MY2

5@8 @7 %5!

Magnetically Coupled Rodless Cylinder

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

10

7 !9 !1 !4 !0 !3!8 !6 !5 12-2 12-1 7-2 7-1 1-2 1-1 1-1 Width across flats Rod view 32 (2:1) Component Parts No.

Cylinder with Lock

7 #6 #8 #7#5 #0#1#9 @1@0 @2 @3 @6 @8$0@4@5 @9 t !9 #3#2 #4@7!7!2 Component Parts Component Parts No. Description Material Qty.

CRBU

Refer to p.1.2-7 for further information.)

Programless controller (with stroke study) Step motor (servo 24 VDC)

OFF ON OFF ON Position number IN3 IN2 IN1 IN0 Position number OUT3 OUT2 OUT1 OUT0 1 (End side) 1 (End side) 2 (Motor side) 2 (Motor side) 3 3 4 4 5 5 6 6 7 7 8 8 9 9 10 (A) 10 (A) 11 (b) 11 (b) 12 (c) 12 (c) 13 (d) 13 (d) 14 (E) 14 (E) 24 No.JXC-OMU0030-A (3) The change of I/O output signal The change of I/O output signal under the condition of controller at auto mode.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

C DH7 EN 0 0.1 ER (Max.)

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

Electric Actuators

0 Step motor (Servo/24VDC) 14 7 Electric Actuator/Miniature Rod Type Series LEPY Dimensions LEPY LEPS LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEPY6 C D A B 3.5 2 x M4 x 0.7 x 7 2 x 3.3 through 19 +0.025 0 2.5H9 ( ) depth 2.5 +0.025 0 2.5H9 ( ) depth 2.5 20 12 13 Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M4 x

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

port 3 22.5 3 22.5 84 96 e ng e ng ra 3 ra on on ti A port ta 3 ti 90 4 ro ta 7 ro m 1 A port A port u Clockwise m e e m g s 3 u i ni n w im k C ra c l o Mi 6 3 8 ax n o 1 ti M ta ro e m g u m n ni Mi 180 e ra C s l i o w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock

Fieldbus system Analog unit

15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 Sign MSB AD value LSB -39No.EX-OMN0038-C (3)Scaled data format In the scaled data format, AD values corresponding to the input signal range can be optionally set between F and 7FFF or -32767 and 32767.

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

SMC Pneumatic Clean Series

Hs A 29 B (mm) D-C73 A D-H7A1/H7B B Hs A B Bore size Hs 7 6 22.5 6 5 22.5 7 6 25 6 5 25 8 7 28.5 7 6 28.5 14 12 32.5 13 11 32.5 20 25 32 40 Note) The above values should be used as a guide for detection at stroke end.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

D C B A 91 Series LTF Construction Construction LTF6/LTF8 e t w !0 i r !3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

).B RY(n+4).B Reserve RX(n+4).C RY(n+4).C RX(n+4).D RY(n+4).D RX(n+4).E RY(n+4).E RX(n+4).F RY(n+4).F RX(n+4).0 Digital input 0 RY(n+4).0 RX(n+4).1 Digital input 1 RY(n+4).1 RX(n+4).2 Digital input 2 RY(n+4).2 RX(n+4).3 Digital input 3 RY(n+4).3 RX(n+4).4 Digital input 4 RY(n+4).4 RX(n+4).5 Digital input 5 RY(n+4).5 RX(n+4).6 Digital input 6 RY(n+4).6 RX(n+4).7 Digital input 7 RY(n+4).7 Reserve

Electric Actuator

(7) 140 79 200 E C x 200 (=D) 25 Note 1) Distance within which the table can move when it returns to origin.

EX500

R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.