VZM500

Panel mounting hole Roller plunger VZM550-01-06 VZM550-01-06S 12 (Polyacetal or hard steel roller) Hexagon nut thick 8, across flats 22 JIS Symbol (Pilot exhaust port) 0.5 MPa supply 1.5 mm P.T. 18 N F.O.F. 2.0 mm O.T. 2-3.2 mounting hole 3.5 mm T.T. Panel mounting hole Toggle lever VZM550-01-08 T.T.

Manifold Specifications

300 (Lead wire length) 3 position 171.5 Double 164 Single 106 MAX.10 79 With light/surge voltage suppressor Pg7 103 95.4 PE P EB EA n: Stations L Stations Formula 20n + 21 20n + 30 2 61 70 3 81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 16 341 350 17 361 370 18 381 390 19 401 410 20 421 430 21 441 450 22

Slit Valve

Bellows protection structure Wiper Detail drawing OPEN 528 Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Height

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

For polyurethane tubes, 22 colors other than the ones above are available. 1114 Series ZFC100/200 Made to Order Specifications Please contact SMC for detailed specifications, dimensions and delivery. Air Suction Filter with Metal Case 1 Max. operating pressure 0.5 MPa For the standard type, the max. operating pressure is up to 0 kPa.

S

NCX2N10 0.15MPa / 22 PSI NCX2N1S Min Operating Pressure 0.15MPa / 22 PSI NCX2N2S 0.1MPa / 15 PSI S E L E C T O R 5 ~ 60C / 40 ~ 140OF Ambient and Operating Fluid Temp See List Below Piston Speed (Non-Lube Type) With Shock Absorber (Option) Cushion 2~25.4mm / +0.08 ~ -1 inch Stroke Adjustment Range NCX2N10 1Kg / 2.2 lb NCX2N1S Note 1) Max Movable Load 3Kg / 6.6 lb NCX2N2S 6Kg / 13.2 lb +0.1O

Refrigerated Air Dryer

Applicable dryer Capacity Model Inlet voltage Outlet voltage A B C D E F Weight (kg) 380, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) IDF-TR500-3 15 Single phase Single turn 100 VAC (50 Hz) 110 VAC (60 Hz) IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA 230 207 190 210 160 9 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) IDF-TR500-4 22 11 13 Accessory (Option) Base Integrated with a Transformer

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J K Draft air outlet A B D E Power cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M HA AT Model IDUS3E IDUS4E Port size A B C D H K J L M E F G 297 330 315 380 260 470 540 85 130 350 325 440 Rc 1/2 ID 85 130 Rc 1/2 440 260 560 540 297 330

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 11-5-22 22 Rotary Table: Basic Type Vane Style Series MSUB These drawings indicate the condition when the B port is pressurized.

CC

.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m RE A B Flow control valve Flow control valve Throttle valve Throttle valve Stop valve REC CX CCVS20/21/22/23 CCVS02 CCVS10/11/12/13 CY Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) MQQ M Courtesy of Steven Engineering, Inc

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A 1.08 B 0.38 C 5/8-18 UNF D 20JM-08 0.94 3/4", 7/8" 1 1/16" JM-10 1.12 1.30 0.42 3/4-16 UNF 1 1/4", 1 1/2" Data JM-14 1.61 1.86 0.43 1 1/4 -12 UNF 2" 6-14-21 22 Series NCM Double Acting/Single Rod/Band Mounting Auto Switch Mounting Position and Mounting Height D-H7/H7W/H7F/H7BAL D-C7/C8 HS HS 0.63 0.63 SMC SMC 1.02 A B A B 1.14 (1.42) ( ): D-H7LF D-G59/K59 D-B5/B6/B59W

Guide Table Series MGF ø40, ø63, ø100 1

If a greater rotational torque is applied, the non-rotating rod (page 8-23-9) bends, exceeding the value of the nonrotating accuracy. 100 13 17 22 30 8-23-4 5 Guide Table Series MGF Operating Conditions Allowable horizontal load Allowable eccentric load The maximum value of load which can be applied at an eccentric position at a distance of l (mm) from the cylinder center. l l m m0 MX MTS

MXH

7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 (mm) Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30 40 50 20 20 94 6 50 25 104 70 25 6 60 114 70 30 6 30 8-2-18 17 Compact Slide Series MXH Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height A 22

Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) ; Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-) ; Types 10-, 11- and 22- are available with ball bushing or slide bearings; Types 12- and 21- have ball bushing bearings 

Clean series types include 11- (vacuum suction type) and 12- (relief type with specially treated sliding parts); Other specs include copper, fluorine and silicon-free + low particle generation (21-/22-); 11- and 22- are available with slide or ball bushing bearings; 12- and 21- are ball bushing bearings

Clean series types include 11- (vacuum suction type) and 12- (relief type with specially treated sliding parts); Other specs include copper, fluorine and silicon-free + low particle generation (21-/22-); 11- and 22- are available with slide or ball bushing bearings; 12- and 21- are ball bushing bearings

Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) ; Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-) ; Types 10-, 11- and 22- are available with ball bushing or slide bearings; Types 12- and 21- have ball bushing bearings 

Expelling contaminants outside a clean room can either be done by: (21-) exhaust relief or (22-) vacuum relief. The clean CXSL high precision ball bushing bearing type allows for smooth operation that ensures stable travel resistance. The clean CXSM slide bearing type provides lateral stability protecting it from side load impacts.

Expelling contaminants outside a clean room can either be done by: (21-) exhaust relief or (22-) vacuum relief. The clean CXSL high precision ball bushing bearing type allows for smooth operation that ensures stable travel resistance. The clean CXSM slide bearing type provides lateral stability protecting it from side load impacts.

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SHP (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV6 (3/8 Inch Face Seal, Female), Connections, Outlet: FV6 (3/8 Inch Face Seal, Female), Gauge Port, Inlet: No

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SHP (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No