CE

MI W S + 0.05 0.02 CEP1 CE1 CE2 ML2B C J G5-S Tolerances can be set with the preset value. OK/NG signal is output by the counter. Labor savings can be realized in parts inspections.

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

operating pressure (MPa) Bore sizes (mm) Min. piston speed (mm/s) Min. piston speed (mm/s) Min. piston speed (mm/s) Bore size (mm) Min. operating pressure (MPa) Bore sizes (mm) 0.04 (0.03) 20, 25, 32, 40 0.035 (0.025) 1 (0.5) 20, 25, 32, 40 0.025 0.5 0.035 (0.025) 1 (1) 0.03 0.025 1 Figures in ( ) are for 11-CM2X. 12, 16 12, 16 1 (0.5) 0.5 20, 25 20, 25 Figures in ( ) are for 11-CQSX.

EXxx-OMO0027

Reload I/O Devices : The display above shows an example of the software configuration structure of the EX600 series. : Allocate the diagnostic data to Module 11 when its setting is other than the diagnostic mode 0.

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

High-precision Digital Pressure Switch ( compatible)

filter 4 Variable at 0 to 30 s/0.01 step -82No.PS-OMV0004-H Product No.

Low Profile Slide Table Series MXF

Model Maximum allowable load mass Average speed Va (mm/s) A2 10 11 12 17 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 0.6 1 2 4 Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Note) 16 mm for MXF8-10 only. 0.7 Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model Stroke (mm) 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98 2.22 3.41 6.66

SI Unit for Vacuum Manifold

Valve-coil(s) short circuit 1 1 0...15 Valve coil of the applicable ejector has a short circuit. Pressure sensor(s) short circuit 0 1 0 At least one pressure sensor has a short circuit. Pressure sensor(s) failure or disconnection 1 1 0...15 Pressure sensor of the applicable ejector has a failure or a disconnection.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Series MHZ2 112210, 16, 20, 25 Air Gripper How to Order 11 Vacuum suction type Clean series 11 MHZ2 16 D M9N 22 MHZ2 16 D M9N Copper, fluorine and silicone-free + Low particle generation Bore size 10 16 10 mm 16 mm 22 Vacuum suction type 20 mm 20 25 mm 25 Action Number of auto switches Double acting D Nil 2 pcs. S 1 pc.

VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

VHK

(mm) Connection thread R H 1(P) 2(A) B S (Width across flats) Weight (g) L3 L4 L5 L6 M1 Q L1 L2 Model C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-04F-M5 18 2.0 3.4 1.2 19 49 11 21 51 13 4 M5 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-04F-01S VHK-06F-M5 29.1 31.6 55.4 52.9 3.5 11 41 23.8 16.5 15.8 1 8 53.9 29.6 56.9 24.3 32.6 16.5 3.5 16.8 11 7.2 21 50 11 23 53 13 M5 2.0 VHK-B1A 44.5 14.5 1 27 22

Pin Clamp Cylinder Series CKQ/CLKQ

Mounting tap: M10 x 1.5 Pin diameter: 10H7 Nil S No shim With 2 mm shims C Port b side a side ( side) b side ( side) a side Port : Mounting tap : Pin diameter : Mounting tap : Pin diameter D Clamp arm b side S 66 b side Mounting tap E The positions of the mounting taps and pin holes are different depending on the body shape. Refer to Body shapes and positions of mounting sides.

Rotary Table Series MSU

Free-mount Without Auto Switch Unit 20 90 S M SUA With Auto Switch Unit 20 90 S D SUA L R73 M Number of auto switches 1 pc. 2 pcs. S With auto switch unit Nil Nominal size (torque) For 1 piece, a right hand auto switch is installed.

Bernoulli Gripper

Body material 30 Nil 30 23 8.7 27 34 M3 x 0.5 6 8.5 3.3 10.5 2.2 8.5 0.8 11.3 11.8 2 4.2 0.8 2.8 27 P 17 S 77 ZNC 40 Nil 40 32 11 3.5 34 42.2 44 48 P 30 S 139 M4 x 0.7 8 11.5 3.6 13.5 2 8.5 1.0 10.5 12 3 5 1 5.8 60 Nil 60 47 21 10 54 64 110 P 67 S 323 *1 The stopper, vibration suppression cover, and plug weights are not included. 13 Bernoulli Gripper ZNC Series Dimensions: 80 Basic type

17

Piston speed mm/s Piston speed mm/s Select the load mass from within the range of limits shown in the graphs.

Process Valve

19 18 35 0.29 0.17 0.18 0.40 0.32 0.40 0.24 0.42 0.13 0.3 0.4 7 3 8 11 15 11 15 14 20 0.6 0.7 1 2 3 4 0.9 1.0 Port size Flow rate characteristics Weight (kg) Orifice dia.

Pilot Operated

This is the same concept representing the easy to run through as sonic conductance C (effective area). (3) Formula of flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + t When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q :Air flow rate[dm3/min(ANR)], dm3 (

XMD/XYD Series

Step 4 Step 5 O ring S valve M valve Needle seat (XLD-25) S valve seal assembly (XLD-40,50) S valve seal assembly (XLD-63,80) Wipe off the dust of the S valve and around it. Remove dust from the needle seat or S valve seal assembly. For size 25, 40 and 50, remove the dust from the initial pumping valve seal O ring.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

MRQ

(rad/s) : Rotation angle.(rad) 180 = 3.14rad t: Rotation time.

IDX-OM-O004C

M 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-2 12 R 12.1 . 12-1 12.2 . 12-1 12.3 . 12-1 12.4 . 12-2 12.5 . 12-3 13 S 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 T 14.1 . 14-1 14.2 . 14-1 14.3 . 14-1 14.4 . 14-2 14.5 . 14-3 i i i.1 () 3 i.1.1 3 i 1 i i.2 i 2 i i.2.1 i.2.2 i.2.3 50 i.2.4 i 3 i i.2.5 0 i.2.6 WARNING !