CQS

16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50

CQS

12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30,

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

CL

Same side Same side 110C Heat resistant tarpaulin K D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 D-B5 D-B6 n2 2 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

CV/MVGQ

CV Standard Stroke MVGQ Bore size (mm) Standard stroke CC 10 15, 30, 45, 60 16 15, 30, 45, 60 RB Made to Order Specifications (For details, refer to page 10-21-1.)

CV/MVGQ

CV Standard Stroke MVGQ Bore size (mm) Standard stroke CC 10 15, 30, 45, 60 16 15, 30, 45, 60 RB Made to Order Specifications (For details, refer to page 10-21-1.)

15

M2.5 x 10 1.0 M4 x 40 1.5 8 12.5 NY M3 x 0.5 6 45 30 4.2 47 45 M2.5 x 10 1.0 M4 x 40 1.5 8 12.5 NX M4 x 0.7 7.5 46 30 3.7 47 45 M2.5 x 10 1.0 M4 x 40 1.5 8 7 NM2 3.4 28 31 30 3.5 50 45 M2.5 x 10 1.0 M4 x 40 1.5 6 12.4 25 NZ M5 x 0.8 8.5 70 50 3.3 60 60 M3 x 12 1.5 M6 x 60 5.2 14 18 NY M4 x 0.7 8 70 50 3.3 60 60 M4 x 12 3.6 M6 x 60 5.2 11 18 NX M5 x 0.8 8.5 63 40 3.5 63 60 M4 x 12 3.6 M6

Table of Contents

(inch) 10-32 UNF H (Width across flats) 8.4 9.6 Connection thread UNF NPT <10-32 UNF> <10-32 UNF> Min. port size D1 Note) D2 L1 M A Weight (g) Model L2 L3 Connection threads L1 M 5 18 6 18 19 16 19 37 30 38 67 60 70 85 104 12.7 15.5 10 14 11 15.5 14 11.5 14 17.5 17 20 20.5 17.5 19.5 21 24 2.3 2.5 2.5 2.8 3.5 2.3 20 29.5 20 29.5 29.5 27 29.5 38.5 31 38.5 45 41 45 42 50 16.5 25.5 16 25.5 25.5

Cylinder with Lock

T TG1 32 DS5032 14 34 3.3 10 30 10.5 6.6 45 22 10 11.5 5 5.5 17 11 3 32.5 40 DS5040 16 40 4.3 12 35 11 6.6 55 25 10 12 5 5.5 20 13 4 38 50 DS5050 21 45 4.3 16 40 15 9 65 27 12 14 5 6.5 22 18 4 46.5 63 DS5063 21 51 4.3 16 45 15 9 75 32 12 14 5 6.5 25 18 4 56.5 80 DS5080 25 65 4.3 20 45 18 11 95 36 16 16 5 10 30 22 4 72 100 DS5100 25 75 6.3 20 55 18 11 115 41 16 16 5 10 32 22 4 89 * Supplied

Electric Actuator/Slider Type

20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 23 Actuator specications Speed [mm/s] Note 2) 10 to 500 5 to 250 12 to 500 6 to 250 16 to 500 8 to 250 20 to 500 10 to 250 Max. acceleration/deceleration [mm/s2] 3,000 Positioning repeatability [mm] 0.02 Lead [mm] 10 5 12 6 16 8 20 10 Impact/Vibration resistance [m/s2] Note 3) 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature

Battery-less

Dimensions [mm] Dimensions [mm] Model G H LEFS25E-50 100 30 LEFS25E-100 100 45 LEFS25E-150 100 45 LEFS25E-200 220 45 LEFS25E-250 220 45 LEFS25E-300 340 45 LEFS25E-350 340 45 LEFS25E-400 340 45 Model G H LEFS25E-450 460 45 LEFS25E-500 460 45 LEFS25E-550 580 45 LEFS25E-600 580 45 LEFS25E-650 580 45 LEFS25E-700 700 45 LEFS25E-750 700 45 LEFS25E-800 820 45 38 LEFS Series Battery-less Absolute

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 50 + 45 (n 2) 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 60 + 45 (n 2) 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

ISO Cylinder

15 45 45 + 45 (n 2) (n = 2, 4, 6) 10 15 45 45 + 15 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 Band mounting Band mounting (n 2) 2 15 + 40 D-C7l D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6) D-C7l D-C80 10 15 50 50 + 20 (n 2) (n = 2, 4, 6) (n = 2, 4, 6) (n = 2, 4, 6) D-H7l D-H7lW D-H7BA D-H7NF D-H7l D-H7lW D-H7BA D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5

Air Slide Table

10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

1

Dimensions CP95 Cushion Rubber bumper (Standard equipment) NCM Stroke NCA Model, Bore size (mm) Applicable stroke 12, 16 5, 10, 15, 20, 25, 30 DCQS 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 -X 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 CQ2 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 20Data 6-17-37 32 Made to Order Common Specifications: Special Port Location

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 50 45 45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55