VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

Series M Miniature Fittings M3, R(PT) 1/8, M5

M3 male -M3 male M-3N P. 92 M5 M5 M-5ALHN-6 P. 91 Bulkhead union M-5E 6/4 P.90 Panel mount connection. M5 female -M5 female Plug Barb elbow(H) For soft nylon tube. Body rotates at 360 around the stud axis. 3.18/2.18 M-5ALHU-3 To plug unused M3 port.

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-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2

CRJ

EA) 25 1.4 32 5.5 (mm) EA EB HA Size CRJU05 CRJU 1 6.6 5.6 33.8 6.5 5.6 35.8 7.5 3.1 (mm) Rotation angle Q S JC JD BA BD A BH J BB D JB H BE BG BI JA SD BC DD UU N BF CB W CA Size 32.4 21.5 43 90 CRJB05 13.5 M4 x 0.7 5 30 11 19.5 20 M4 x 0.7 5g6 3.5 14.5 6.5 17.1 7 5.8 3.4 9.5 10h9 28 12.5 3.5 5.5 4.5 43.4 27 54 180 37.4 24 48 90 CRJB 1 16.5 M5 x 0.8 6 35 14 23.5 22 M5 x 0.8 6g6 4.5 15.5

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-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2

48

for jog and test function Stop switch Initial language J E Stop switch G Equipped with stop switch Japanese English Specifications Item Description Standard functions Chinese character display Stop switch is provided.

V

and groove, other side is a square shaft Maximum shaft loading and kinetic energy Type Fr (N) Fs (N) E max (Nm) NCRB50 250 200 0.084 NCRB80 500 500 0.040 NCRB100 600 550 0.061 D I M E N S I O N S (I N C H) NCRB50~100 H O W T O O R D E R NCRB R O TA R Y A C T U AT O R NCRB O P T I O N S L Mounting Brackets R O TAT I O N B O R E ( M M) 90 90 180 180 270 270 b h Model A B C D E F N Q R G H J

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

Sufx for cylinder (Rod boot) Port thread type Air cushion Rubber bumper Nil Without rod boot J Nylon tarpaulin K Heat resistant tarpaulin Rod end thread M5 x 0.8 20, 25 Rc 32 to 100 NPT 32 to 100 G 32 to 100 Nil Male rod end F Female rod end Nil Rc 20 to 100 TN NPT 20 to 100 In the case of w/rod boot, and a foot bracket or rod ange as a bracket, those parts are to be assembled at the time

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

EA) 25 1.4 32 5.5 (mm) EA EB HA Size CRJU05 CRJU 1 6.6 5.6 33.8 6.5 5.6 35.8 7.5 3.1 (mm) Rotation angle Q S JC JD BA BD A BH J BB D JB H BE BG BI JA SD BC DD UU N BF CB W CA Size 32.4 21.5 43 90 CRJB05 13.5 M4 x 0.7 5 30 11 19.5 20 M4 x 0.7 5g6 3.5 14.5 6.5 17.1 7 5.8 3.4 9.5 10h9 28 12.5 3.5 5.5 4.5 43.4 27 54 180 37.4 24 48 90 CRJB 1 16.5 M5 x 0.8 6 35 14 23.5 22 M5 x 0.8 6g6 4.5 15.5

Clean Rodless Cylinder Series CYP

Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5 67 M5

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

27 43.4 54 90 24 37.4 48 CRJB 1 23.5 35 12.5 14 9 4.5 21.1 22 8.5 7.5 6g6 14h9 M5 x 0.8 7.5 4.5 M5 x 0.8 6 15.5 13.5 16.5 5.9 32 5.5 180 30.5 50.4 61 11-6-9 10 Series CRJ Proper Auto Switch Mounting Position (Detection at rotation end) D-F9, D-M9 auto switch D-F8 auto switch Rotating angle Size Operating angle m Operating angle m Hysteresis angle Hysteresis angle B A 90 180 90 180 40 (

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

27 43.4 54 90 24 37.4 48 CRJB 1 23.5 35 12.5 14 9 4.5 21.1 22 8.5 7.5 6g6 14h9 M5 x 0.8 7.5 4.5 M5 x 0.8 6 15.5 13.5 16.5 5.9 32 5.5 180 30.5 50.4 61 11-6-9 10 Series CRJ Proper Auto Switch Mounting Position (Detection at rotation end) D-F9, D-M9 auto switch D-F8 auto switch Rotating angle Size Operating angle m Operating angle m Hysteresis angle Hysteresis angle B A 90 180 90 180 40 (

VK3000

Port size (P, A and B port) Rated voltage M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz R1, R2: M5 4 Option 5 6 24 VDC 12 VDC Nil None With bracket (Not assembled) 7 240 VAC, 50/60 Hz 9 Other Option F Option Part No. Description Part no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type

Title not found

0.1 to 0.7 Miniature regulator ARJ210 Direct operated relieving style 0.2 to 0.7 M5 to 1/8 Miniature regulator ARJ310 Direct operated relieving style 0.2 to 0.7 M5 to 1/8 Regulator AR1000-6000 Direct operated relieving style Modular style 0.05 to 0.7 0.05 to 0.85 M5 1/8 to 1 Built-in pressure gauge Space saving 0.05 to 0.85 1/8 to 1/2 Regulator with integral pressure gauge AR2001-4001 Internal

Auto Switch Guide

MLU ML1C Auto switch mounting screw M5 x 0.8 x 16 l 1.

EX120/121/122

Thread piping 2 4 6 M3 M5 SJ2000 SJ3000 0.36 0.56 25 32 SZ Port size for A, B ports Applicable cylinder size (reference) Sonic conductance: C [dm3/(sbar)] (representative value) Series Piping with one-touch fittings Metric size Inch size Thread piping 4 6 5/32" 1/4" M5 SZ3000 0.77 32 SY Port size for A, B ports Applicable cylinder size (reference) Sonic conductance: C [dm3/(sbar)] (representative

HEC_W-E

J o 0001 Serial No. Manufacturing month o: January U: July P: February V: August Q: March W: September R: April X: October Manufacturing year S: May y: November J: 2005 T: June Z: December K: 2006 L: 2007 . . . 4-1 Unit Overview 4.3 Model No. label Model No. label is attached to the unit and indicated as shown below.

High Vacuum L Type Valve

H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90