 6 , 8 , 1 0 2, 3, 4, 5, 6, 8, 10 5, 10, 15,20,25,30 5, 10, 15,20,25,30,40 5, 10, 15, 20,25, 30, 40 5, 10, 15,20,25,30,40 1 kg=2.2 16. Magnetic Holding Power (lbs) 1N=0.101 H 227.94 L type 140.65 Basicweight. -. -. 8.00 lb6) Additional weight.. . 0.30/1 inch !

Steam Valve

1 8 1 4 1 4 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

Standard Stroke 2 , 3 , 4 , 5 , 6 , 8 , 1 0 2, 3, 4, 5, 6, 8, 10 5, 10, 15,20,25,30 5, 10, 15,20,25,30,40 5, 10, 15, 20,25, 30, 40 5, 10, 15,20,25,30,40 1 kg=2.2 16. Magnetic Holding Power (lbs) 1N=0.101 H 227.94 L type 140.65 Basicweight. -. -. 8.00 lb6) Additional weight.. . 0.30/1 inch !

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

IDX-OM-Z004

6 2 GWP IDX-OM-Z004 6 6.3 IDF100F-30-W () (10, 2m) ) 4 (10 4x ( 20 4x 25 2m) (10, 0.7m) (10,0.7m) 107 267 460 R2 735 64 75 7001 1120 R2 (17) 17) 40 127 479 51 1276 1418) (14~18) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y 1/2 () () R1/2 R1/2 (50) 20 (143) 335 7122 752 670 1,3 (-W5) -W5 -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 3 IDX-OM-Z004 6 IDF125F-30-W () K16K (10, 2m) (10 ) ( 4

LECA6_C

LEC-OM08001 DC24V / / LECA6 Series 1. . 4 2. . 6 2.1. . 6 2.2. 7 2.3 . 8 2.4 (). 9 (1) . 9 2. 9 3. 9 4. 10 5(). 10 6. 10 3. . 11 3.1. . 11 3.2. 12 3.3. . 13 1LECA6. 13 2DIN LECA6D. 13 3.4. 14 1. 14 2. 14 3. 15 4. . 16 4.1 CN1. 16 4.2 CN2CN3:. 16 4.3 CN4I/O . 16 1. 16 2. 17 4.4 CN5I/O . 17 5.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Urethane rubber Fluororubber Silicon rubber ZP 40HBN ZP 50HBN ZP 63HBN ZP 80HBN ZP100HBN ZP125HBN 17 EPR N ZCUK NBR 33 40 0 +10 +1 1 40 S 40 Silicon rubber 63 50 0 +19 +1 2 50 U 50 AMJ Urethane rubber 103 63 0 +37 +2 3 63 F 63 Fluororubber 206 80 +61 0 +2 6 80 E 80 AMV EPR 390 100 1 +121 12 +4 100 100 Pad type 125 3 +7 +228 22 125 125 AEP HB Large bellows pad HEP Dimensions Related Equipment

PSE200

SET SET To measuring mode 10 Series PSE Operation : Pressure Setting Auto preset Channel selection MPa Measuring mode kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE CH1 CH2 CH3 CH4 SET Adsorption verification SET High Suction Auto preset mode Vacuum Work 1 Work 2 Work n OUT1 auto preset preparation Prepare the equipment to be set in this mode. Max. A MPa ON kPa OUT1 OFF OUT2 CH 1 2 3 4 PRESSURE Min.

AR20-B to AR60-B

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 How to Order Refer to page 63 for size 10.

PSE100

ZSE6 ISE6 8 10 ZSE3 ISE3 l50 l45 l48 56 70 4.5 (MAX.8) 35.5 12.5 GS PS ISA 9 8 7 6 10 ZSE1 ISE1 17 10-M3 ZSE2 ISE2 11 23 6 38 50 ZSP 48 (54) ISl ZSM DIN rail L PFl 7.5 10 25 5 IFl 4.5 35 27 Material: Aluminum Part number of DIN rail Part number ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L 105 140 175 210 245 280 315 3.1-14

IC

VE 4 point preset output pressure Applicable in the programming function with up to 20 steps. 10 bit parallel input signal (maximum) Pressure can be set with 2 10 = 1024 steps. VY1 G Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Symbol Applicable stations Mounting position U side D side Both sides M Special specifications 2 to 10 stations 2 to 10 stations 2 to 16 stations D U B Indicate special specifications separately on a manifold specification sheet. Note 2) The number of blanking plate assemblies is also included.

PFxx-OMS0001CN

PFMC 7 7 A*8 8 501 5~500L/min 2 102 10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

VP4

Note) A/B port piping: Rc 3/8 or Rc 1/2 Option VFS 9 Other Base specifications Individual EXH VS4 1 2 Individual EXH Common EXH Valve stations 02 2 stations VQ7 10 10 stations EVS How to Order Manifold Assembly VFN Specify the valves and blanking plate to be mounted on the manifold along with the manifold base model no.

IR1000/2000/3000

44 51 Approx. 90 10 9.5 Bleed Bleed 63 Exhaust SUP(1) OUT(2) G 2 OUT 30 OUT(2) SUP(1) OUT 10 43 35 EXH Approx. 43 2-Rc(PT) 1/8 Port size 2-Rc(PT) 1/4 Port size Rc(PT) 1/8 Pressure gauge port 50 50 35 2-Rc(PT) 1/8 Pressure gauge port Approx. 60 50 Mounting hole IR300-0 IR2120-02 36 2 Bracket (optional) 30 82 Mounting hole Pressure gauge (optional) 60 2.3 48 Bracket (optional) 5.5 9.5 M5