Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: M (Applicable to Deionized Water Piping)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: MS (Applicable to Deionized Water Piping + Conforming to CE/UL Standards)

Cooling Method: A (Air-cooled Refrigeration), Pipe Thread: F (G, w/Rc-G Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: B (w/Earth Leakage Breaker)

DOC1020530

This wiring is common in each mode. (1) Using 3-phase 200 V AC to 240 V AC power supply for LECSN2-T Note 1. Between P3 and P4 is connected by default. 2. Always connect between P+ and D terminals. (Factory-wired) 4.

AC Servo Motor Driver (SSCNET Type)

Power supply is AC200V single phase (Note 4) Controller Forced Alarm forced stop stop ON OFF RA1 RA2 MC MC SK Driver Servo amplifier Servo motor NFB MC CNP1 L1 1-phase 200 to 230VAC CNP3 (Note 6) U 2 L2 U Motor [1] V 3 L3 V M N W 4 W 1 P1 (Note 1) P2 PE CNP2 P (Note 2) C [3] [2] D (Note 3) Encoder CN2 Encoder cable L11 L21 CN3 CN3 24VDC Forced stop EM1 DOCOM (Note 5) DOCOM DICOM (Note 5)

AC Servo Motor Driver (SSCNET /H Type)

Power supply is AC200V single phase (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC (Note 7) MCCB CNP1 1-phase 200 V AC to 240 V AC (Note 11) L1 CNP3 (Note 6) U U L2 Motor V V L3 M [1] W NW P3 (Note 1) (Note 10) P4 CNP2 P+ [2] (Note 2) C [3] D (Note 11) (Note 3) Encoder CN2 Encoder L11 cable L21 (Note 8) Main circuit power supply CN3 EM2 24 V

AC Servo Motor Driver (MECHATROLINK-II type)

Setup software (SigmaWin+) is necessary for the setting of the parameter. 1 Please download setup software via our website. 2 Prepare USB cable (LEC-JZ-CVUSB) separately. 4.1 power supply specifications When using the DRIVER with single-phase, 200 V power input, set parameter Pn00B.2 to 1.

AC Servo Motor Driver (MECHATROLINK-III type)

Setup software (SigmaWin+) is necessary for the setting of the parameter. 1 Please download setup software via our website. 2 Prepare USB cable (LEC-JZ-CVUSB) separately. 4.1 power supply specifications When using the DRIVER with single-phase, 200 V power input, set parameter Pn00B.2 to 1.

Vacuum Manifold for fieldbus system

N.C. (7) Light/surge voltage suppressor and common specification Symbol Light Surge voltage suppressor Polarity U Non-polar (8) Pressure sensor Note 7) Symbol Specification T1 -100 to 100 [kPa] T2 -100 to 200 [kPa] Note 7) When Nil for (4) exhaust sealing valve is selected, T1 is available, when V is selected, T2 is available.

IDX-OM-W010

Pressure 0.7MPa Inlet Air Temperature 35 oC Ambient Temperature 32 oC Pressurized Dew Point 10 oC Working Fluid Compressed Air Operating Range Inlet Air Temperature 5 ~ 50 oC Inlet Air Pressure 0.15 ~ 1.0MPa Ambient Temperature 2 ~ 40 oC(Relative Humidity of 85% or less) 100V AC(50/60Hz) Single phase AC100/100 , 110VVoltage fluctuations10% Power source 200V AC(50/60Hz) Single phase AC200/200

IDX-OM-W014

(50/60Hz) AC230V (50Hz) PRS AC200/200,220 (50/60Hz) OLR C01 2 2 1 L C11 N TB PRS PE PC TB P FM C11 200V C11200V IDU6E-10 IDU6E-20/23 ILS ILS PTC AC200/200 (50/60Hz) AC230V (50Hz) PTC AC200/200,220 (50/60Hz) AC100/100,110 (50/60Hz) C01 L CM CM PC N OLR OLR PE TB PRS PRS FM P P FM C11 6-5 6 2 IDU Series 6-4 6 4 IDX-OM-W014 7 C 7 C 7-1 7-2 1) 2) IDU Series 7-1 71 IDX-OM-W014

IDX-OM-X004

ID205 to 605 / 206 to 606 (200/220V specified) Remove the terminal block cover or the rear cover in the rear of the product, and connect the power (200/220V AC) to the terminal block. Please install it on either of the M4 screws of the IN/OUT piping when you put up the earth. IN OUT Specification of power cable The following power cable is attached.

AMX-OM-Q015E

300 500 25 50 100 200 300 500 6 12 25 50 60 86 3 6 11 22 29 50 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa 0.7 Inlet air temperature oC 25 Inlet air saturation temperature oC 25 Ambient temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} *Note4 Regulator construction (about Type V) Relief type Port size 1/8

AMX-OM-Q018E

300 500 25 50 100 200 300 500 Outlet air flow rate L/min(ANR) 6 12 25 50 60 86 3 6 11 22 29 50 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa 0.7 Inlet air temperature oC 25 Inlet air saturation temperature oC 25 Ambient temperature oC 25 Dew point indicator purge air flow rate 1 L/min (ANR) {In the case of inlet air pressure 0.7MPa} *Note4 Regulator construction (about Type

Air preparation filter

Drain piping is long, or I.D. of Tube I.D. should be 6.5 (1/4 the piping is small. inch) or more and its length should (Back pressure is applied.) be within 5m (200 inch). Riser pipework should be avoided. Drain exhaust and bowl seat Replace the auto drain. were broken.

S Couplers

Socket with check valve 300 KKA4: Plug and socket with check valve on both sides Insertion force [N] 200 100 KKA3: Plug without check valve.