LJ1H

Particle concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering

Electric Slide Tables

C B M A W Model LES8 LES16 LES25 B side parallelism to A side 0.4 mm B side traveling parallelism to A side Refer to Graph 1.

Possible to transfer a workpiece at low-speed.

L1 L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1= L1 L1= Q1 = M Q1 K axis Q1 T axis (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x 1.25 M10 x 1.5 Rc 1/8 Q1 J axis Z axis (mm) 15 20 30 40 10 (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 4.2 5 6.8 8.5 8.2 2.5 2.5 3.3 2.5 3.3 4.2 5 20 10 15 40 30 Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 3.3

Compact Rotary Actuator Series CRQ2

MRQ L1 = L1 = L1 L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1 = L1 Q1 = M L1 = K axis T axis L1 Q1 Q1 (mm) Q1 Q1 L1 L1 Size Thread M 3 x 0.5 M 4 x 0.7 M 5 x 0.8 M 6 x 1 M 8 x 1.25 M10 x 1.5 Rc 1/8 Q1 (mm) 20 30 15 10 40 J axis Z axis (mm) Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 4.2 5 6.8 8.5 8.2 2.5 2.5 3.3 2.5 3.3 4.2 5 20 10 15 30 40 Size Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x

CRBU

Applicable shaft type: W (mm) (mm) Q1 = M Size M M3 x 0.5 Size M M3 x 0.5 40 30 20 15 40 30 20 15 2.5 2.5 2.5 2.5 2.5 2.5 2.5 2.5 L1 = M4 x 0.7 M4 x 0.7 L2 = 3.3 3.3 3.3 3.3 M5 x 0.8 M5 x 0.8 Q2 = M 4.2 4.2 Symbol: A17 Shorten the long shaft. Symbol: A18 Shorten the short shaft. Applicable shaft type: W A parallel keyway is used on the long shaft for size 40.

LJ1H

NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and L2 terminals, with nothing connected

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 max Q2 Size (mm) Q1 = M Q2 = M 10 X L1 max Q1 7 to 8 Size Y-3 M4 Y = 10 15 8.5 to 9 9 to 14 X-5 M4 Y-3.5 M5 L2 = L1 = 15 20 10 11 to 18 X-6 M5 Y-4 M6 20 30 X = 13 13 to 20 X-7 M6 Y-5 M8 30 40 15 16 to 22 X-8 M8 Y-6 M10 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

Electric Grippers

A B H LEHZ10(L)K2-4B LEHZ16(L)K2-6B LEHZ20(L)K2-10B LEHZ25(L)K2-14B LEHZ32K2-22B LEHZ40K2-30B 3 4 5 6 7 9 3 4 5 6 7 9 5.7 7 9 12 14 17 5.7 7 9 12 14 17 2 2.5 4 5 6 7 2.9 3.4 4.5 5.5 6.6 9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Flat Fingers (C) F C W J K D G 4 x MM, thread length L Thread for attachment mounting A B [mm] G Weight (g) Model J K MM A B C D F When opened When

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M L H A M W E LQ1H11-M LQ1H12-M LQ1H21-M LQ1H22-M LQ1H23-M LQ1H24-M LQ1H31-M LQ1H32-M LQ1H33-M LQ1H34-M LQ1H35-M LQ1H36-M LQ1H41-M LQ1H42-M LQ1H43-M LQ1H44-M LQ1H51-M LQ1H52-M LQ1H53-M LQ1H54-M LQ1H61-M LQ1H62-M LQ1H63-M LQ1H64-M 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 1/8 21 1/8" 25 10 11.5 10 Class 1 31.5 1/8" 15 35 16.5 14 14 H (A) L 29 1/4" W M 36.5 1/4" 20 42.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-74.)

Model Type: Standard, Piping: F (Direct), Port Size: 10 [1" (25A)], Port Thread: N (NPT), Silencer: w/o Silencer, Pilot Port Size: 1 (1/8"), Orifice Diameter: A (Pilot Valve Orifice Diameter: for ø3mm to ø5mm)

Model Type: Standard, Piping: E (Compression Fitting), Port Size: 10 [1" (25A)], Port Thread: N (NPT), Silencer: w/o Silencer, Pilot Port Size: 1 (1/8")

Model Type: Standard, Piping: F (Direct), Port Size: 10 [1" (25A)], Port Thread: N (NPT), Silencer: w/o Silencer, Pilot Port Size: 1 (1/8")

Model Type: Standard, Piping: F (Direct), Port Size: 10 [1" (25A)], Port Thread: R (Rc), Silencer: w/o Silencer, Pilot Port Size: 1 (1/8")

Model Type: Standard, Piping: F (Direct), Port Size: 10 [1" (25A)], Port Thread: R (Rc), Silencer: w/o Silencer, Pilot Port Size: 1/4", Orifice Diameter: A (Pilot Valve Orifice Diameter: for ø3mm to ø5mm)

Model Type: Standard, Piping: E (Compression Fitting), Port Size: 10 [1" (25A)], Port Thread: N (NPT), Silencer: w/o Silencer, Pilot Port Size: 1/4", Orifice Diameter: A (Pilot Valve Orifice Diameter: for ø3mm to ø5mm)

Model Type: Standard, Piping: F (Direct), Port Size: 10 [1" (25A)], Port Thread: N (NPT), Silencer: w/o Silencer, Pilot Port Size: 1/4", Orifice Diameter: A (Pilot Valve Orifice Diameter: for ø3mm to ø5mm)

Model Type: Standard, Piping: F (Direct), Port Size: 10 [1" (25A)], Port Thread: F (G), Silencer: w/o Silencer, Pilot Port Size: 1/4", Orifice Diameter: A (Pilot Valve Orifice Diameter: for ø3mm to ø5mm)

Model Type: Standard, Piping: E (Compression Fitting), Port Size: 10 [1" (25A)], Port Thread: N (NPT), Silencer: w/o Silencer, Pilot Port Size: 1 (1/8"), Orifice Diameter: A (Pilot Valve Orifice Diameter: for ø3mm to ø5mm)

Model Type: Standard, Piping: E (Compression Fitting), Port Size: 10 [1" (25A)], Port Thread: F (G), Silencer: w/o Silencer, Pilot Port Size: 1 (1/8")