0.55 Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) for Common Precautions. 30 Series VPA300/500/700 Construction Standard u y t r e w q JIS symbol N.C. N.O. (A) 2 (A) 2 12 12 Standard 1 (P) 3 (R) 1 (P) 3 (R) i (A) 2 (A) 2 2(A) 3(R) o For vacuum 12 12 3 (R) 1 (P) 1 (P) 3 (R) X 1(P) For vacuum u y t r e w q i 2(A) 3(R) o X Component Parts No.
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 Metric Size A (2) M1 L5 (1) Mass (g) d T Model D2 D3 H D1 L1 L3 L4 L2 Min.
T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 A port: Rc 1/8, M5 x 0.8 VV5K3 21 05 A, B port: Rc 1/8, M5 x 0.8 VK3120 VK332 Thread type Valve stations Nil F N T Rc 01 1
Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.
[Nm] MGC + MGF T [N.m] MGZ For non-rotating accuracy q without load, use a value no more than the values in the table as a guide.
Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e Key 0 K K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o
Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clockwise direction. o t a ti o R e n g o n r t a a a n ti r o g n n o e ti r a a t o n R g e Symbol: C40 Symbol: C41 Symbol: C42 The rotation range and the angle adjusting direction of the angle adjustable type are changed.
10 For Options T, MT: 15 Applicable earth leakage breaker capacity8 Rated current: 10 A For Options T, MT: 15 A Sensitivity current: 30 mA Electrical system Cable quantity x Size (Including grounding cable)15 3 cores x 14 AWG (3 cores x 2.0 mm2) Rated operating current (50/60 Hz)17 [A] 3.6/4.0 3.6/4.3 5.2/5.8 5.5/6.2 For Options T, MT 4.7/6.2 4.7/6.5 6.3/8.0 6.5/8.3 Rated power consumption
A 2 x P through KA B 4 x T counterbore Width across flats L S + Stroke CUJ Z + Stroke CU CQS CQ2 RQ (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB CQM 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 12 15.5 19.5 14 18 22 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 8 10 12 M5 x 0.8 M5 x 0.8 1/8 MU Bore size (mm) Standard stroke NN T S Z K KA L MM P Q R 20 25 32 M5
Allowable voltage range 10% Circuit protector17 A 10 (For option -T-MT : 15 Electric system Applicable earth leakage breaker capacity9 A 10 (For option -T-MT : 15 (50/60Hz) A 4.6/5.1 4.7/5.2 5.1/5.9 Rated operating current4 For option -T-MT : 5.6/6.7 For option -T-MT : 5.7/6.8 For option -T-MT : 6.1/7.5 consumption4 (50/60Hz) kVA 0.9/1.0 0.9/1.0 1.0/1.2 Rated power For option -T-MT : 1.1/
The rotation angle can be adjusted between 90 and 190. n io r a at n t g o Rotation starting point e R End of rotation DL L R B B L e o g t B a n ti a o r n n o r a ti n a g t Rotation starting point End of rotation o A A e Operating size 20 30 40 Operating size 20 30 40 R A Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Rotation starting point End of rotation Lmax 24 27 31.5 Lmax 24 27 31.5 Size
r t . : . , t . : r r l ' r i . r t , : t r ' r r r , . a a . . r . r . , r r , , .
0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !
KQ2TW P.153 Use to four-branch a line. P.150 Male run tee KQ2Y Use to branch a female thread in the same direction and at a 90 angle.
6 LEY A-A LES !8 r t e w o B @3 LEPY LEPS A !6 @7 @6 LER @4 LEH A @1 !4 !9 !3 LEY -X5 11LEFS Option: Stroke adjustment unit 11LEJS @5 @5 25ALEC LEC S LEC SS-T LEC Y Motorless LAT Component Parts Component Parts LZ No. Description Material Note 1 Body Aluminum alloy Anodized No.
ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08
Pressure Momentary change P1 P2 Set values t (ms) t (ms) Time Anti-chattering function Devices such as large bore cylinders and high-flow vacuum ejectors consume a large volume of air when they operate, and this may cause a momentary drop in the primary pressure.