VFN2000N

Cylinder ports should be NAMUR hole pattern. 100/200 V (50/60 Hz) 24 V 15 to +10% of rated voltage Class B or equivalent 5.0 VA/60 Hz, 5.6 VA/50 Hz 2.3 VA (1.5 W)/60 Hz, 3.4 VA (2.1 W) 9/50 Hz 1.8 W Grommet, Grommet terminal, Conduit terminal, DIN terminal Note 1) Use dry-air at low temperature. Note 2) Use turbine oil Class1 (ISO VG32), if lubricated.

CG1x-OM0006N

-2- / *3) 1 1.5 3) 1 1 () -3- 1.5 3 NBR ,, , FKM <> <> CG1 4 - GR-R-010(10g) CG5-S 542 50 2040 2 50 5 - 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10~+70-10~+60 +1.4mm 11000st 0 +1.8mm 10011500st 0 / 2063 501000mm/sec 80100 50700mm/sec (P14, [2-6-3.]) 1 () 2 6 2. 2-1.

POWER CLAMP CYLINDER

Refer to page 8 to 10. Please note that the graph should only be used as a guide as there is a tolerance of about 10% in the clamp cylinder body.

RSQ

RZQ Lever type (3) Energy absorbing Adjustable deformation MI W S Cylinder stroke (mm) 12 16 20 32 40, 50 10 10, 15 10, 15, 20 10, 15, 20 20, 25, 30 Double acting Double acting with spring loaded Single acting (Spring extend) Note 3) The lever types are applicable only to bore sizes 32, 40 and 50.

How to Order ø 6, ø 8, ø 12, ø 16, ø 20, ø 25 MXQ  A Series Air Slide Table Double-ported Type

buffer, axial piping 6 Centralized adjuster 7 Centralized adjuster (Symmetric) 8 Buffer, Centralized adjuster 9 Buffer, Centralized adjuster (Symmetric) Nil 2 S 1 n n Port Switch mounting groove Port Switch mounting groove 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 For details, refer to the next page. i Made to order 16 10, 20, 30, 40, 50, 75, 100, 125 Port Switch mounting groove

LEC-OM038xx

The cable connecting the actuator and controller (LEC) is superior in bending resistance, but should not be placed into a flexible moving tube with a radius smaller than the specified value. ( Min. 50 mm) 10. Confirm proper wiring of the product.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

3 Port Solenoid Valve Rubber Seal Series SY100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

Digital Flow Switch (Remote type sensor unit)

or less 50 oC or less Ethyl acetate Butyl acetate Nitric acid concentration 10% or less Pure water Sodium hydroxide x Super pure water Toluene Hydrofluoric acid concentration 50% or less Sulfuric acid concentration 20% or less Phosphoric acid concentration 30% or less Table symbol : Can be used, Can be used under certain condition x: Cannot be used 1: The material and fluid compatibility

XMA/XYA Series

Specifications Model Note 1 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Normally closed (Pressurize to open , spring seal) Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance

ATX-OM-F003E

Cautions 10 7. Maintenance 11 8.

90

50 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

Floating Joint

, 63 Basic JA Series (Standard) Pneumatic cylinder 0.7 MPa or less 6, 10, 15 1 MPa or less 20, 25, 32, 40, 50, 63, 80, 100, 125 140, 160, (180, 200) Basic, Foot, Flange Hydraulic cylinder 3.5 MPa or less 20, 25, 32, 40, 50, 63, 80, 100, 125 140, 160, (180, 200) JAH Series (Heavy load) Hydraulic cylinder 7 MPa or less 40, 50, 63, 80, 100 Basic, Foot, Flange Refer to the Web Catalog or Best

Air cylinder

Specifications 1-1 Specifications Fluid Air Proof pressure 1.5MPa Max. operating pressure 1.0MPa Min. operating pressure 0.05MPa -10 to +70oC. -10 to +60o Ambient and fluid temperature C with built-in magnet (No freezing) Lubrication Not required (non-lube) to 250st +1.0 mm 0 +1.4 Stroke length tolerance 251 to 1000st mm 0 +1.8 mm 1001st to 1500st 0 Cushion Air cushion Piston speed 50 to

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

0.25 to 0.7 Ambient and fluid temperature (C) 10 to 50 (No freezing.

LEC-OM036xx

CN2: TB/PC connector.31 9. 1 How to use.31 10. LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

Miniature Regulator Series ARJ210

M5 x 0.8 6 3.5 15.5 50 17.2 ARJ1020F-M5-06 22 12.8 6 VY1 Manifold Base (Option)/Dimensions G PPA 2-3.5 (Mounting hole) 31 (ARJ1020F-M5-04) 32 (ARJ1020F-M5-06) AL Applicable tubing O.D. 4, 6 (Mounting hole) IN (Common) Stations Manifold base part no. 4 6 10 B dimension A dimension 90 130 210 82 122 202 ARJM10-4 ARJM10-6 ARJM10-10 14-4-5 Miniature Regulator Series ARJ310 F.R.L.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Parts cannot be shipped separately. 1937 Series VHS20/30/40/50 Dimensions VHS20/30 VHS40/40-06/50 10 I EXH. 10 G F H I SUP. E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

VG342

/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Pilot valve option Standard type Nil 4 Energy-saving type (DC only) Y 24 VDC 12 VDC 5 6 Continuous duty type E Option 7 240 VAC, 50/60 Hz 9 Passage symbol Other External pilot Nil Option N.C.

q"s

E s .9 6 5 o 25 50 75 Inpul siqnal (%F.s.) l 25 50 75 Inpul signal (%F.S.)