SMC Corporation of America
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Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: w/o Lead Wire, Option 2: A1 (Bracket A, Vertical Mounting), Option 3: Y (w/o Operation Manual, w/o Calibration Certificate)

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Port size 4.5 4.5 L K D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN

Accessories Basic Foot Front flange Rear flange Single clevis Double clevis Center trunnion Mounting P P P P P P P P P P P P P P P P P P P P P P P P P P P P P Rod end nut Standard Pin for clevis Single knuckle joint Option Double knuckle joint (with pin) Rod boot Weight/( ): Value for steel tube (kg) 40 50 63 80 100 Bore size (mm) 1.70 (1.75) 2.70 (2.76) 4.08 (4.12) 7.30 (7.46) 10.80

2 3 4 5 6 LQHB Panel mounting nut LQNP TL TIL TLM TILM P.908 Nut insert bush LQ1-U B N TD TID TH TIH P.909 Blanking plug LQ-P P.909 Tubing plug LQ1-CP P.909 Note) Basic size With reducer 869 LQ3 Series LQ3 Series P.912 Port size Tubing O.D.

C T I N G S I N G L E R O D C Y L I N D E R Double Acting/Single Rod Non-Rotating NC J2 S P E C I A L O P T I O N S NC J2 XB6 High Temperature XB7 Low Temperature XB9 Low Speed Operation A U T O S W I T C H C A P A B L E Without (Basic) D With Built-In Magnet M O U N T I N G B Basic D Double Clevis (Except 6) L Axial Foot F Rod Side Flange T E C H N I C A L SPECIFICATIONS Fluid Air S T D

LED() /P.19 5. /P.21 6.CN1: 1 LED ->/P.19 5. ->/P.32 10.1 CPU -> CPU L RUN()L ERR() L RUN L ERR 2 / L RUN()L ERR() CC-Link ->/P.28 8.LED ->/P.77 17.C-Link 3 ALM ->/P.71 16. USB USB PC USB USB LEC-W2 COM PC COM COM COM COM PC COM LEC-W2 4 (LEC-W2) (LEC)== =USB =PC (LEC) OFF PC (LEC) (PLC )(PC ) 90 - ONOFF PLC ->/P.32 10.1 ->/P.12 3. ->/P.19 5.

L DIN rail AXT100-DR-l 5.25 12.5 (Pitch) 7.5 For l, enter a number from the No. line in the table below.

Thread type AS-D Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 U10/32 01 02 M5 x 0.8 AS-T 10-32 UNF 1/8 N ASP 1/4 ASN Made to Order AQ ASV Grease-free (Seal: Fluorine Coated) + Throttle Valve (Without Check Valve) X21 Lubricant: Vaseline X12 AK Ex.) AS1201FM-M5-23-X12 Ex.)

Free flow Controlled flow Weight (g) Critical pressure ratio Critical pressure ratio Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 M3 x 0.5 20 0.06 20 0.06 4.7 0.15 M5 x 0.8 90 0.25 80 0.22 33 1/

L/min (symbol 40) -52No.PF-OMW0004-B Flow rate characteristics for several supply units Flow range: 0.5 to 4 L/min (symbol 04) (reference value) Nil S P W -53No.PF-OMW0004-B Flow range: 2 to 16 L/min (symbol 20) (reference value) Nil S P W -54No.PF-OMW0004-B Flow range: 5 to 40 L/min (symbol 40) (reference value) Nil S P W -55No.PF-OMW0004-B Total flow characteristics for several return

N 1 * S 1 5 T L A N 9 T L A N 1 * S 1 9 T L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r p g n i t a r e p o . x a M ) 0 . 1 ( 0 5 1 e g n a r . p m e t g n i t a r e p O ) C 0 6 ~ 5 ( F 0 4 1 ~ 3 2 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T y d o B C D A e r u s s e r p e n i l d n a k

O.D. 6 I.D. 4 1051 Specialty Lubricators NALF Series Auto Feed Lubricators NALF400, 400-06, 500, 600, 800, 900 Lubricator NALF400 Tank NALT-5 s n o i t a c i f i c e p S F L A N e b u L d e e F o t u A 0 0 4 F L A N 6 0 N 0 0 4 F L A N 0 0 5 F L A N 0 0 6 F L A N 0 0 8 F L A N 0 0 9 F L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

or less Ionic state silica (SiO2) [mg/L] 50 or less Iron (Fe) [mg/L] 1.0 or less Copper (Cu) [mg/L] 0.3 or less Sulfide ion (S2) [mg/L] Should not be detected Ammonium ion (NH4+) [mg/L] 1.0 or less Residual chlorine (Cl) [mg/L] 0.3 or less Free carbon (CO2) [mg/L] 4.0 or less Reference item 6.

P AMG K 4 x 13 AFF AM B C D E F G K L M N P Q Dimensions (mm) A Port size Model IDFA22E IDFA37E AMD R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AMH AME IDFA55E, IDFA75E AMF A R B SF SFD Q E LLB D AD GD G F C M N L P K 4 x 13 R Dimensions (mm) A B C D E F G K L M N P Q Model IDFA55E IDFA75E Port size 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110) 519 900

50 or less Sulfuric acid ion (SO42) [mg/L] 50 or less p p p p p Acid consumption amount (at pH4.8) [mg/L] 50 or less Total hardness [mg/L] 70 or less [mg/L] 50 or less Calcium hardness (CaCO3) Ionic state silica (SiO2) [mg/L] 30 or less p p p p p p [mg/L] 0.3 or less Iron (Fe) Copper (Cu) [mg/L] 0.1 or less Should not be detected.

A C D P PF2M705/710W-C4(-L) 86.2 7.6 18.2 2.8 depth 8.4 PF2M705/710/725/750W -C6(-L) 86.2 8 18.2 2.8 depth 8.4 8 8 PF2M725/750W-N7(-L) 86.2 11.8 18.2 2.8 depth 8.4 PF2M711/721W-C8(-L) 88 12 20 2.8 depth 6.2 PF2M711/721W-N7(-L) 88 10.3 20 2.8 depth 6.2 2 x P 2 x P 21 2-Color Display Digital Flow Switch PF2M7(-L) Series Dimensions PF2M7mS-m1/2(-L) A 76 68 58 48 Width across flats B 18 OUT1